Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor

• US 7,516,038 B2
• Filed: 05/23/2006
• Issued: 04/07/2009
• Est. Priority Date: 09/16/2005
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: VTI Technologies Oy (Murata Manufacturing Co Limited)
• Inventors: Lehtonen, Tuomo, Salo, Teemu, Thurau, Jens, Mourujarvi, Risto
• Primary Examiner(s): Lau; Tung S
• Assistant Examiner(s): Bhat; Aditya S
• Application Number:
  US11/438,590
• Publication Number:
  US 20070062286A1
• Time in Patent Office: 1,050 Days
• Field of Search: 702/141
• US Class Current: 702/141
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micromechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.

Claims

1. A method for the measurement of acceleration, the values of acceleration applied to the sensor being within the sensor measurement range, in the direction of three dimensions using a micromechanical acceleration sensor, which acceleration sensor comprises at least four units of sensor measurement devices measuring in different measurement directions, of which four vectors describing the measurement directions of the sensor measurement devices no three vectors belong to the same plane, wherein in the method, the continuous self-testing of the acceleration sensor during start-up and/or operation is implemented such that

to the accelerations {right arrow over (a)}₁,{right arrow over (a)}₂,{right arrow over (a)}₃ and {right arrow over (a)}₄ obtained as measurement results of the sensor measurement devices are given the multipliers k₁, k₂, k₃ and k₄ such that, when the sensor is functioning perfectly, the value of the expression k₁{right arrow over (a)}₁,+k₂{right arrow over (a)}₂+k₃{right arrow over (a)}₃+ . . . +k_n{right arrow over (a)}_n calculates to {right arrow over (0)},

the accelerations {right arrow over (a)}₁,{right arrow over (a)}₂,{right arrow over (a)}₃,. . . {right arrow over (a)}_n given by the sensor measurement devices are measured at given intervals,

the value of the expression k₁{right arrow over (a)}₁+k₂{right arrow over (a)}₂+k₃{right arrow over (a)}₃+ . . . +k_n{right arrow over (a)}_n is calculated,

the value of said expression is compared to a pre-defined threshold value, and

if the value of said expression deviates from the value {right arrow over (0)} more than said pre-efined threshold value, an error message is given.

2. A method according to claim 1, wherein the measurement directions of the sensor measurement devices measuring in different directions are selected symmetrically such that the accelerations obtained as measurement results of the sensor measurement devices measuring in four different directions can be presented as equations:

{right arrow over (a)}₁=c·

{right arrow over (a)}_x+c·

{right arrow over (a)}_z

{right arrow over (a)}₂=c·

{right arrow over (a)}_y+c·

{right arrow over (a)}_z

{right arrow over (a)}₃=−

c·

{right arrow over (a)}_x+c·

{right arrow over (a)}_z

{right arrow over (a)}₄=−

c·

{right arrow over (a)}_y+c·

{right arrow over (a)}_z,

and that to the accelerations {right arrow over (a)}₁,{right arrow over (a)}₂,{right arrow over (a)}₃ and {right arrow over (a)}₄ obtained as measurement results of the sensor measurement devices are given the multipliers k₁, k₂, k₃ and k₄ such that k₁=k₃=1 and k₂=k₄=−

1.

3. A method according to claim 1, wherein the calculation of said vector expressions is implemented using scalar values.

4. A method according to claim 1, wherein an error message is given when m number of deviations of the value of said expression from the value {right arrow over (0)} more than said pre-defined threshold value have occurred.

5. A method according to claim 1, characterized in that said four measurement directions of the sensor measurement device described by said four vectors are selected so that the earth gravitational force has an essential component affecting in each of the said four measurement directions.

