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Magnetic MEMS sensors

  • US 7,509,748 B2
  • Filed: 09/01/2006
  • Issued: 03/31/2009
  • Est. Priority Date: 09/01/2006
  • Status: Expired due to Fees
First Claim
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1. A magnetic field sensor comprising:

  • a substrate having a surface;

    a first magneto-impedence magnetic field detector positioned on the surface;

    a second magneto-impedence magnetic field detector positioned on the surface proximate to the first magneto-impedence magnetic field detector; and

    a third magnetic field detector positioned on the surface proximate to the first and second magneto-impedence magnetic field detectors, the third magnetic field detector being orthogonal to the surface of the substrate,wherein each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions,wherein the third magnetic field detector comprises pancake coils or a thin film magneto-electric magnetic field detector.

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