Moveable micro-electromechanical device

• US 7,511,875 B2
• Filed: 11/02/2006
• Issued: 03/31/2009
• Est. Priority Date: 04/08/1998
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Miles, Mark W.
• Primary Examiner(s): Schwartz; Jordan M.
• Assistant Examiner(s): JONES, JAMES
• Application Number:
  US11/591,928
• Publication Number:
  US 20070139758A1
• Time in Patent Office: 880 Days
• Field of Search: 359/290, 359/291
• US Class Current: 359/290
• CPC Class Codes: G02B 19/0019 having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/007 the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 27/0068 having means for controlling the degree of correction, e.g. using phase modulators, movable elements controlling the phase of light using moving or deformable elements G02B26/06
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02F 1/0128 based on electro-mechanical, magneto-mechanical, elasto-optic effects
• CPC Class Codes: G02F 2203/12 spatial light modulator
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 2300/0469 Details of the physics of pixel operation
• CPC Class Codes: G09G 2300/08 Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
• CPC Class Codes: G09G 2300/0809 Several active elements per pixel in active matrix panels
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 2300/088 using a non-linear two-terminal element
• CPC Class Codes: G09G 3/2014 : by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/22 : using controlled light sources
• CPC Class Codes: G09G 3/3433 : using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38
• CPC Class Codes: G09G 3/3466 : based on interferometric effect
• CPC Class Codes: Y10T 29/49002 : Electrical device making
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.

Claims

1. A pixel device comprising:

a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate;

wherein the first plate is configured to receive a first voltage, wherein the first voltage is received from a first power supply and the second voltage is received from a second power supply;

wherein the second plate is configured to receive a second voltage;

wherein the third plate is configured to receive a third voltage;

wherein the second plate and the third plate are configured for movement towards the first plate in response to the receiving the first and second voltages;

wherein the second plate is electrically insulated from the third plate, and

wherein the first power supply is operated so that the first plate is one of positively biased or negatively biased relative to the second plate.

2. The device as defined in claim 1, wherein the second voltage comprises a variable signal voltage.

3. The device as defined in claim 2, wherein the variable signal voltage modulates the position of the second plate.

4. The device as defined in claim 1, wherein the second plate is configured for movement, and the third plate is substantially stationary.

5. The device as defined in claim 1, wherein the second plate is closer to the first plate than the third plate.

6. The device as defined in claim 1, wherein the second plate is closer to the third plate than the first plate.

7. The device as defined in claim 1, wherein the second plate is equidistant between the first plate and the third plate.

8. The device as defined in claim 1, wherein the device is a MEMS device.

9. The device as defined in claim 1, wherein the second plate is at least partially reflective.

12. The device as defined in claim 1, wherein the first plate, the second plate and the third plate are energized in a sequence.

13. The device as defined in claim 1, further comprising a third power supply configured to provide a third voltage to the third plate.

19. The device as defined in claim 1, wherein receiving the first voltage and the second voltage produces an electrostatic bias between the first and second plates.

10. A pixel device comprising:

a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate;

wherein the first plate is configured to receive a first voltage;

wherein the second plate is configured to receive a second voltage;

wherein the third plate is configured to receive a third voltage;

wherein the second plate and the third plate are configured for movement towards the first plate in response to the receiving the first and second voltages;

wherein the second plate is electrically insulated from the third plate, and

wherein the third plate comprises stiction bumps located on a surface of the third plate.

11. The device as defined in claim 10, wherein the stiction bumps comprise electrodes.

14. A method of operating a pixel device, the method comprising:

providing a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate;

energizing the first plate, the second plate, and the third plate in a sequence; and

moving at least one of the second plate and the third plate towards the first plate in response to energizing one or more of the first, second and third plates,

wherein said second plate is electrically insulated from said third plate.

15. The method as defined in claim 14, wherein a distance between the first plate and the second plate is greater than a distance between the third plate and the second plate and wherein the sequence comprises the first plate is biased first.

16. The method as defined in claim 14, wherein a distance between the third plate and the second plate is greater than a distance between the first plate and the second plate and wherein the sequence comprises the third plate is biased first.

17. A pixel device, comprising:

a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate;

means for providing a first voltage to the first plate;

means for providing a second voltage to the second plate;

means for providing a third voltage to the third plate;

means for electrically insulating the second plate from the third plate;

means for moving the second plate and the third plate towards the first plate in response to receiving at least one of the first and second voltages;

wherein the means for providing a first voltage to the first plate comprises a positive or negative bias means for biasing the first plate relative to the second plate and wherein the means for providing a third voltage to the third plate comprises the other of a positive or negative bias means for biasing the third plate relative to the second plate.

18. The device as defined in claim 17, wherein the means for providing a second voltage to the second plate comprises means for modulating a position of the second plate.

20. A pixel device comprising:

a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate;

wherein the first plate is configured to receive a first voltage;

wherein the second plate is configured to receive a second voltage; and

wherein the third plate comprises stiction bumps located on a surface of the third plate.

21. The device as defined in claim 20, wherein the stiction bumps comprise electrodes.

22. A method of operating a pixel device, the method comprising:

providing a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate; and

energizing the first plate, the second plate, and the third plate in a sequence,

wherein a distance between the first plate and the second plate is greater than a distance between the third plate and the second plate and wherein the sequence comprises the first plate is biased first.

23. A method of operating a pixel device, the method comprising:

providing a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate; and

energizing the first plate, the second plate, and the third plate in a sequence,

wherein a distance between the third plate and the second plate is greater than a distance between the first plate and the second plate and wherein the sequence comprises the third plate is biased first.

24. A pixel device, comprising:

a first plate, a second plate disposed under the first plate, and a third plate disposed under the second plate;

means for providing a first voltage to the first plate; and

means for providing a second voltage to the second plate,

wherein the means for providing a first voltage to the first plate comprises a positive or negative bias means for biasing the first plate relative to the second plate and wherein the means for providing a third voltage to the third plate comprises the other of a positive or negative bias means for biasing the third plate relative to the second plate.