HBAR oscillator and method of manufacture
First Claim
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1. A method of fabricating an oscillator, the method comprising:
- providing a substrate;
fabricating a high tone bulk acoustic resonator (HBAR), wherein the HBAR includes a portion of the substrate;
fabricating a film bulk acoustic resonator (FBAR) filter over the substrate; and
removing a portion of the substrate to provide a desired substrate thickness.
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Abstract
An oscillator comprises a substrate and a high tone bulk acoustic resonator (HBAR), which includes a portion of the substrate. The oscillator also comprises a film bulk acoustic resonator (FBAR) filter disposed over the substrate. The filter comprises a plurality of FBAR devices. The oscillator also comprises a plurality of acoustic isolators disposed in the substrate, wherein one of the isolators is disposed beneath each of the FBAR devices. A method of fabricating an oscillator is also disclosed.
279 Citations
20 Claims
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1. A method of fabricating an oscillator, the method comprising:
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providing a substrate; fabricating a high tone bulk acoustic resonator (HBAR), wherein the HBAR includes a portion of the substrate; fabricating a film bulk acoustic resonator (FBAR) filter over the substrate; and removing a portion of the substrate to provide a desired substrate thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An oscillator, comprising:
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a substrate; a high tone bulk acoustic resonator (HBAR), which includes a portion of the substrate; a film bulk acoustic resonator (FBAR) filter disposed over the substrate, wherein the filter comprises a plurality of FBAR devices; and a plurality of acoustic isolators disposed in the substrate, wherein one of the isolators is disposed beneath each of the FBAR devices. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification