Universal wafer carrier for wafer level die burn-in

• US 7,511,520 B2
• Filed: 08/20/2007
• Issued: 03/31/2009
• Est. Priority Date: 08/29/1990
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Corbett, Tim J., Farnworth, Warren M., Wood, Alan G.
• Primary Examiner(s): Karlsen; Ernest F
• Application Number:
  US11/841,566
• Publication Number:
  US 20070285115A1
• Time in Patent Office: 589 Days
• Field of Search: 324754-765
• US Class Current: 324/757.03
• CPC Class Codes: G01R 31/2863 Contacting devices, e.g. sockets, burn-in boards or mounting fixtures in general G01R1/04

Abstract

A reusable burn-in/test fixture for testing unsingulated dice on a semiconductor wafer consisting of two halves. The first half of the test fixture is a wafer cavity plate for receiving the wafer, and the second half establishes electrical communication between the wafer and electrical testing equipment. A rigid substrate has conductors thereon which establish electrical contact with the wafer. The test fixture need not be opened until the burn-in and electrical testing are completed. After burn-in stress and electrical testing, it is possible to establish interconnection between the single die or separate and package dice into discrete parts, arrays or clusters, either as singulated parts or as arrays.

Claims

1. A fixture for testing a wafer of semiconductor dice comprising:

a first rigid support member for receiving the semiconductor dice in wafer form, the first rigid support member having a plurality of contact members thereon, the plurality of contact members including a plurality of contact tips including at least one contact area for mating with a plurality of bumps on the wafer and a plurality of connectors for connection with test circuitry connected to the fixture, the first rigid support member configured to have a portion thereof for receipt in a portion of a cavity in a second support member.

2. The fixture of claim 1, further comprising:

a second support member for selectively engaging the first rigid support member to retain the semiconductor dice in wafer form therebetween, the second support member including a single cavity for retaining the semiconductor dice in wafer form therein during testing; and

a single biasing assembly including a single floating platform for the single cavity, the single biasing assembly mounted to one of the first rigid support member and the second support member, the single biasing assembly for uniformly biasing the plurality of semiconductor dice in wafer form against the plurality of contact members.

3. The fixture of claim 2, wherein the wafer comprises a wafer having semiconductor dice having a known configuration for the single cavity.

4. The fixture of claim 1, wherein the semiconductor dice comprise a die cluster in wafer form.

5. The fixture of claim 2, wherein the single biasing assembly comprises the single floating platform in contact with an elastomeric polymer member.

6. The fixture of claim 1, further comprising aligning devices for aligning the first rigid support member with the second support member.

7. The fixture of claim 2, wherein the second support member comprises a partially rigid support member.

8. The fixture of claim 2, wherein the single biasing assembly comprises a biasing assembly using air pressure.

9. The fixture of claim 1, wherein the contact member includes a plurality of contacts extending form the first support member for engaging a plurality of conductive contacts on the wafer when the first support member engages the wafer.

10. The fixture of claim 2, wherein the single biasing assembly in the single cavity for retaining the plurality of semiconductor dice in wafer form therein during testing exerts a sufficiently uniform biasing force on the wafer for causing the wafer to contact portions of the plurality of contact members.

11. The fixture of claim 2, wherein the plurality of contact members include a plurality of rigid conductors which extend into the single cavity when the first support member and the second support member have portions thereof in contact.

12. The fixture of claim 2, wherein the plurality of contact members include a plurality of flexible rods which extend into the single cavity when the first support member and the second support member have portions thereof in contact.

13. The fixture of claim 2, further comprising:

an elastomeric conductor for contacting the wafer in the single cavity.

14. The fixture of claim 13, wherein the elastomeric conductor conducts in patterns corresponding to the plurality of bumps of at least a portion of the wafer for electrical contact between the first support plate and the wafer.

15. The fixture of claim 2, further comprising:

a platform corresponding to the single cavity being biased by an elastomeric polymer for

uniformly biasing the wafer in contact with the plurality of contact members.

16. The fixture of claim 1, wherein the wafer comprises a wafer having wafer scale integration of arrays of semiconductor dice.