Substrate meniscus interface and methods for operation
First Claim
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1. An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate, comprising:
- a docking surface configured to be oriented adjacent to and beside an edge of the substrate, the docking surface being coplanar with the substrate, and providing a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate, the transition interface being spaced apart from the substrate;
a coupon magazine for holding the docking surface at one side and having a second side extend out to define the transition interface; and
at least one proximity head that forms the fluid meniscus.
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Abstract
An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate is provided which includes a docking surface configured to be placed adjacent to an edge of the substrate where the docking surface is in the same plane as the substrate. The docking surface provides a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate.
94 Citations
19 Claims
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1. An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate, comprising:
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a docking surface configured to be oriented adjacent to and beside an edge of the substrate, the docking surface being coplanar with the substrate, and providing a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate, the transition interface being spaced apart from the substrate; a coupon magazine for holding the docking surface at one side and having a second side extend out to define the transition interface; and at least one proximity head that forms the fluid meniscus. - View Dependent Claims (2, 3)
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4. An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate, comprising:
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a docking surface configured to be placed adjacent to and beside an edge of the substrate, the docking surface being coplanar with the substrate, and providing a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate, the transition interface being spaced apart from the substrate; and a coupon magazine for holding the docking surface at one side and having a second side extend out to define the transition interface, and the coupon magazine includes a top portion and a bottom portion for holding the docking surface; at least one proximity head that forms the fluid meniscus; wherein the docking surface has a radial contour at the second side that defines the transition interface, and the radial contour of the docking surface is configured to match a radial contour of the substrate at a segment of the substrate that is less than a circumference of the substrate. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11)
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12. An apparatus for processing a substrate with a fluid meniscus, comprising:
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a coupon assembly holding a docking station, the docking station having a curved docking surface for defining a transition interface to a radial segment of the substrate which allows the fluid meniscus to enter and exit the surface of the substrate; and a coupon magazine mount for holding the coupon assembly, the coupon magazine mount defined to hold the curved docking surface of the docking station in an adjacent and coplanar orientation to a surface of the substrate and at least one proximity head that forms the fluid meniscus. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification