Intelligent binning for electrically repairable semiconductor chips

• US 7,519,882 B2
• Filed: 06/20/2007
• Issued: 04/14/2009
• Est. Priority Date: 08/02/1996
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Debenham, Brent M.
• Primary Examiner(s): Chung; Phung M
• Application Number:
  US11/765,738
• Publication Number:
  US 20070245190A1
• Time in Patent Office: 664 Days
• Field of Search: 714/724, 714/704, 714/799, 714/746, 714/753, 714/718, 714/797, 714/819, 714/736, 365/200, 365/201, 702/108, 324/73.1, 324/765
• US Class Current: 714/724
• CPC Class Codes: G01R 31/01 Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station testing of cables continuously passing the testing apparatus G01R31/59; testing dielectric strength or breakdown voltage G01R31/12
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/31718 Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis mechanical aspects G01R31/2808, G01R31/2851
• CPC Class Codes: G01R 31/319 Tester hardware, i.e. output processing circuits
• CPC Class Codes: G11C 29/44 Indication or identification of errors, e.g. for repair
• CPC Class Codes: G11C 29/56 External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor

Abstract

The present invention relates to a system and method for testing one or more semiconductor devices (e.g., packaged chips). Test equipment performs at least tests of a first type on the semiconductor device and identifies failures in the semiconductor device, if any. A number of failures are determined. In the case where there are some failures, decision circuitry determines whether it is more efficient to repeat the tests or repair the semiconductor device, if it is repairable.

Claims

1. A system for detecting failures in a semiconductor device comprising:

equipment to perform tests of a first type on the semiconductor device to identify failures in the semiconductor device;

processing circuitry to communicate with the test equipment and determine a number of failures and provide signals indicative thereof; and

decision circuitry to receive the signals indicative of the number of failures, and considering the number of failures, either to designate the semiconductor device for an additional procedure, or designate the semiconductor device for repair, or designate the semiconductor device for additional tests of the first type.

2. The system of claim 1, wherein the decision circuitry designates the at least one semiconductor device for the additional tests of the first type if the identified types of failures is within a third number set.

3. The system of claim 2, wherein the additional tests of the first type are performed, failures in the at least one semiconductor device are re-identified and a number of re-identified types of failures are determined, with the decision circuitry subsequently:

designating the at least one semiconductor device for the additional procedure when the number of the re-identified types of failures is within a fourth number set;

designating the at least one semiconductor device for repair when the number of the re-identified types of failures is within a fifth number set;

designating the at least one semiconductor device for the additional tests of the first type when the number of the re-identified types of failures is within a sixth number set; and

repeating such designations by the decision circuitry until alternately the number of the re-identified types of failures is within the fourth number set, the at least one semiconductor device is repairable and the number of the re-identified types of failures is within the fifth number set, or the additional tests of the first type have been performed a predetermined number of times and the number of the re-identified types of failures is within the sixth number set.

4. The system of claim 3, wherein the additional procedure designated by the decision circuitry includes:

designating the at least one semiconductor device for tests of a second type to re-identify types of failures in the at least one semiconductor device and determine the number of the re-identified types of failures;

designating the at least one semiconductor device for a further procedure when the number of the re-identified types of failures is within a seventh number set;

designating the at least one semiconductor device for repair when the number of the re-identified types of values is within an eighth number set; and

the testing equipment performing additional tests of the second type on the at least one semiconductor device when the number of the re-identified types of failures is within a ninth number set.

5. The system of claim 1, wherein the processing circuitry is located one of proximate to the testing equipment and remote from the testing equipment.

6. The system of claim 1, further comprising:

a pass bin into which the at least one semiconductor device is relocated if the at least one semiconductor device is designated for the additional procedure;

a repair bin into which the at least one semiconductor device is relocated if the at least one semiconductor device is designated for repair; and

a reject bin into which the at least one semiconductor device is relocated within the at least one semiconductor device is determined to be nonrepairable.

