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MEMS capacitive bending and axial strain sensor

  • US 7,509,870 B2
  • Filed: 10/25/2006
  • Issued: 03/31/2009
  • Est. Priority Date: 10/26/2005
  • Status: Active Grant
First Claim
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1. A micro electro-mechanical system (MEMS) capacitive bending and axial strain sensor comprising:

  • two independent comb structures capable of independent movement relative to each other, wherein the comb structures comprise spaced apart members arranged such that the comb structures together form a capacitor to provide a capacitance;

    non-conductive glass structures attached to each comb structure; and

    a substrate, wherein the non-conductive glass structures are attached to the substrate, wherein one or both of axial strain or bending strain in the substrate is shown by a change in capacitance provided by the comb structures;

    wherein the sensor consists of the following materials;

    silicon, silicon-dioxide, an electrically conductive epoxy, and glass.

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