Chemical sensor with oscillating cantilevered probe and mechanical stop

• US 7,521,257 B2
• Filed: 02/10/2004
• Issued: 04/21/2009
• Est. Priority Date: 02/11/2003
• Status: Active Grant

• Current Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Original Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Inventors: Adams, Jesse D., Rogers, Benjamin S.
• Primary Examiner(s): Warden; Jill
• Assistant Examiner(s): Moss; Keri A
• Application Number:
  US10/777,282
• Publication Number:
  US 20050009197A1
• Time in Patent Office: 1,897 Days
• Field of Search: 436/183, 422/68.1, 422/82.01, 250/234
• US Class Current: 436/183
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/34 Tapping mode
• CPC Class Codes: G01Q 60/42 Functionalisation
• CPC Class Codes: G01Q 70/08 Probe characteristics

Abstract

The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

Claims

1. A method of detecting a chemical species with an oscillating cantilevered probe, comprising:

driving a cantilevered beam into oscillation with a drive mechanism coupled to the cantilevered beam;

tapping a free end of the oscillating cantilevered beam against a mechanical stop, the mechanical stop coupled to a base end of the cantilevered beam;

exposing a treated portion of the cantilevered beam to the chemical species, wherein the oscillation of the cantilevered beam is altered when exposed to the chemical species;

measuring an amplitude of the oscillating cantilevered beam with a sense mechanism; and

comparing the amplitude with a reference value.

2. The method of claim 1 wherein the cantilevered beam comprises a material selected from silicon, polysilicon, silicon nitride, a metal film, a metal sheet, a zinc oxide film, a PZT film, a polymeric layer, or combinations thereof.

3. The method of claim 1 wherein the drive mechanism is selected from a piezoelectric drive, an electrostatic drive, a thermal drive, or a magnetic drive.

4. The method of claim 1 wherein measuring the amplitude of the oscillating cantilevered beam comprises:

directing a beam of light onto a surface of the oscillating cantilevered beam; and

detecting the beam of light when the beam of light is reflected from the surface of the oscillating cantilevered beam.

5. The method of claim 1 wherein the sense mechanism is selected from an optical sense mechanism, a piezoelectric sense mechanism, a piezoresistive sense mechanism, a capacitive sense mechanism, or a magnetic sense mechanism.

6. The method of claim 1 wherein the treated portion of the cantilevered beam comprises a coating selected from a gold layer, a palladium layer, an alcohol-absorbent polymer, a water-absorbent material, a chemical-sensitive layer, a biosensitive material, or a thiol.

7. The method of claim 1 wherein the chemical species is selected from a chemical element, a chemical compound, an organic material, an inorganic material, a biological material, a DNA strand, a bioactive agent, and a toxin.

8. The method of claim 1 further comprising:

adjusting a position of the mechanical stop with a positioning element coupled to the mechanical stop to maintain the oscillating cantilevered beam at a nominally constant amplitude; and

determining the chemical species based on the position of the mechanical stop.

9. The method of claim 1 further comprising:

measuring a frequency of the oscillating cantilevered beam with the sense mechanism; and

comparing the frequency with a reference value.

10. The method of claim 1 further comprising:

heating a heater coupled to the cantilevered beam to initialize the treated portion of the cantilevered beam.

11. A system for sensing a chemical species, comprising:

a cantilevered beam having a mechanical stop coupled to a base end and comprising a treated portion;

a drive mechanism coupled to the cantilevered beam for oscillating the beam and tapping the beam against the mechanical stop; and

a sense mechanism that measures an oscillation amplitude when the treated portion of the cantilevered beam is exposed to the chemical species.

12. The system of claim 11 wherein the cantilevered beam comprises a layer selected from silicon, silicon nitride, a metal film, a metal sheet, a piezoelectric film, a piezoresistive film, a dielectric film, a polymeric layer, or combinations thereof.

13. The system of claim 11 wherein the drive mechanism is selected from a piezoelectric drive, an electrostatic drive, a thermal drive, or a magnetic drive.

14. The system of claim 11 wherein the sense mechanism is selected from a piezoelectric sense mechanism, an optical sense mechanism, a piezoresistive sense mechanism, a capacitive sense mechanism, or a magnetic sense mechanism.

15. The system of claim 11 wherein the drive mechanism and the sense mechanism comprise a unitary piezoelectric element coupled to the cantilevered beam.

16. The system of claim 11 wherein the treated portion of the cantilevered beam comprises a coating selected from an alcohol-absorbent polymer, a water-absorbent material, a chemical-sensitive layer, a biosensitive material, or a thiol.

17. The system of claim 11 wherein the chemical species is selected from a chemical element, a chemical compound, an organic material, an inorganic material, a biological material, a DNA strand, a bioactive agent, or a toxin.

18. The system of claim 11 further comprising:

a light source for directing a beam of light onto the cantilevered beam; and

a photodetector for detecting the beam of light reflected from the cantilevered beam and measuring the oscillation amplitude.

19. The system of claim 11 further comprising:

a probe tip attached to a free end of the oscillating cantilevered beam, wherein the probe tip is tapped against the mechanical stop when the cantilevered beam is oscillated.

20. The system of claim 11 further comprising:

a positioning element coupled between the mechanical stop and the base end of the cantilevered beam, wherein the positioning element adjusts a position of the mechanical stop to maintain an oscillation of the cantilevered beam at a nominally constant amplitude.

21. The system of claim 20 wherein the positioning element comprises a piezotube.

22. The system of claim 11 further comprising:

an enclosure enclosing the cantilevered beam and the mechanical stop, the enclosure having an inlet port for receiving the chemical species and an outlet port for releasing the chemical species.

23. The system of claim 11 further comprising:

means for measuring a frequency of the oscillating cantilevered beam; and

means for determining the chemical species based on the measured frequency.

24. The system of claim 11 further comprising:

a heater coupled to the cantilevered beam, wherein the treated portion of the cantilevered beam is initialized when the cantilevered beam is heated.

25. A handheld system for sensing a chemical species comprising:

at least one cantilevered beam, wherein at least one cantilevered beam includes a treated portion;

a mechanical stop coupled to a base end of each cantilevered beam; and

a piezoelectric drive-sense mechanism coupled to each cantilevered beam;

wherein the chemical species is sensed based on an oscillation amplitude of each of the at least one cantilevered beams when the treated portion of at least one cantilevered beam is exposed to the chemical species.

26. The system of claim 25 further comprising:

a positioning element coupled between the base end of at least one cantilevered beam and the mechanical stop, wherein the positioning element adjusts a position of the mechanical stop to maintain an oscillation of the at least one cantilevered beam at a nominally constant amplitude.