Capacitance sensing circuit for a pressure sensor
First Claim
1. A capacitance sensing circuit for a pressure sensor having a sensor membrane and a compensation membrane, the circuit comprisinga controller;
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Accused Products
Abstract
The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller arranged in signal communication with a charge amplifier, a charge injector and two switches. The charge amplifier is connected to the switches via a sensor capacitor in parallel with a reference capacitor in parallel with a parasitic capacitance to ground. The charge injector and charge amplifier are arranged in parallel connection between the capacitors and the controller. The controller operates the circuit to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.
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Citations
8 Claims
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1. A capacitance sensing circuit for a pressure sensor having a sensor membrane and a compensation membrane, the circuit comprising
a controller; - and
a charge amplifier, a charge injector and two switches, in signal communication with the controller, the charge amplifier connected to the switches via a sensor capacitor Cs in parallel with a reference capacitor Cr in parallel with a parasitic capacitance Cp to ground, the charge injector and charge amplifier arranged in parallel connection between the capacitors and controller, the controller configured to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification