Multi-substrate integrated sensor

• US 7,518,354 B2
• Filed: 06/25/2007
• Issued: 04/14/2009
• Est. Priority Date: 02/11/2003
• Status: Expired due to Term

• Current Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Original Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Inventors: Forrest, Glenn, Stauth, Jason, Dickinson, Richard, Vig, Ravi
• Primary Examiner(s): Nguyen; Vinh P
• Application Number:
  US11/767,631
• Publication Number:
  US 20070247146A1
• Time in Patent Office: 659 Days
• Field of Search: None
• US Class Current: 324/117.00R
• CPC Class Codes: G01R 15/205 using magneto-resistance devices, e.g. field plates
• CPC Class Codes: G01R 15/207 Constructional details independent of the type of device used
• CPC Class Codes: G01R 33/09 Magnetoresistive devices
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2224/48247 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/4903 Connectors having different sizes, e.g. different diameters
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

An electronic circuit includes a first substrate having a first substrate surface and a device supported by the first substrate surface. The device is selected from among a passive electronic component and an active electronic component. The electronic circuit also includes a second substrate having a second substrate surface and a conductor proximate to the second substrate. The electronic circuit also includes a magnetic field transducer disposed over the conductor and coupled to the device and an insulating layer disposed between the conductor and the second substrate. The conductor is adapted to carry an electrical current to generate a first magnetic field. The electronic circuit is responsive to the first magnetic field. In some embodiments, the conductor is a secondary conductor and the circuit further includes a primary conductor disposed proximate to the magnetic field transducer and an insulating layer disposed between the primary conductor and the second substrate.

Claims

1. An electronic circuit, comprising:

a first substrate having a first substrate surface;

a device supported by said first substrate surface selected from among a passive electronic component and an active electronic component;

a second substrate having a second substrate surface;

a conductor proximate to said second substrate;

a magnetic field transducer disposed over said conductor and coupled to said device; and

an insulating layer disposed between said conductor and said second substrate, wherein said conductor is adapted to carry an electrical current to generate a first magnetic field, and wherein said electronic circuit is responsive to the first magnetic field.

2. The electronic circuit of claim 1 wherein said conductor is a secondary conductor and said circuit further comprises:

a primary conductor disposed proximate said magnetic field transducer; and

an insulating layer disposed between said primary conductor and said second substrate.

3. The electronic circuit of claim 2, wherein said device comprises an amplifier having an input terminal coupled to said magnetic field transducer and an output terminal coupled to said secondary conductor and at which an output signal is provided, wherein said output signal is indicative of a current through said primary conductor.

4. The electronic circuit of claim 2, wherein said primary conductor is U-shaped.

5. The electronic circuit of claim 2, wherein said secondary conductor comprises one or more loops.

6. The electronic circuit of claim 2, further including a magnetic flux concentrator disposed proximate said secondary conductor.

7. The electronic circuit of claim 1, wherein said magnetic field transducer comprises a magnetoresistance element.

8. The electronic circuit of claim 1, wherein said magnetic field transducer comprises at least two magnetoresistance elements.

9. The electronic circuit of claim 8, wherein the at least two magnetoresistance elements are polarized in opposite directions.

10. The electronic circuit of claim 8, wherein the at least two magnetoresistance elements are polarized in the same direction.

11. The electronic circuit of claim 8, wherein a voltage across a first one of the at least two magnetoresistance elements increases in response to an increase in the first magnetic field and wherein a voltage across a second one of the at least two magnetoresistance elements decreases in response to an increase in the first magnetic field.

12. The electronic circuit of claim 8, wherein a voltage across a first one of the at least two magnetoresistance elements increases in response to an increase in the first magnetic field and wherein a voltage across a second one of the at least two magnetoresistance elements increases in response to an increase in the first magnetic field.

13. The electronic circuit of claim 8, wherein the at least two magnetoresistance elements are coupled in series.

14. The electronic circuit of claim 8, wherein a response axis of each of the at least two magnetoresistance elements is substantially parallel to the first magnetic field.

15. The electronic circuit of claim 1, wherein the first substrate is comprised of silicon and the second substrate is comprised of ceramic material.

16. The electronic circuit of claim 1 wherein said conductor is a primary conductor and wherein said circuit further comprises:

a secondary conductor disposed over said magnetic field transducer; and

an insulting layer disposed between said magnetic field transducer and said secondary substrate.

17. An electronic circuit, comprising:

a leadframe having a plurality of leads;

a first substrate having first and second opposing surfaces, wherein the first substrate is coupled to the leadframe such that the second surface of the first substrate is above the leadframe and the first surface of the first substrate is above the second surface of the first substrate;

a second substrate having first and second opposing surfaces, wherein the second substrate is coupled to the leadframe such that the second surface of the second substrate is above the leadframe and the first surface of the second substrate is above the second surface of the second substrate;

an electronic component disposed on the first surface of the first substrate; and

a magnetic field transducer disposed over the first surface of the second substrate and coupled to the electronic component.

18. The electronic circuit of claim 17, wherein the magnetic field transducer is a magnetoresistance element.

19. The electronic circuit of claim 17, further comprising a conductor disposed over said first surface of said second substrate, wherein said magnetic field transducer is disposed over said conductor.

20. The electronic circuit of claim 17, further comprising a conductor portion formed by a coupling of at least two of the plurality of leads proximate to the second substrate.

21. The electronic circuit of claim 17 further comprising a conductor disposed over the magnetic field transducer.