Mapping-data analyzing method and apparatus
First Claim
1. A mapping-data analyzing method for analyzing mapping data obtained by measuring, with a spectrometer apparatus, spectra at a plurality of points on a specimen surface, comprising:
- a principal-component calculating step of defining at least part of spectral data obtained at each point on the specimen surface as an individual sample and performing principal component analysis, in which values at a plurality of wave numbers of each spectral data set serve as variables, to calculate the scores of a plurality of principal components for each individual sample; and
a grouped-map display step of dividing the points on the specimen surface into a plurality of groups based on the scores of a plurality of principal components calculated in the principal-component calculating step, and displaying on a display device a two-dimensional or three-dimensional map indicating to which group each point on the specimen surface belongs.
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Abstract
It is an object of the present invention to provide a mapping-data analyzing method that can display a map in which sufficient information is extracted from the spectra of obtained mapping data to enable objective analysis. The mapping-data analyzing method of the present invention is used for analyzing mapping data obtained by measuring, with a spectrometer apparatus, spectra at a plurality of points on a specimen surface. The method comprises a principal-component calculating step and a grouped-map display step. In the principal-component calculating step, spectral data obtained at each point on the specimen surface is defined as an individual sample and principal component analysis, in which values at a plurality of wave numbers of each spectral data set serve as variables, is performed to calculate the scores of a plurality of principal components for each individual sample. In the grouped-map display step, the points on the specimen surface are divided into a plurality of groups based on the scores of a plurality of principal components calculated in the principal-component calculating step and a two-dimensional or three-dimensional map indicating to which group each point on the specimen surface belongs is displayed on a display device.
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Citations
19 Claims
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1. A mapping-data analyzing method for analyzing mapping data obtained by measuring, with a spectrometer apparatus, spectra at a plurality of points on a specimen surface, comprising:
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a principal-component calculating step of defining at least part of spectral data obtained at each point on the specimen surface as an individual sample and performing principal component analysis, in which values at a plurality of wave numbers of each spectral data set serve as variables, to calculate the scores of a plurality of principal components for each individual sample; and a grouped-map display step of dividing the points on the specimen surface into a plurality of groups based on the scores of a plurality of principal components calculated in the principal-component calculating step, and displaying on a display device a two-dimensional or three-dimensional map indicating to which group each point on the specimen surface belongs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A mapping-data analyzing apparatus for analyzing mapping data obtained by measuring, with a spectrometer apparatus, spectra at a plurality of points on a specimen surface, comprising:
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a storage device for storing spectral data for each point on the specimen surface; a principal-component calculating unit for defining at least part of the spectral data stored in the storage device as individual samples and performing principal component analysis, in which values at a plurality of wave numbers in each spectral data set serve as variables, to calculate the scores of a plurality of principal components for each individual sample; a grouped-map creating unit for dividing the points on the specimen surface into a plurality of groups on the basis of the scores of a plurality of principal components calculated in the principal-component calculating unit and, on the basis of this grouping, creating a two-dimensional or three-dimensional grouped map that indicates to which group each point on the specimen surface belongs; and a display device for displaying the grouped map.
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Specification