Lithographic apparatus and device manufacturing method

• US 7,505,116 B2
• Filed: 08/12/2005
• Issued: 03/17/2009
• Est. Priority Date: 07/16/2002
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Van Der Werf, Jan Evert, Fockert, George Arie Jan, Van Der Laan, Hans
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US11/202,195
• Publication Number:
  US 20050280795A1
• Time in Patent Office: 1,313 Days
• Field of Search: 355/67, 355/53, 355/55, 355/57, 355/66, 355/72, 355/75, 355/77, 356/399, 356/400, 356/401, 378/34, 378/84
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70233 Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
• CPC Class Codes: G03F 7/70258 Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
• CPC Class Codes: G03F 7/70591 Testing optical components
• CPC Class Codes: G03F 9/7015 Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

A reflector alignment system uses an alignment beam propagating through a projection system that includes a mirror group to measure the apparent relative positions of two reference marks fixed to a reference frame on opposite sides of the projection system. Any movement of mirrors in the projection system will be detected as a shift in the apparent position of the reference marks.

Claims

1. In a lithographic projection apparatus including an illuminator configured to provide a beam of radiation, a support configured to support a patterning device, the patterning device configured to pattern the beam according to a desired pattern, a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam onto a target portion of the substrate, a reflector alignment system comprising:

reflectors which form part of the projection system; and

first and second folding mirrors configured to direct an alignment beam of radiation through the projection system to and from a first reference mark provided in a fixed position on a patterning device side of the projection system and to and from a second reference mark provided in a fixed position on a substrate side of the projection system,

wherein the first folding mirror is an angled end of a first transparent rod,

wherein the first reference mark comprises a first grating at an end of the first transparent rod opposite the angled end, and

wherein the reflector alignment system is configured to measure apparent relative positions of the first reference mark and the second reference mark.

2. A reflector alignment system according to claim 1, further comprising a photodetector configured to detect an image of the second reference mark projected onto the first grating.

3. A reflector alignment system according to claim 2, wherein the second reference mark comprises a second grating, the second grating having a different pitch than the first grating, and a phase change between the first and second gratings caused by a relative displacement of the first and second reference marks is detected by the photodetector as a beat signal.

4. In a lithographic projection apparatus including an illuminator configured to provide a beam of radiation, a support configured to support a patterning device, the patterning device configured to pattern the beam according to a desired pattern, a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam onto a target portion of the substrate, a reflector alignment system comprising:

a coherent light source configured to emit a beam;

a beam splitter configured to split the beam into two beams; and

a folding mirror configured to direct one of the two beams through an electro-acoustic modulator into a region of overlap with the other of the two beams at an intersecting angle,

wherein the reflector alignment system is configured to direct an alignment beam of radiation through the projection system to measure apparent relative positions of a first reference mark provided in a fixed position on a patterning device side of the projection system and a second reference mark provided in a fixed position on a substrate side of the projection system, and

wherein the second reference mark comprises a running fringe pattern formed by interference between the two beams at the intersecting angle.

5. In a lithographic projection apparatus including an illuminator configured to provide a beam of radiation, a support configured to support a patterning device, the patterning device configured to pattern the beam according to a desired pattern, a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam onto a target portion of the substrate, a reflector alignment system comprising:

a reflector alignment system configured to direct an alignment beam of radiation through the projection system to measure apparent relative positions of a first reference mark provided in a fixed position on a patterning device side of the projection system and a second reference mark provided in a fixed position on a substrate side of the projection system,

wherein one of the first or second reference marks comprises a retro-reflector configured to direct the alignment beam through the projection system a second time.

6. A lithographic projection apparatus, comprising:

an illumination system configured to provide a beam of radiation;

a support configured to support a patterning device, the patterning device being configured to pattern the beam of radiation according to a desired pattern;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto a target portion of the substrate; and

a reflector alignment system comprising;

reflectors which form part of the projection system; and

first and second folding mirrors configured to direct an alignment beam of radiation through the projection system to and from a first reference mark provided in a fixed position on a patterning device side of the projection system and to and from a second reference mark provided in a fixed position on a substrate side of the projection system;

wherein the first folding mirror is an angled end of a first transparent rod,

wherein the first reference mark comprises a first grating at an end of the first transparent rod opposite the angled end, and

wherein the reflector alignment system is configured to measure apparent relative positions of the first reference mark and the second reference mark.

7. A lithographic projection apparatus according to claim 6, further comprising a photodetector configured to detect an image of the second reference mark projected onto the first grating.

8. A lithographic projection apparatus according to claim 7, wherein the second reference mark comprises a second grating, the second grating having a different pitch than the first grating, and a phase change between the first and second gratings caused by a relative displacement of the first and second reference marks is detected by the photodetector as a beat signal.

9. A lithographic projection apparatus according to claim 6, wherein the beam of radiation provided by the illumination system and the alignment beam of radiation have different wavelengths.

10. A lithographic projection apparatus, comprising:

an illumination system configured to provide a beam of radiation;

a support configured to support a patterning device, the patterning device being configured to pattern the beam of radiation according to a desired pattern;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto a target portion of the substrate; and

a reflector alignment system comprising;

reflectors which form part of the projection system;

a coherent light source configured to emit a beam;

a beam splitter configured to split the beam into two beams; and

a folding mirror configured to direct one of the two beams through an electro-acoustic modulator into a region of overlap with the other of the two beams at an intersecting angle,

wherein the reflector alignment system is configured to direct an alignment beam of radiation through the projection system to measure apparent relative positions of a first reference mark provided in a fixed position on a patterning device side of the projection system and a second reference mark provided in a fixed position on a substrate side of the projection system, and

wherein the second reference mark comprises a running fringe pattern formed by interference between the two beams at the intersecting angle.

11. A lithographic projection apparatus, comprising:

an illumination system configured to provide a beam of radiation;

a support configured to support a patterning device, the patterning device being configured to pattern the beam of radiation according to a desired pattern;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto a target portion of the substrate; and

a reflector alignment system comprising reflectors which form part of the projection system and configured to direct an alignment beam of radiation through the projection system to measure apparent relative positions of a first reference mark provided in a fixed position on a patterning device side of the projection system and a second reference mark provided in a fixed position on a substrate side of the projection system,

wherein one of the first or second reference marks comprises a retro-reflector configured to direct the alignment beam through the projection system a second time.

12. In a lithographic projection apparatus including an illuminator configured to provide a beam of radiation, a support configured to support a patterning device, the patterning device configured to pattern the beam according to a desired pattern, a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam onto a target portion of the substrate, a reflector alignment system comprising:

reflectors which form part of the projection system; and

first and second folding mirrors configured to direct an alignment beam of radiation through the projection system to and from a first reference mark provided in a fixed position on a patterning device side of the projection system and to and from a second reference mark provided in a fixed position on a substrate side of the projection system,

wherein the reflector alignment system is configured to measure apparent relative positions of the first reference mark and the second reference mark.

13. A lithographic projection apparatus, comprising:

an illumination system configured to provide a beam of radiation;

a support configured to support a patterning device, the patterning device being configured to pattern the beam of radiation according to a desired pattern;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto a target portion of the substrate; and

a reflector alignment system comprising;

first and second folding mirrors configured to direct an alignment beam of radiation through the projection system to and from a first reference mark provided in a fixed position on a patterning device side of the projection system and to and from a second reference mark provided in a fixed position on a substrate side of the projection system,

wherein the reflector alignment system is configured to measure apparent relative positions of the first reference mark and the second reference mark.