Lithographic apparatus and device manufacturing method utilized to reduce quantization influence of datapath SLM interface to dose uniformity
First Claim
1. A lithography apparatus, comprising:
- an array of individually controllable elements that are configured to modulate a beam of radiation;
a first datapath section that is configured to convert data defining a requested dose pattern into a stream of setpoint data defining a sequence of setpoints for the array of individually controllable elements and that comprises a noise controller that is configured to incorporate noise of a predetermined magnitude into the stream of setpoint data;
a second datapath section configured to store and reproduce the stream of setpoint data for the array of individually controllable elements; and
a quantization device configured to digitize the stream of setpoint data before it is transmitted from the first datapath section to the second datapath section.
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Abstract
A lithography method and system comprise an array of individually controllable elements, a first datapath section, a second datapath section, and a quantization device. The array of individually controllable elements modulates a beam of radiation. The first datapath section converts data defining a requested dose pattern into a stream of setpoint data defining a desired sequence of setpoints for the array of individually controllable elements. The second datapath section stores and reproduces the stream of setpoint data for the array of individually controllable elements. The quantization device digitizes the stream of setpoint data before it is passed from the first datapath section to the second datapath section. The first datapath section further comprises a noise controller configured to incorporate noise of a predetermined magnitude into the stream of setpoint data before it is digitized by the quantization device.
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Citations
10 Claims
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1. A lithography apparatus, comprising:
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an array of individually controllable elements that are configured to modulate a beam of radiation; a first datapath section that is configured to convert data defining a requested dose pattern into a stream of setpoint data defining a sequence of setpoints for the array of individually controllable elements and that comprises a noise controller that is configured to incorporate noise of a predetermined magnitude into the stream of setpoint data; a second datapath section configured to store and reproduce the stream of setpoint data for the array of individually controllable elements; and a quantization device configured to digitize the stream of setpoint data before it is transmitted from the first datapath section to the second datapath section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A device manufacturing method, comprising:
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converting data defining a requested dose pattern to a stream of setpoint data defining a desired sequence of setpoints of an array of individually controllable elements; incorporating noise into the stream of setpoint data; digitizing the stream of setpoint data; storing the stream of setpoint data; reproducing the stream of setpoint data, such that the array of individually controllable elements modulates a beam of radiation based on the stream of setpoint data; and projecting the modulated beam onto a substrate.
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Specification