Method and system for packaging a MEMS device

• US 7,518,775 B2
• Filed: 02/26/2007
• Issued: 04/14/2009
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Miles, Mark W., Sampsell, Jeffrey B.
• Primary Examiner(s): Dang; Hung X
• Assistant Examiner(s): Tra; Tuyen Q
• Application Number:
  US11/679,134
• Publication Number:
  US 20070247693A1
• Time in Patent Office: 778 Days
• Field of Search: 359/238, 359290-295, 359/260, 359/298, 359/489, 359/497, 359/580, 359/599, 257/431, 257/432, 257/433, 257/434, 257/680, 257/682, 257/689, 257/737, 257/738, 257/777, 257/778, 257/779, 257/780, 438/53, 438/109, 438/125, 438/116, 362/300, 362/241, 362/479, 362/483, 362/517, 362/560
• US Class Current: 359/238
• CPC Class Codes: B81C 1/0023 Packaging together an electronic processing unit die and a micromechanical structure die MEMS packages B81B7/0032; MEMS packaging processes B81C1/00261
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

Claims

1. A display for an electronic device, comprising:

a first transparent substrate;

a first array of interferometric modulators supported by said first transparent substrate and configured to reflect light through said first transparent substrate and in a first direction;

a backplate sealed to said first transparent substrate and providing a cavity for said first array of interferometric modulators and

a second transparent substrate sealed to said backplate, wherein said second transparent substrate comprises a second array of interferometric modulators supported by said second transparent substrate and configured to reflect light in a second direction, and wherein said first direction and said second direction are opposite directions.

2. The display of claim 1, wherein the surface area of said first transparent substrate is substantially less than the surface area of said second transparent substrate.

3. The display of claim 2, wherein said backplate comprises an annular backplate.

4. The display of claim 3, wherein at least some of said electronic components are located on the same side of the backplate as said first transparent substrate.

5. The display of claim 1, wherein said backplate comprises electronic circuitry configured to control the states of said first and second arrays of interferometric modulators.

6. The display of claim 1, wherein said backplate comprises a printed circuit board.

7. The display of claim 6, additionally comprising a vapor barrier on said backplate.

8. The display of claim 7, additionally comprising a layer of desiccant within the cavity.

9. The display of claim 1, wherein said first transparent substrate comprises glass.

10. The display of claim 1, wherein said first transparent substrate comprises a polymeric material.

11. A display for an electronic device, comprising:

a first transparent substrate;

a first array of interferometric modulators supported by the first transparent substrate and configured to reflect light through said first transparent substrate and in a first direction;

a backplate sealed to said first transparent substrate and providing a cavity for said first array of interferometric modulators, wherein said backplate comprises electronic circuitry configured to control said first array of interferometric modulators; and

a second transparent substrate sealed to said first backplane, wherein said second transparent substrate comprises a second array of interferometric modulators supported by said second transparent substrate and configured to reflect light in a second direction, and wherein said first direction and said second direction are opposite directions.

12. The device of claim 11, wherein said first array of interferometric modulators is smaller than said second array of interferometric modulators, and at least some of said electronic circuitry is located within the protective cavity.

13. The display of claim 11, wherein said first transparent substrate comprises glass.

14. The display of claim 11, wherein said first transparent substrate comprises a polymeric material.

15. The display of claim 11, additionally comprising a vapor barrier on said backplate.

16. The display of claim 11, additionally comprising a layer of desiccant within the cavity.

17. A device having a display, comprising:

a first transparent substrate;

a first array of interferometric modulators supported by the first transparent substrate and configured to reflect light through said first transparent substrate;

a second transparent substrate opposed to said first transparent substrate; and

a second array of interferometric modulators supported by the second transparent substrate and configured to reflect light through said second transparent substrate.

18. The device of claim 17, wherein said first array is smaller than said second array.

19. The device of claim 18, wherein the surface area of said first transparent substrate is less than the surface area of said second transparent substrate.

20. The device of claim 19, additionally comprising an annular carrier, wherein said first transparent substrate is sealed to said annular carrier.

21. A method of manufacturing a display, comprising:

providing a first transparent substrate supporting a first array of interferometric modulators;

providing a second transparent substrate supporting a second array of interferometric modulators;

providing a backplate comprising electronic circuitry configured to control the state of said first and second arrays of interferometric modulators;

sealing said first transparent substrate to a first side of said backplate;

sealing said second transparent substrate to a second side of said backplate; and

placing said electronic circuitry in electrical connection with said first and second arrays of interferometric modulators.

22. The method of claim 21, wherein said first transparent substrate comprises glass.

23. The method of claim 21, wherein said first transparent substrate comprises a polymeric material.

24. The method of claim 21, wherein said backplate comprises a printed circuit board.

25. A display made by the process of claim 21.

26. A display, said display comprising:

a first means for modulating light and reflecting it towards a viewer;

a first means for supporting said first modulating means, wherein light reflected by said first modulating means is reflected through said first supporting means;

a second means for modulating light and reflecting it towards a viewer;

a second means for supporting said second modulating means, wherein light reflected by said second modulating means is reflected through said second supporting means, and wherein said first modulating means and said second modulating means reflect light in substantially opposite directions;

means for controlling the state of said first and second modulation means; and

a third means for supporting said controlling means.

27. The display of claim 26, wherein the first modulating means comprises a first array of interferometric modulators, and the second modulating means comprises a second array of interferometric modulators.

28. The display of claim 27, wherein the first supporting means comprises a first transparent substrate supporting the first array of interferometric modulators and the second supporting means comprises a second transparent substrate supporting the second array of interferometric modulators.

29. The display of claim 28, wherein the third supporting means comprises a backplate, wherein said first transparent substrate is sealed to a first side of said backplate, and wherein said second transparent substrate is sealed to a second side of said backplate.

30. The display of claim 29, wherein the controlling means comprises electronic circuitry supported by the backplate configured to control the states of said first and second arrays of interferometric modulators.