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Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto

  • US 7,511,870 B2
  • Filed: 10/15/2005
  • Issued: 03/31/2009
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
First Claim
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1. Apparatus, comprising:

  • a substrate; and

    resonator apparatus comprising;

    one or more anchors connected to the substrate;

    at least one input/output electrode that is electrically insulated from the substrate; and

    a resonator comprising an extensional member coupled to the anchor and separated from the substrate, and a flexural member connected to the extensional member that is separated from the substrate and separated from the electrode by a gap.

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