Probe holder for testing of a test device

• US 7,504,842 B2
• Filed: 04/11/2007
• Issued: 03/17/2009
• Est. Priority Date: 05/28/1997
• Status: Expired due to Fees

• Current Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Schwindt, Randy
• Primary Examiner(s): Nguyen; Vinh P
• Application Number:
  US11/786,633
• Publication Number:
  US 20070194803A1
• Time in Patent Office: 706 Days
• Field of Search: 324754-762, 324/72.5, 324/133, 439/482, 439/824, 174/68.1, 174/72, 174/103, 174/107
• US Class Current: 324/755.01
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01R 1/067 Measuring probes
• CPC Class Codes: G01R 1/06705 Apparatus for holding or moving single probes for moving multiple probe heads or ICs under test G01R31/2886
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
• CPC Class Codes: G01R 1/18 Screening arrangements against electric or magnetic fields, e.g. against earth's field
• CPC Class Codes: G01R 19/0023 Measuring currents or voltages from sources with high internal resistance by means of measuring circuits with high input impedance, e.g. OP-amplifiers electrostatic instruments G01R5/28; measuring electrostatic potential G01R15/165; measuring electrostatic fields G01R29/12; amplifiers per se H03F
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass
• CPC Class Codes: H01R 11/18 End pieces terminating in a probe

Abstract

A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

Claims

1. A system for probing a device under test comprising:

(a) a probing device for probing said device under test, said probing device including a first conductive area, a second conductive area, a conductive elongate probing element connected to said first conductive area in a manner suitable to probe said device under test, and said first conductive area and said second conductive area electrically isolated from one another;

(b) a probe housing detachably engageable with said probing device;

(c) said probe housing being engaged with both a first cable that includes a first conductor surrounded by a second conductor and a second cable including a third conductor surrounded by a fourth conductor;

(d) a first coupler electrically interconnects said first conductor, said third conductor, and said first conductive area when said probing device is engaged with said probe housing;

(e) a second coupler electrically interconnects said second conductor and said fourth conductor with said second conductive area when said probing device is engaged with said probe housing.

2. The system of claim 1 wherein said probe housing further includes an elongate opening in which said probing device is matingly detachably engageable therewith.

3. The system of claim 2 wherein said second coupler includes a probe housing that defines an opening having a first upright surface therein.

4. The system of claim 3 wherein said conductive area is in face-to-face contact with said first upright surface when said probing device is engaged with said probe housing.

5. The system of claim 1 wherein said second coupler comprises a portion of said probe housing in contact with said second conductive area when said probing device is engaged with said probe housing.

6. A system for probing a device under test comprising:

(a) a probing device for probing said device under test, said probing device including a first conductive area, a second conductive area, a conductive elongate probing element connected to said first conductive area in a manner suitable to probe said device under test, and said first conductive area and said second conductive area electrically isolated from one another;

(b) a probe housing detachably engageable with said probing device;

(c) a probe housing suitable for being detachably engageable with both a first cable that includes a first conductor surrounded by a second conductor and a second cable that includes a third conductor surrounded by a fourth conductor;

(d) a first coupler electrically interconnects said first conductor, said third conductor, and said first conductive area when said probing device is engaged with said probe housing;

(e) a second coupler electrically interconnects said second conductor, said fourth conductor, and said second conductive area when said probing device is engaged with said probe housing.

7. The system of claim 6 wherein said probe housing further includes an elongate opening in which said probing device is matingly detachably engageable therewith.

8. The system of claim 7 wherein said opening defines a first upright surface therein.

9. The system of claim 6 wherein said second coupler comprises a portion of said probe housing in contact with said second conductive area when said probing device is engaged with said probe housing.

10. A system for probing a device under test comprising:

(a) a probing device for probing said device under test, said probing device including a first conductive area, a conductive elongate probing element connected to said first conductive area in a manner suitable to probe said device under test;

(b) a probe housing detachably engageable with said probing device;

(c) said probe housing suitable for being detachably engageable with at least a first cable that includes a first conductor surrounded by a second conductor;

(d) a first coupler electrically interconnects said first conductor and said first conductive area when said probing device is engaged with said probe housing;

(e) a second coupler electrically interconnects said second conductor with said first conductive area when said probing device is engaged with said probe housing.

11. The system of claim 10 wherein said probe housing further includes an elongate opening in which said probing device is matingly detachably engageable therewith.

12. The system of claim 11 wherein said opening defines a first upright surface therein.