Modular current supply

• US 7,508,093 B2
• Filed: 12/23/2003
• Issued: 03/24/2009
• Est. Priority Date: 12/23/2002
• Status: Expired due to Fees

• Current Assignee: Hüttinger Elektronik GmbH + Co. KG
• Original Assignee: Hüttinger Elektronik GmbH + Co. KG
• Inventors: Schirmaier, Stefan, Winterhalter, Markus, Wiedemuth, Peter
• Primary Examiner(s): Jackson; Stephen W
• Assistant Examiner(s): CAVALLARI, DANIEL J
• Application Number:
  US10/743,345
• Publication Number:
  US 20040165324A1
• Time in Patent Office: 1,918 Days
• Field of Search: 363/69, 363/67, 307/18, 307/19, 307/32, 307/45, 307/58, 307/44, 307/147
• US Class Current: 307/44
• CPC Class Codes: H01J 37/32431 Constructional details of the reactor
• CPC Class Codes: H01J 37/32577 Electrical connecting means

Abstract

A current supply system includes one or more, or a plurality of current supply modules that each includes an input terminal and an output terminal and that each has a maximum output power. Multiple current supply modules are electrically combined to form a current supply unit having a maximum output power that is greater than the maximum output power of the individual current supply modules, and a control unit is connected to the current supply unit. A data connection connects the control unit to all the current supply modules of the current supply unit.

Claims

1. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of separate and distinct current supply modules each having an input terminal, an output terminal, and its own control receptacle, the current supply modules connected such that each current supply unit has a single output connection that provides a maximum output power that is greater than the maximum output power of its individual current supply modules;

a control unit plugged into the control receptacle of a first of the current supply modules, and movable to any of the control receptacles of the other current supply modules of the current supply unit; and

a data connection connecting all the current supply modules of the current supply unit to the control unit such that the control unit is able to control all of the current supply modules of the current supply unit through connection to any one control receptacle of the current supply modules of the current supply unit.

2. The current supply system of claim 1, wherein the current supply modules are power converters.

3. The current supply system of claim 1, wherein the maximum output power of all the current supply modules is substantially the same.

4. The current supply system of claim 1, wherein a plurality of first current supply systems are electrically combined to form a first current supply unit having a first maximum power output and a plurality of second current supply systems are electrically combined to form a second current supply unit having a second maximum power output different from the first maximum power output.

5. The current supply system of claim 1, wherein a control receptacle receives the control unit, and wherein exactly one current supply module of each current supply unit receives the control unit.

6. The current supply system of claim 5, wherein the current supply module that receives the control unit is adapted for connection to an external controller.

7. The current supply system of claim 6, wherein the external controller is a computer.

8. The current supply system of claim 5, wherein the control unit is adapted for connection to an external controller.

9. The current supply system of claim 8, wherein the external controller is a computer.

10. The current supply system of claim 1, wherein each current supply module includes a measuring device for measuring a current supply module output quantity.

11. The current supply system of claim 10, wherein the output quantity is selected from the group consisting of a voltage, a current, and a power.

12. The current supply system of claim 10, wherein each measuring device includes a measuring component for measuring an analog output quantity and converting the analog output quantity into a voltage, a signal matching circuit for converting the voltage from the respective measuring component, a voltage/current converter for converting the output voltage of the signal matching circuit into a current, and a resistor for generating a voltage drop.

13. The current supply system of claim 1, wherein the current supply system is disposed in a switching cabinet.

14. The current supply system of claim 1, wherein the current supply modules are current sources.

15. The current supply system of claim 1, further comprising an interlock circuit for the current supply unit, wherein the interlock circuit is adapted for connection to the current supply modules of the current supply unit.

16. The current supply system of claim 1, further comprising:

an output electrical conductor for electrically connecting the current supply modules of the current supply unit at an output side;

wherein the output electrical conductor electrically connects the output terminals of two neighboring current supply modules.

17. The current supply system of claim 16, wherein two or more current supply modules of the current supply unit are electrically connected at an input side.

18. The current supply system of claim 17, wherein all the current supply modules are electrically connected at the input side.

19. The current supply system of claim 16, further comprising an input electrical conductor that is identical in construction to the output electrical conductor.

20. The current supply system of claim 16, wherein the output electrical conductor is a conductor rail.

21. The current supply system of claim 1, wherein the control unit and the first current supply module form a master current supply module that includes a connection between the control unit and the first current supply module for controlling the first current supply module through the control unit, and the control unit when moved to another of the control receptacles of the other current supply modules of the current supply unit forms a master current supply module with that current supply module.

22. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of current supply modules each having an input terminal, an output terminal, and a control receptacle, the current supply modules connected such that each current supply unit has a maximum output power that is greater than the maximum output power of its individual current supply modules;

a control unit connected to one of the control receptacles and movable to any of the control receptacles of the other current supply modules of the current supply unit; and

a data connection connecting all the current supply modules of the current supply unit to the control unit such that the control unit is able to control all of the current supply modules of the current supply unit through connection to any one control receptacle of the current supply modules of the current supply unit, wherein each current supply module includes a measuring device for measuring a current supply module output quantity and wherein measuring signals of the current supply modules are supplied to the control unit of the current supply unit in parallel via the data connection.

23. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of current supply modules each having an input terminal, an output terminal, and a control receptacle, the current supply modules connected such that each current supply unit has a maximum output power that is greater than the maximum output power of its individual current supply modules;

a control unit connected to one of the control receptacles and movable to any of the control receptacles of the other current supply modules of the current supply unit;

a data connection connecting all the current supply modules of the current supply unit to the control unit such that the control unit is able to control all of the current supply modules of the current supply unit through connection to any one control receptacle of the current supply modules of the current supply unit; and

an output electrical conductor for electrically connecting the current supply modules of the current supply unit at an output side,

wherein the output electrical conductor electrically connects the output terminals of two neighboring current supply modules and wherein the input terminal includes a plurality of connectors that correspond to a number of phases of a power line connection, and the output terminal includes two connectors, which are disposed in different conductor planes, and through which the conductors may be connected to corresponding connectors of neighboring current supply modules.

24. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of current supply modules each having an input terminal, an output terminal, and a control receptacle, the current supply modules connected such that each current supply unit has a maximum output power that is greater than the maximum output power of its individual current supply modules;

a control unit connected to one of the control receptacles and movable to any of the control receptacles of the other current supply modules of the current supply unit;

a data connection connecting all the current supply modules of the current supply unit to the control unit such that the control unit is able to control all of the current supply modules of the current supply unit through connection to any one control receptacle of the current supply modules of the current supply unit;

an output electrical conductor for electrically connecting the current supply modules of the current supply unit at an output side;

wherein the output electrical conductor electrically connects the output terminals of two neighboring current supply modules; and

insulative distribution elements for connecting the conductors with the terminals, wherein the distribution elements each comprise receptacles for receiving ends of the conductors.

25. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of substantially similar, separate, and distinct power converter modules having an input terminal, an output terminal, and its own control receptacle, the power converter modules connected such that each current supply unit has a single output connection that provides a maximum output power that is greater than the maximum output power of its individual power converter modules;

a control unit plugged into the control receptacle of a first of the current supply modules, and movable to any of the control receptacles of the other current supply modules of the current supply unit; and

a data connection connecting all the power converter modules of the current supply unit to the control unit such that the control unit is able to control all of the power converter modules of the current supply unit through connection to any one control receptacle of the power converter modules of the current supply unit; and

an output electrical conductor for electrically connecting the power converter modules of the current supply unit at an output side,

wherein the output electrical conductor electrically connects the output terminals of two neighboring power converter modules.

26. The current supply system of claim 25, wherein a plurality of first current supply systems are electrically combined to form a first current supply unit having a first maximum power output and a plurality of second current supply systems are electrically combined to form a second current supply unit having a second maximum power output different from the first maximum power output.

27. The current supply system of claim 25, wherein the control receptacle receives the control unit, and wherein exactly one power converter module of each current supply unit receives the control unit.

28. The current supply system of claim 27, wherein the power converter module that receives the control unit is adapted for connection to an external controller.

29. The current supply system of claim 28, wherein the external controller is a computer.

30. The current supply system of claim 27, wherein the control unit is adapted for connection to an external controller.

31. The current supply system of claim 30, wherein the external controller is a computer.

32. The current supply system of claim 25, wherein each power converter module includes a measuring device for measuring a power converter module output quantity.

33. The current supply system of claim 32, wherein the output quantity is selected from the group consisting of a voltage, a current, and a power.

34. The current supply system of claim 32, wherein each measuring device includes a measuring component for measuring an analog output quantity and converting the analog output quantity into a voltage, a signal matching circuit for converting the voltage from the respective measuring component, a voltage/current converter for converting the output voltage of the signal matching circuit into a current, and a resistor for generating a voltage drop.

35. The current supply system of claim 25, wherein the current supply system is disposed in a switching cabinet.

36. The current supply system of claim 25, further comprising an interlock circuit for the current supply unit, wherein the interlock circuit is adapted for connection to the power converter modules of the current supply unit.

37. The current supply system of claim 25, wherein two or more power converter modules of the current supply unit are electrically connected at an input side.

38. The current supply system of claim 37, wherein all the power converter modules are electrically connected at the input side by an input electrical conductor that is identical in construction with the output electrical conductor.

