Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
First Claim
1. A radial transverse electric polarizer device having first and second polarizations and configured to interact with an electromagnetic radiation having a wavelength less than 400 nm, the polarizer device comprising:
- a plurality of sector-shaped linear polarizer plates, each defining a linear polarization orientation, azimuthally arranged to form a radial polarization configuration,wherein the polarizer plates are configured to reflect substantially all of the radiation of the first polarization and transmit substantially all of the radiation of the second polarization, andwherein the first polarization is a transverse magnetic polarization and the second polarization is a transverse electric polarization.
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Abstract
A radial transverse electric polarizer device is provided. The device includes a first layer of material having a first refractive index, a second layer of material having a second refractive index, and a plurality of elongated elements azimuthally and periodically spaced apart, and disposed between the first layer and the second layer. The plurality of elongated elements interact with electromagnetic waves of radiation to transmit transverse electric polarization of electromagnetic waves of radiation. One aspect of the invention is, for example, to use such polarizer device in a lithographic projection apparatus to increase imaging resolution. Another aspect is to provide a device manufacturing method including polarizing a beam of radiation in a transverse electric polarization.
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Citations
8 Claims
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1. A radial transverse electric polarizer device having first and second polarizations and configured to interact with an electromagnetic radiation having a wavelength less than 400 nm, the polarizer device comprising:
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a plurality of sector-shaped linear polarizer plates, each defining a linear polarization orientation, azimuthally arranged to form a radial polarization configuration, wherein the polarizer plates are configured to reflect substantially all of the radiation of the first polarization and transmit substantially all of the radiation of the second polarization, and wherein the first polarization is a transverse magnetic polarization and the second polarization is a transverse electric polarization. - View Dependent Claims (2, 3)
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4. A radial transverse electric polarizer device having first and second polarizations and configured to interact with an electromagnetic radiation having a wavelength less than 400 nm, the polarizer device comprising:
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a plurality of sector-shaped linear polarizer plates, each defining a linear polarization orientation, azimuthally arranged to form a radial polarization configuration, wherein the polarizer plates are configured to reflect substantially all of the radiation of the first polarization and transmit substantially all of the radiation of the second polarization, and wherein the radial transverse electric polarizer device is constructed and arranged to rotate around an axis perpendicular to a plane defined by the radial transverse electric polarizer. - View Dependent Claims (5, 6, 7, 8)
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Specification
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- Resources
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Current AssigneeASML Netherlands BV (ASML Holding NV)
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Original AssigneeASML Netherlands BV (ASML Holding NV)
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InventorsCummings, Kevin, Flagello, Donis, Straaijer, Alexander
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Primary Examiner(s)Shafer; Ricky D
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Application NumberUS11/187,848Publication NumberTime in Patent Office1,345 DaysField of Search359/487, 359/489, 359/495, 359/497, 359/501, 359/352, 359/486, 355/71US Class Current359/352CPC Class CodesG02B 5/3058 comprising electrically con...G03F 7/70566 Polarisation control
