Magnetic MEMS sensors
First Claim
1. A magnetic field sensor comprising:
- a substrate having a surface;
a first magneto-impedence magnetic field detector positioned on the surface;
a second magneto-impedence magnetic field detector positioned on the surface proximate to the first magneto-impedence magnetic field detector; and
a third magnetic field detector positioned on the surface proximate to the first and second magneto-impedence magnetic field detectors, the third magnetic field detector being orthogonal to the surface of the substrate,wherein each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions,wherein the third magnetic field detector comprises pancake coils or a thin film magneto-electric magnetic field detector.
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Abstract
The disclosure relates to micro-electromechanical systems (MEMS) and magnetic MEMS sensors. The sensors include a substrate having a surface, a first magnetic field detector positioned on the surface, a second magnetic field detector positioned on the surface proximate to the first magnetic field detector, and a third magnetic field detector positioned on the surface proximate to the first and second magnetic field detectors. Each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions. In certain embodiments, the magnetic MEMS sensors may be useful as electronic compasses. The disclosure also relates to fabricating a magnetic MEMS device, such as an electronic compass, from or on a single wafer, which includes multiple MEMS sensors.
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Citations
22 Claims
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1. A magnetic field sensor comprising:
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a substrate having a surface; a first magneto-impedence magnetic field detector positioned on the surface; a second magneto-impedence magnetic field detector positioned on the surface proximate to the first magneto-impedence magnetic field detector; and a third magnetic field detector positioned on the surface proximate to the first and second magneto-impedence magnetic field detectors, the third magnetic field detector being orthogonal to the surface of the substrate, wherein each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions, wherein the third magnetic field detector comprises pancake coils or a thin film magneto-electric magnetic field detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A compass comprising:
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a substrate having a first, second, third and fourth surface, wherein the first and second surface are substantially parallel and the third and fourth surface are each sloped relative to the first and second surface; a first magnetic field detector positioned on the second surface; a second magnetic field detector positioned on the third surface; and a third magnetic field detector positioned on the fourth surface proximate to and substantially orthogonal to both the first and second magnetic field detectors, wherein each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A three-dimensional compass comprising:
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a base having a surface oriented relative to an external magnetic field; a structure formed on the surface, wherein the structure comprises a plurality of side faces, wherein each side face defines an acute angle relative to line drawn normal to the surface, and wherein each side face converges to an apex defining a generally substantially planar plateau substantially parallel to the surface; a first magneto-impedence magnetic field detector positioned on the plateau; a second magneto-impedence magnetic field detector positioned on one of the side faces, wherein the second magneto-impedence magnetic field detector is positioned substantially orthogonal to the first magneto-impedence magnetic field detector; and a third magnetic field detector positioned on one of the side faces not containing the second magneto-impendence magnetic field detector, wherein the third magnetic field detector is positioned substantially orthogonal to both the first and second magneto-impedence magnetic field detectors, wherein each of the first, second and third magnetic field detector are capable of detecting external magnetic fields that are mutually orthogonal along three directions. - View Dependent Claims (19, 20, 21, 22)
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Specification