Micromirror systems with electrodes configured for sequential mirror attraction
First Claim
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1. A micromirror device comprising:
- a substrate with electrical components including address circuitry, anda micromechanical light modulator element comprisinga mirror portion above the substrate,a plurality of hinge portions separated below the mirror portion, andmeans, formed between the substrate and the mirror, for sequentially attracting the mirror portion.
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Abstract
Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.
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Citations
38 Claims
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1. A micromirror device comprising:
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a substrate with electrical components including address circuitry, and a micromechanical light modulator element comprising a mirror portion above the substrate, a plurality of hinge portions separated below the mirror portion, and means, formed between the substrate and the mirror, for sequentially attracting the mirror portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A micromirror device comprising:
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a substrate with electrical components including address circuitry, and a micromechanical light modulator element comprising a mirror portion above the substrate a plurality of hinge portions separated below the mirror portion, and an electrode means, formed between the substrate and the mirror, for sequentially attracting the mirror portion. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A micromirror device comprising:
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a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion having a center portion separated above said substrate, a plurality of hinge portions separated below each said mirror portion and three or more electrode portions, wherein said electrode portions are provided adjacent said substrate and said mirror portion is provided adjacent said electrode portions, a first portion of each electrode being adjacent the substrate and distal to the center of the mirror portion and another portion of the electrode being vertically above the first portion of the electrode and proximal to the center of the mirror portion, thereby providing clearance for and sequential attraction of said mirror portion by said electrode portions. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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30. A micromirror device comprising:
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a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion having a center portion separated above said substrate, a plurality of hinge portions separated below each said mirror portion and three or more electrode portions, wherein said electrode portions are provided adjacent said substrate and said mirror portion is provided adjacent said electrode portions, a first portion of each electrode being adjacent the substrate and proximal to the center of the mirror portion and another portion of the electrode being vertically below the first portion of the electrode and distal to the center of the mirror portion, thereby providing clearance for and sequential attraction of said mirror portion by said electrode portions. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38)
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Specification