System for megasonic processing of an article

• US 7,518,288 B2
• Filed: 08/16/2007
• Issued: 04/14/2009
• Est. Priority Date: 09/30/1996
• Status: Expired due to Fees

• Current Assignee: Naura Akrion Inc.
• Original Assignee: Akrion Technologies Incorporated (Akrion Incorporated)
• Inventors: Bran, Mario E.
• Primary Examiner(s): Leung; Quyen P
• Assistant Examiner(s): Rosenau; Derek J
• Application Number:
  US11/839,885
• Publication Number:
  US 20080006292A1
• Time in Patent Office: 607 Days
• Field of Search: 310/311, 310/317, 310/321, 310/322, 310/323.01, 310/323.02, 310/323.18, 310/323.19, 310/325, 310/328, 310/334, 134/1.3
• US Class Current: 310/328
• CPC Class Codes: B06B 3/00 Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
• CPC Class Codes: B08B 17/02 Preventing deposition of fouling or of dust
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: H01L 21/02041 Cleaning
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67057 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

A system for megasonic processing of an article. In one aspect, the system for megasonic processing comprises a rotary support for supporting an article, a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and a transducer assembly. The transducer assembly comprises (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.

Claims

1. A system for processing of an article comprising:

a rotary support for supporting an article;

a first conduit for applying fluid to a surface of the article positioned on the rotary support;

a second conduit for applying fluid to an opposite surface of the article positioned on the rotary support;

a transducer assembly comprising (i) a quartz or sapphire resonator positioned adjacent to the surface of the article on the rotary support so that when fluid is applied to the surface of the article via the first conduit, the resonator is fluidly coupled to the surface of the article and (ii) a transducer coupled to the resonator and adapted to generate acoustic energy that is transmitted through the resonator, into the fluid on the surface of the article, through the article, and into the fluid on the opposite surface of the article; and

the transducer located within an enclosed space having at least one opening for flowing a gas into the enclosed space, the at least one opening opposing and aligned with a major surface of the transducer.

2. The system of claim 1 wherein the resonator is an elongated rod-like probe.

3. The system of claim 1 wherein the fluid coupling is a film of liquid applied to the surface of the article by the first conduit.

4. The system of claim 3 wherein a substantially unobstructed linear path exists through the enclosed space from the at least one opening to the major surface of the transducer.

5. The system of claim 4 wherein the acoustic energy is megasonic energy.

6. The system of claim 1 wherein the acoustic energy is megasonic energy.