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Substrate meniscus interface and methods for operation

  • US 7,513,262 B2
  • Filed: 04/01/2004
  • Issued: 04/07/2009
  • Est. Priority Date: 09/30/2002
  • Status: Expired due to Fees
First Claim
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1. An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate, comprising:

  • a docking surface configured to be oriented adjacent to and beside an edge of the substrate, the docking surface being coplanar with the substrate, and providing a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate, the transition interface being spaced apart from the substrate;

    a coupon magazine for holding the docking surface at one side and having a second side extend out to define the transition interface; and

    at least one proximity head that forms the fluid meniscus.

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