Methods and apparatus for symmetrical and/or concentric radio frequency matching networks

• US 7,518,466 B2
• Filed: 08/21/2006
• Issued: 04/14/2009
• Est. Priority Date: 08/29/2005
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: White, John M., Sorensen, Carl
• Primary Examiner(s): Tran; Anh Q
• Application Number:
  US11/507,649
• Publication Number:
  US 20070046391A1
• Time in Patent Office: 967 Days
• Field of Search: 333/17.3, 333/32, 333/99.PL
• US Class Current: 333/32
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

Apparatus and methods are provided that are adapted to match the impedance of an electrical load to an impedance of an electrical signal generator. The invention includes providing a plurality of electrical components adapted to collectively match the impedance of the electrical load to the impedance of the electrical signal generator. The electrical components are arranged symmetrically and concentrically about an axis. Additionally, the invention may also include a first connector adapted to electrically couple the electrical signal generator to the electrical components. Additionally, the invention may also include a second connector adapted to electrically couple the load to the electrical components. Numerous other aspects are provided.

Claims

1. An apparatus, comprising:

a first connector having a first longitudinal axis;

a second connector having a second longitudinal axis; and

a component assembly including one or more components,

wherein at least one of the components is coupled to the first connector and at least one of the components is coupled to the second connector,

wherein the one or more components are disposed symmetrically about a third axis; and

wherein the component assembly includes one or more components disposed to reduce the formation of current hot spots.

2. The apparatus of claim 1, wherein the third axis is substantially collinear with the first longitudinal axis and the second longitudinal axis.

3. The apparatus of claim 1, wherein the one or more components are disposed concentrically about the third axis.

4. The apparatus of claim 1, wherein the one or more components are disposed equidistant about the third axis.

5. The apparatus of claim 1, wherein the components are tune and load components of an RF matching network.

6. The apparatus of claim 1, wherein at least one of the one or more components is a capacitor.

7. The apparatus of claim 1, wherein at least one of the one or more components is an inductor.

8. The apparatus of claim 1, wherein at least one of the one or more components is a resistor.

9. The apparatus of claim 1, wherein at least one of the one or more components are variable impedance components.

10. The apparatus of claim 1, wherein the component assembly includes one or more components disposed to prevent the formation of current hot spots.

11. A system, comprising:

an RF power generator;

an electrical load; and

an RF matching network coupled to the electrical load and the power generator,

wherein the RF matching network includes one or more components symmetrically disposed about an axis; and

wherein the RF matching network includes one or more components disposed to reduce the formation of current hot spots.

12. The system of claim 11, wherein the one or more components are disposed concentrically about the axis.

13. The system of claim 11, wherein the one or more components are disposed equidistant about the axis.

14. The system of claim 11, wherein the one or more components are tune and load components of the RF matching network.

15. The system of claim 11, wherein at least one of the one or more components is a capacitor.

16. The system of claim 11, wherein at least one of the one or more components is an inductor.

17. The system of claim 11, wherein at least one of the one or more components is a resistor.

18. The system of claim 11, wherein at least one of the one or more components are variable impedance components.

19. The system of claim 11, wherein the RF matching network includes one or more components disposed to prevent the formation of current hot spots.

20. A method, comprising:

receiving RF energy at a first connector having a first axis;

coupling the RF energy received at the first connector to an RF matching network having one or more components disposed symmetrically about a second axis;

coupling the RF energy in the RF matching network to a second connector having a third axis; and

preventing reflection of the RF energy by the second connector.

21. The method of claim 20 wherein preventing reflection of the RF energy includes aligning the first axis, the second axis and third axis in a substantially collinear arrangement.

22. The method of claim 20, wherein preventing the reflection of RF energy from the second connector includes varying the frequency of the RF energy.

23. The method of claim 20, wherein preventing the reflection of RF energy from the second connector includes varying an impedance of at least one of the one or more components.

24. The method of claim 20, wherein coupling the RF energy at the first connector to an RF matching network having one or more components disposed symmetrically about a second axis includes preventing the formation of hot spots.

25. The method of claim 20, wherein coupling the RF energy in the RF matching network to the second connector includes preventing the formation of hot spots.

26. A method, comprising:

receiving RF energy at a first connector having a first axis;

coupling the RF energy received at the first connector to an RF matching network having one or more components disposed symmetrically about a second axis;

coupling the RF energy in the RF matching network to a second connector having a third axis; and

reducing reflection of the RF energy by the second connector.