Semiconductor device with substrate having penetrating hole having a protrusion
First Claim
1. A semiconductor device comprising:
- a substrate in which a penetrating hole is formed, the penetrating hole extending from a first surface of the substrate to a second surface of the substrate opposite to the first surface of the substrate, an internal wall surface of the penetrating hole having a protrusion formed of a material constituting the substrate, the first surface of the substrate being closer to the protrusion than the second surface;
a semiconductor chip that has an electrode, the semiconductor chip being mounted on the first surface of the substrate;
a conductive member that is formed over a particular region including the penetrating hole on the first surface of the substrate, the conductive member being electrically connected to the electrode of the semiconductor chip; and
an external electrode that is provided through the penetrating hole, electrically connected to the conductive member, and projecting from the second surface of the substrate.
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Abstract
A semiconductor device includes a substrate, a semiconductor chip, a conductive member and an external electrode. A penetrating hole is formed in the substrate, the penetrating hole having an internal wall surface, the internal wall surface having a protrusion formed of a material constituting the substrate. The semiconductor chip has an electrode. The conductive member is formed over a particular region including the penetrating hole on one side of the substrate, and is electrically connected to the electrode of the semiconductor chip. The external electrode is provided through the penetrating hole, electrically connected to the conductive member, and projects from the other side of the substrate.
37 Citations
19 Claims
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1. A semiconductor device comprising:
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a substrate in which a penetrating hole is formed, the penetrating hole extending from a first surface of the substrate to a second surface of the substrate opposite to the first surface of the substrate, an internal wall surface of the penetrating hole having a protrusion formed of a material constituting the substrate, the first surface of the substrate being closer to the protrusion than the second surface; a semiconductor chip that has an electrode, the semiconductor chip being mounted on the first surface of the substrate; a conductive member that is formed over a particular region including the penetrating hole on the first surface of the substrate, the conductive member being electrically connected to the electrode of the semiconductor chip; and an external electrode that is provided through the penetrating hole, electrically connected to the conductive member, and projecting from the second surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 17)
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12. A semiconductor device comprising:
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a substrate that has a penetrating hole, the penetrating hole extending from a first surface of the substrate to a second surface of the substrate opposite to the first surface of the substrate, the penetrating hole forming a first opening in the first surface of the substrate, an internal wall surface of the penetrating hole having a protrusion formed of a material constituting the substrate, the protrusion forming an outline of the first opening; a semiconductor chip that is mounted on the first surface of the substrate, the semiconductor chip having a first electrode; a conductive member that is formed on the first surface, the conductive member being formed over the penetrating hole, the conductive member being electrically connected to the first electrode; and a conductive material that is formed in the penetrating hole, the conductive material being electrically connected to the conductive member. - View Dependent Claims (13, 14, 18)
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15. A semiconductor device comprising:
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a substrate that has a penetrating hole, the penetrating hole extending from a first surface of the substrate to a second surface of the substrate opposite to the first surface of the substrate, an internal wall surface of the penetrating hole having a protrusion formed of a material constituting the substrate, the first surface of the substrate being closer to the protrusion than the second surface of the substrate; a semiconductor chip that is mounted on the first surface of the substrate, the semiconductor chip having a first electrode; a conductive member that is formed on the first surface, the conductive member being formed over the penetrating hole, the conductive member being electrically connected to the first electrode; and a conductive material that is formed in the penetrating hole, the conductive material being electrically connected to the conductive member, the conductive material being in contact with a first part of a surface of the protrusion, the first part of the surface of the protrusion facing a second opening of the penetrating hole in the second surface of the substrate. - View Dependent Claims (16, 19)
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Specification