MEMS capacitive bending and axial strain sensor

• US 7,509,870 B2
• Filed: 10/25/2006
• Issued: 03/31/2009
• Est. Priority Date: 10/26/2005
• Status: Active Grant

• Current Assignee: Globus Medical, Inc.
• Original Assignee: OrthoData Technologies, LLC
• Inventors: Aebersold, Julia W., Walsh, Kevin, Crain, Mark, Voor, Michael
• Primary Examiner(s): Patel; Harshad
• Assistant Examiner(s): ROY, PUNAM P
• Application Number:
  US11/552,547
• Publication Number:
  US 20070256502A1
• Time in Patent Office: 888 Days
• Field of Search: 737/75, 737/77, 737/80, 257/417
• US Class Current: 73/780
• CPC Class Codes: G01L 1/148 using semiconductive material, e.g. silicon

Abstract

A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.

Claims

1. A micro electro-mechanical system (MEMS) capacitive bending and axial strain sensor comprising:

two independent comb structures capable of independent movement relative to each other, wherein the comb structures comprise spaced apart members arranged such that the comb structures together form a capacitor to provide a capacitance;

non-conductive glass structures attached to each comb structure; and

a substrate, wherein the non-conductive glass structures are attached to the substrate, wherein one or both of axial strain or bending strain in the substrate is shown by a change in capacitance provided by the comb structures;

wherein the sensor consists of the following materials;

silicon, silicon-dioxide, an electrically conductive epoxy, and glass.

2. The MEMS capacitive bending and axial strain sensor as recited in claim 1, wherein the spaced apart members comprise interdigitated fingers with a vertical dimension that exceeds the width of the interdigitated fingers.

3. The MEMS capacitive bending and axial strain sensor as recited in claim 1 wherein each comb structure is electrically isolated from the substrate via the glass structures.

4. The MEMS capacitive bending and axial strain sensor as recited in claim 2, wherein the interdigitated fingers each have sidewalls that form parallel plates of a capacitor.

5. The MEMS capacitive bending and axial strain sensor as recited in claim 2, wherein the number of interdigitated fingers for each comb structure is selected to achieve a desired capacitance.

6. The MEMS capacitive bending and axial strain sensor as recited in claim 2, wherein the length of the interdigitated fingers for each comb structure and the length of the comb structure are selected to achieve a desired capacitance.

7. The MEMS capacitive bending and axial strain sensor as recited in claim 1, wherein the comb structures are elevated above the substrate by the glass structures.

8. The MEMS capacitive bending and axial strain sensor as recited in claim 1 wherein each comb structure is electrically isolated from each other.

9. The MEMS capacitive bending and axial strain sensor as recited in claim 1, wherein the glass structures attached to the bottom of each comb structure are configured to increase displacement of the comb structures giving an increase in sensitivity.

10. The MEMS capacitive bending and axial strain sensor as recited in claim 1, wherein the independent comb structures comprise interdigitated fingers having a lateral spacing and sidewalls forming parallel plates with overlapping areas;

the independent comb structures being movable in both lateral and vertical directions in response to the bending action, the movement providing a change in the lateral spacing and the overlapping areas causing the change in capacitance.

11. A three-dimensional micro electro-mechanical system (MEMS) bending and axial capacitive strain sensor comprising:

(a) a dual comb structure;

(b) a plurality of glass pads connected to the dual comb structure and attachable to a substrate;

(c) an electrically conductive epoxy associated with the dual comb structure; and

(d) a pair of electrical wires connected to the electrically conductive epoxy;

wherein the dual comb structure further comprises;

(i) a first comb portion having a set of fingers, the fingers having sidewalls;

(ii) a second comb portion having a set of fingers, the fingers having sidewalls, wherein the first and second comb portions are arranged such that the set of fingers of the first comb portion and the set of fingers of the second comb portion are interdigitated and spaced apart, wherein the interidigitated fingers form a capacitor;

(iii) a first anchor portion located at one end of the dual comb structure and connected to one of the glass pads, wherein the first anchor portion receives the electrically conductive epoxy; and

(iv) a second anchor portion located at an opposite end of the dual comb structure and connected to another one of the glass pads, wherein the second anchor portion receives the electrically conductive epoxy;

wherein the dual comb structure is configured such that the sensor detects one or both of axial strain or bending strain in the substrate by a change in capacitance actuated by strain in the substrate.

12. The MEMS bending and axial capacitive strain sensor of claim 11, wherein the sets of fingers have overlapping areas;

the capacitance change being achieved by a lateral and vertical movement of the sets of fingers, the movement providing a change in spacing between the set of fingers and a change in the overlapping areas of the set of fingers.