7. The system of claim 1, further comprising:

a repair station, and wherein subsequent to the decision circuitry designating the at least one semiconductor device for repair, the decision circuitry determines whether the at least one semiconductor device is repairable and, if the at least one semiconductor device is repairable, the repair station repairs the at least one semiconductor device.

8. The system of claim 1, wherein the identified types of failures include failures of different classes in which the identified types of failures are a number of total failures of all classes, and the decision circuitry considers failures of different classes in determining whether to designate the at least one semiconductor device for the additional procedure, designate the at least one semiconductor device for repair, or perform the additional tests of the first type.

9. The system of claim 1, further comprising at least one of:

a first temperature-regulated chamber in which tests of the first type are performed; and

a second temperature-regulated chamber in which the additional procedure is performed.

10. The system of claim 1, further comprising a testing, apparatus, the testing apparatus including probes, and electrical connection made between the probes and the at least one semiconductor device.

11. The system of claim 1, wherein tests of the first type include:

subjecting the at least one semiconductor device to various temperatures in a first range of temperatures while monitoring electrical signals on the at least one semiconductor device; and

the additional procedure includes subjecting the at least one semiconductor device to various temperatures in a second range of temperatures while monitoring the electrical signals on the at least one semiconductor device.

12. The system of claim 1, wherein the decision circuitry includes:

a testing controller to control tests of the first type; and

a data analyzer receiving data from the tests of the first type and determining one of designating the at least one semiconductor device for the additional procedure, designating the at least one semiconductor device for repair, and designating the at least one semiconductor device for the additional tests of the first type.

13. A method for determining failures in a semiconductor device, the method comprising:

determining a number of identified failures of a first type on the semiconductor device to identify failures in the semiconductor device;

designating the semiconductor device for an additional procedure when the number of the identified failures is within a first number set;

repairing the semiconductor device when the number of the identified failures is within a second number set; and

performing additional tests of the first type on the semiconductor device when the number of the identified failures is within a third number set.

14. The method of claim 13, further comprising:

determining when the semiconductor device is repairable.

15. The method of claim 13, wherein the additional tests of the first type are performed, failures in the semiconductor device are re-identified and the number of re-identified failures is determined, further comprising:

designating the semiconductor device being ready for the additional procedure when the number of the re-identified failures is within a fourth number set;

repairing the semiconductor device when the number of the re-identified failures is within a fifth number set;

performing the additional tests of the first type on the semiconductor device when the number of the re-identified failures is within a sixth number set; and

repeating designating, repairing, and performing to determine when the number of the re-identified failures is within the fourth number set, the semiconductor device is repairable and the number of the re-identified failures is within the fifth number set, or the additional tests of the first type have been performed a predetermined number of times and the number of re-identified failures is within the sixth number set.

16. The method of claim 13, wherein the tests of the first type and the additional tests of the first type are each substantially performed in a first temperature regulated chamber and wherein a particular location is a second temperature regulated chamber.

17. The method of claim 13, wherein the additional procedure includes:

performing tests of a second type on the semiconductor device re-identifying failures in the semiconductor device and determining a number of re-identified failures;

designating the semiconductor device for a further procedure when the number of the re-identified failures is within a seventh number set;

repairing the semiconductor device when the number of the re-identified failures is within an eighth number set; and

performing additional tests of the second type on the semiconductor device when the number of the re-identified failures is within a ninth number set.

18. The method of claim 17, wherein the seventh, eighth, and ninth number sets are substantially identical to the first, second, and third number sets, respectively.

19. The method of claim 18, wherein the tests of a first type include a hot sort procedure and wherein the tests of a second type include a cold final procedure.

20. A method for determining reliability of a semiconductor device, the method comprising:

performing tests of a first type on the semiconductor device, identifying failures in the semiconductor device affecting the reliability of the semiconductor device, the failures classified by class and a total number of identified failures for each class is determined, and where the total number of identified failures equals a sum of the identified failures for each class; and

determining when the semiconductor device is to have either an additional procedure, repair, or additional tests performed based upon the predetermined combination of the total number of identified failures and the number of identified failures in at least one of the classes.