39. The current supply system of claim 25, further comprising an input electrical conductor that is identical in construction to the output electrical conductor.

40. The current supply system of claim 25, wherein the output electrical conductor is a conductor rail.

41. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of substantially similar power converter modules having an input terminal, an output terminal, and a control receptacle, the power converter modules connected such that each current supply unit has a maximum output power that is greater than the maximum output power of its individual power converter modules;

a control unit connected to one of the control receptacles and movable to any of the control receptacles of the other power converter modules of the current supply unit;

a data connection connecting all the power converter modules of the current supply unit to the control unit such that the control unit is able to control all of the power converter modules of the current supply unit through connection to any one control receptacle of the power converter modules of the current supply unit; and

an output electrical conductor for electrically connecting the power converter modules of the current supply unit at an output side;

wherein the output electrical conductor electrically connects the output terminals of two neighboring power converter modules, wherein each power converter module includes a measuring device for measuring a power converter module output quantity and wherein the measuring signals of the power converter modules are supplied to the control unit of the current supply unit in parallel via the data connection.

42. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of substantially similar power converter modules having an input terminal, an output terminal, and a control receptacle, the power converter modules connected such that each current supply unit has a maximum output power that is greater than the maximum output power of its individual power converter modules;

a control unit connected to one of the control receptacles and movable to any of the control receptacles of the other power converter modules of the current supply unit;

a data connection connecting all the power converter modules of the current supply unit to the control unit such that the control unit is able to control all of the power converter modules of the current supply unit through connection to any one control receptacle of the power converter modules of the current supply unit; and

an output electrical conductor for electrically connecting the power converter modules of the current supply unit at an output side,

wherein the output electrical conductor electrically connects the output terminals of two neighboring power converter modules and wherein the input terminal includes a plurality of connectors that correspond to a number of phases of a power line connection, and the output terminal includes two connectors, which are disposed in different conductor planes, and through which the conductors may be connected to corresponding connectors of neighboring power converter modules.

43. A current supply system for a plasma gas discharge application, the current supply system comprising one or more current supply units each comprising:

a plurality of substantially similar power converter modules having an input terminal, an output terminal, and a control receptacle, the power converter modules connected such that each current supply unit has a maximum output power that is greater than the maximum output power of its individual power converter modules;

a control unit connected to one of the control receptacles and movable to any of the control receptacles of the other power converter modules of the current supply unit;

a data connection connecting all the power converter modules of the current supply unit to the control unit such that the control unit is able to control all of the power converter modules of the current supply unit through connection to any one control receptacle of the power converter modules of the current supply unit;

an output electrical conductor for electrically connecting the power converter modules of the current supply unit at an output side;

wherein the output electrical conductor electrically connects the output terminals of two neighboring power converter modules; and

insulative distribution elements for connecting the conductors with the terminals, wherein the distribution elements each comprise receptacles for receiving ends of the conductors.

44. A method of providing an electrical current to a plasma gas discharge application, the method comprising:

providing one or more separate and distinct current supply units each comprising a plurality of current supply modules each having an input terminal, an output terminal, and its own control receptacle, each current supply module has a maximum output power;

establishing an electrical connection between the current supply modules of the current supply unit such that each current supply unit has a single output connection that provides a maximum output power that is greater than the maximum output power of its individual current supply modules;

plugging a control unit into the control receptacle of a first of the current supply modules, wherein the control unit is movable to any of the control receptacles of the other current supply modules of the current supply unit;

controlling the current supply unit with the control unit;

connecting all of the current supply modules of the current supply unit to the control unit such that the control unit is able to control all of the current supply modules of the current supply unit through connection to any one control receptacle of the current supply modules of the current supply unit; and

outputting the output power of the current supply unit.

45. The method of claim 44, further comprising:

establishing an electrical connection between multiple first current supply modules to form a first current supply unit having a first maximum power output; and

establishing an electrical connection between multiple second current supply modules to form a second current supply unit having a second maximum power output different from the first maximum power output.

46. The method of claim 45, further comprising reconfiguring the established electrical connection between the multiple first current supply modules to form the first current supply unit having another first maximum power output that is different from the first maximum power output.

47. The method of claim 46, wherein reconfiguring comprises changing the electrical connection between the multiple first current supply modules.

48. The method of claim 44, further comprising inserting the control unit into only one of the current supply modules.

49. The method of claim 44, further comprising inserting the control unit into the control receptacle of a current supply module.

50. The method of claim 44, further comprising electrically connecting two neighboring current supply modules of the current supply unit at an output side with an output electrical conductor.

51. The method of claim 50, further comprising electrically connecting two neighboring current supply modules of the current supply unit at an input side with an input electrical conductor.