6. A micromechanical acceleration sensor for the measurement of acceleration, the values of acceleration applied to the sensor being within the sensor measurement range, in the direction of three dimensions, which acceleration sensor comprises at least four units of sensor measurement devices measuring in different measurement directions, of which four vectors describing the measurement directions of the sensor measurement devices no three vectors belong to the same plane, wherein the acceleration sensor comprises means for implementing continuous self-testing during start-up and/or operation, these means comprising a sensor measurement block, a sensor self-testing block, a sensor comparison block and an alarm block such that

the sensor measurement block comprises means for measuring accelerations directed to several different directions at given intervals using the sensor measurement devices, and for giving the values of the accelerations {right arrow over (a)}₁, {right arrow over (a)}₂, {right arrow over (a)}₃, . . . {right arrow over (a)}_n obtained as measurement results to the sensor self-testing block,

the sensor self-testing block comprises means for giving the multipliers k₁, k₂, k₃, . . . k_n to the accelerations {right arrow over (a)}₁, {right arrow over (a)}₂, {right arrow over (a)}₃, . . . {right arrow over (a)}_n obtained as measurement results of the sensor measurement devices such that, when the sensor is functioning perfectly, the value of the expression k₁{right arrow over (a)}₁+k₂{right arrow over (a)}₂+k₃{right arrow over (a)}₃+ . . . +k_n{right arrow over (a)}_n calculates to {right arrow over (0)},

sensor self-testing block further comprises means for calculating the value of the expression k₁{right arrow over (a)}₁+k₂{right arrow over (a)}₂+k₃{right arrow over (a)}₃+ . . . +k_n{right arrow over (a)}_n to the accelerations {right arrow over (a)}₁, {right arrow over (a)}₂, {right arrow over (a)}₃, . . . {right arrow over (a)}_n obtained as measurement results of the sensor measurement devices and measured at given intervals, and means for giving the value of said expression to the sensor comparison block,

the sensor comparison block comprises means for comparing the value of said expression k₁{right arrow over (a)}₁+k₂{right arrow over (a)}₂+k₃{right arrow over (a)}₃+ . . . +k_n{right arrow over (a)}_n to a given pre-defined threshold value, and

the sensor comparison block further comprises means for giving an error message to the alarm block, if the value of said expression deviates from the value {right arrow over (0)} more than said pre-defined threshold value.

7. A micromechanical acceleration sensor according to claim 6, wherein the measurement directions of the sensor measurement devices measuring in different directions are selected symmetrically such that the accelerations obtained as measurement results of sensor measuring devices measuring in four different directions can be presented as equations:

{right arrow over (a)}₁=c·

{right arrow over (a)}_x+c·

{right arrow over (a)}_z

{right arrow over (a)}₂=c·

{right arrow over (a)}_y+c·

{right arrow over (a)}_z

{right arrow over (a)}₃=−

c·

{right arrow over (a)}_x+c·

{right arrow over (a)}_z

{right arrow over (a)}₄=−

c·

{right arrow over (a)}_y+c·

{right arrow over (a)}_z,

and that to the accelerations {right arrow over (a)}₁, {right arrow over (a)}₂, {right arrow over (a)}₃ and {right arrow over (a)}₄ obtained as measurement results of the sensor measurement devices are given the multipliers k₁, k₂, k₃ and k₄ such that k₁=k₃=1 and k₂=k₄=−

1.

8. A micromechanical acceleration sensor according to claim 6, wherein the calculation of said vector expressions is implemented using scalar values.

9. A micromechanical acceleration sensor according to claim 6, wherein an error message is given when m number of deviations of the value of said expression from the value {right arrow over (0)} more than said pre-defined threshold value have occurred.

10. A micromechanical acceleration sensor according to claim 6, wherein the sensor comparison block is connected to the sensor self-testing block.

11. A micromechanical acceleration sensor according to claim 6, wherein the sensor measurement block is connected to the sensor self-testing block.

12. A micromechanical acceleration sensor according to claim 6, wherein the sensor alarm block is connected to the sensor comparison block.

13. A micromechanical acceleration sensor according to claim 6, wherein the sensor measurement block is connected to the sensor self-testing block.

14. A micromechanical acceleration sensor according to claim 6, wherein the sensor alarm block is connected to the sensor comparison block.

15. A micromechanical acceleration sensor according to claim 6, characterized in that said four measurement directions of the sensor measurement devices described by said four vectors are selected so that the earth gravitational force has an essential component affecting in each of the said four measurement directions.