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Probe head having a membrane suspended probe

  • US 7,514,944 B2
  • Filed: 03/10/2008
  • Issued: 04/07/2009
  • Est. Priority Date: 07/07/2004
  • Status: Expired due to Fees
First Claim
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1. A probe head comprising:

  • (a) an elastic membrane having a first surface and an opposing second surface, said elastic membrane capable of exerting a restoring force when one of said first and said second surfaces is distorted; and

    (b) an elongate conductive probe having a first end and a second end, a probe tip proximate said first end of said probe for contacting a device under test nearer said second surface than said first surface, and a contact proximate said second end of said probe and exposed from said first surface of said elastic membrane, said beam movable to deform said second surface of said elastic membrane.

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