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Sensor chip and apparatus for tactile and/or flow sensing

  • US 7,516,671 B2
  • Filed: 02/22/2007
  • Issued: 04/14/2009
  • Est. Priority Date: 06/06/2003
  • Status: Expired due to Term
First Claim
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1. A sensor chip comprising:

  • a flexible, polymer-based substrate;

    at least one microfabricated sensor deposited and patterned directly on said substrate by surface micromachining and including a conductive element, said at least one sensor comprising a flow sensor.

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