Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement

• US 7,511,265 B2
• Filed: 05/05/2006
• Issued: 03/31/2009
• Est. Priority Date: 08/11/2004
• Status: Active Grant

• Current Assignee: Bruker Technologies Ltd. (Bruker Corporation)
• Original Assignee: Metrosol Inc. (Bruker Corporation)
• Inventors: Harrison, Dale A., Walsh, Phillip
• Primary Examiner(s): Porta; David P
• Assistant Examiner(s): Baker; David S
• Application Number:
  US11/418,846
• Publication Number:
  US 20070181795A1
• Time in Patent Office: 1,061 Days
• Field of Search: 250/252.1, 356/448
• US Class Current: 250/252.1
• CPC Class Codes: G01N 21/274 Calibration, base line adjustment, drift correction
• CPC Class Codes: G01N 21/33 using ultraviolet light G01N21/39 takes precedence
• CPC Class Codes: G01N 21/55 Specular reflectivity

Abstract

A reflectometer calibration technique is provided that may include the use of two calibration samples in the calibration process. Further, the technique allows for calibration even in the presence of variations between the actual and assumed properties of at least one or more of the calibration samples. In addition, the technique utilizes a ratio of the measurements from the first and second calibration samples to determine the actual properties of at least one of the calibration samples. The ratio may be a ratio of the intensity reflected from the first and second calibration samples. The samples may exhibit relatively different reflective properties at the desired wavelengths. In such a technique the reflectance data of each sample may then be considered relatively decoupled from the other and actual properties of one or more of the calibration samples may be calculated. The determined actual properties may then be utilized to assist calibration of the reflectometer.

Claims

1. A method of calibrating a reflectometer, comprising:

providing a first calibration sample and a second calibration sample, wherein the reflectance properties of the first calibration sample and the second calibration sample are different;

collecting a first set of data from the first calibration sample;

collecting a second set of data from the second calibration sample; and

utilizing a ratio of at least a portion of the first set of data and at least a portion of the second set of data to determine a property of at least one of the first and second calibration samples so that reflectance data from an unknown sample may be calibrated.

2. The method of claim 1, wherein the first set of data obtained from the first calibration sample includes intensity data and the second set of data obtained from the second calibration sample includes intensity data.

3. The method of claim 2, wherein a reflectance ratio is obtained from the intensity data of the first and second calibration samples.

4. The method of claim 3, wherein at least one of the first and second calibration samples is expected to exhibit variations from its assumed physical properties.

5. The method of claim 4, wherein an actual reflectance is obtained for at least the one of the first and second calibration samples that is expected to exhibit variations from its assumed physical properties.

6. The method of claim 5, wherein a source intensity profile is obtained through use of the actual reflectance and wherein the reflectance of an unknown sample is calibrated by use of the source intensity profile.

7. The method of claim 3, wherein a source intensity profile is obtained through use of the reflectance ratio and wherein a reflectance of the unknown sample is calibrated by use of the source intensity profile.

8. The method of claim 7, wherein the source intensity profile is obtained by first analyzing the reflectance ratio using thin film models and a regression analysis to adjust one or more properties of one or both of the first and second calibration samples and wherein a result of the analysis is used to derive an absolute reflectance of one or both of the first and second calibration samples, wherein the absolute reflectance is used to obtain the source intensity profile via I₀=I_cal/R_cal, wherein a reflectance of an unknown sample is calibrated by use of the determined source intensity profile via R=I_r/I₀.

9. The method of claim 3, wherein one or both of the first calibration sample and the second calibration sample have one or more contaminant layers, wherein one or more properties of the contaminant layers are determined through analysis of the reflectance ratio.

10. The method of claim 1, wherein at least one of the first and second calibration samples is expected to exhibit variations from its assumed physical properties.

11. The method of claim 10, wherein an initial source intensity profile is calculated utilizing an assumed reflectance of the at least one of the first and second calibration samples that are expected to exhibit variations from its assumed physical properties.

12. The method of claim 11, wherein a recalculated source intensity profile is calculated utilizing a calculated actual reflectance of the at least one of the first and second calibration samples that are expected to exhibit variations from its assumed physical properties.

13. The method of claim 10, wherein variations are expected in the assumed physical properties of both the first and second calibration samples.

14. The method of claim 1, wherein the first calibration sample has a thicker oxide as compared to a thinner oxide on the second calibration sample.

15. The method of claim 14, wherein the first calibration sample comprises an SiO2/Si structure and the second calibration sample comprises an SiO2/Si structure.

16. The method of claim 15, wherein the thinner oxide on the second calibration sample is a native oxide.

17. The method of claim 1, wherein the first set of data from the first calibration sample is decoupled from the second set of data from the second calibration sample.

18. The method of claim 1, wherein one or both of the first calibration sample and the second calibration sample have one or more contaminant layers, wherein one or more properties of the contaminant layers are determined through analysis of the ratio.

19. A method of calibrating a reflectometer which operates at wavelengths that include at least some wavelengths below deep ultra-violet (DUV) wavelengths, comprising:

providing a first calibration sample and a second calibration sample, wherein the reflectance properties of the first calibration sample and the second calibration sample are different;

collecting a first set of data from a first calibration sample, the first set of data including at least some intensity data collected for wavelengths below DUV wavelengths;

collecting a second set of data from the second calibration sample, the second set of data including at least some intensity data collected for wavelengths below DUV wavelengths; and

utilizing a ratio based on the first set of data and the second set of data to determine a reflectance of at least one of the first calibration sample and the second calibration sample to assist in calibrating the reflectometer at wavelengths that include at least some wavelengths below DUV wavelengths.

20. The method of claim 19, wherein a reflectance ratio is obtained from the intensity data of the first and second calibration samples.

21. The method of claim 20, wherein at least one of the first and second calibration samples is expected to exhibit variations from its assumed physical properties.

22. The method of claim 21, wherein an actual reflectance is obtained for at least the one of the first and second calibration samples that is expected to exhibit variations from its assumed physical properties.

23. The method of claim 22, wherein a source intensity profile is obtained through use of the actual reflectance and wherein the reflectance of an unknown sample is calibrated by use of the source intensity profile.

24. The method of claim 20, wherein a source intensity profile is obtained through use of the reflectance ratio and wherein the reflectance of an unknown sample is calibrated by use of the source intensity profile.

25. The method of claim 20, wherein one or both of the first calibration sample and the second calibration sample have one or more contaminant layers, wherein one or more properties of the contaminant layers are determined through analysis of the reflectance ratio.

26. The method of claim 19, wherein the first calibration sample has a thicker oxide as compared to a thinner oxide on the second calibration sample.

27. The method of claim 26, wherein the first calibration sample comprises an SiO2/Si structure and the second calibration sample comprises an SiO2/Si structure.

28. The method of claim 27, wherein the thinner oxide on the second calibration sample is a native oxide.

29. The method of claim 19, wherein:

an assumed reflectance of the first calibration sample and the first set of data are utilized to calculate an initial source intensity profile,

a reflectance of the second calibration sample is obtained utilizing the second set of data and the initial source intensity profile,

a ratio of assumed reflectance of the first calibration sample and the obtained reflectance of the second calibration sample is used to determine an actual property of the first calibration sample, and

a recalculated source intensity profile is obtained utilizing a reflectance of the first calibration sample that is based upon the determined actual property.

30. The method of claim 29 wherein the actual property of the first calibration sample is a material thickness.

31. The method of claim 19, wherein the reflectance properties of the first and second calibration samples are decoupled from each other such that actual physical properties of at least one of the first and second calibration samples may be calculated based upon the obtained intensity data of the first and second calibration samples.

32. The method of claim 19, wherein:

the ratio is based upon a ratio of intensities obtained from the first and second calibration samples,

a source intensity profile is obtained through use of the ratio, and a reflectance of a unknown sample is calibrated by use of the source intensity profile.

33. The method of claim 19, wherein at least one of the first and second calibration samples is expected to exhibit variations from its assumed physical properties.

34. The method of claim 19, wherein one or both of the first calibration sample and the second calibration sample have one or more contaminant layers, wherein one or more properties of the contaminant layers are determined through analysis of the ratio.

35. A method of analyzing reflectometer data, comprising:

providing a first reflectometer sample and at least a second reflectometer sample, wherein the optical response properties of the first reflectometer sample and the second reflectometer sample are different;

collecting a first set of optical response data from the first reflectometer sample;

collecting a second set of optical response data from the second reflectometer sample; and

determining at least one property of at least one of the first and second reflectometer samples by utilizing the first set and second set of optical response data in a manner independent of an incident reflectometer intensity that is utilized when collecting the first and second set of optical response data,

wherein a source intensity profile is obtained through use of a ratio of intensities obtained from the first and second reflectometer samples, and a reflectance of a unknown sample is calibrated by use of the source intensity profile.

36. The method of claim 35, wherein the property is a variation in a physical property of at least one of the first and second reflectometer samples.

37. The method of claim 36, wherein at least one of the first and second reflectometer samples is a calibration sample.

38. The method of claim 37, wherein the first and second reflectometer samples are both calibration samples.

39. The method of claim 35, wherein the determining step further comprises:

utilizing a ratio of at least a portion of the first set of optical response data and at least a portion of the second set of optical response data.

40. The method of claim 39, wherein the ratio is based on the optical intensity measured from the first sample and the second sample.

41. The method of claim 39, wherein utilization of the ratio allows for determination of a change in the at least one property.