Phase change actuator

• US 7,522,029 B1
• Filed: 07/24/2008
• Issued: 04/21/2009
• Est. Priority Date: 07/24/2008
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Lantz, Mark Alfred
• Primary Examiner(s): Vortman; Anatoly
• Application Number:
  US12/179,302
• Time in Patent Office: 271 Days
• Field of Search: 337/139, 337/298, 337/382, 337/393, 310/311, 310/330, 310/331, 310/332, 310/357, 310/367, 73/11.5, 735/041.5, 738/626.34, 738/626.39
• US Class Current: 337/139
• CPC Class Codes: B81B 2201/07 Data storage devices, static or dynamic memories
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: B81C 2201/0167 by adding further layers of materials having complementary strains, i.e. compressive or tensile strain
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 61/01 Details

Abstract

An actuator is provided. The actuator comprises a base portion, a cantilever beam connected to the base portion, and an actuator cell adjacent to the cantilever beam. The actuator cell comprises a first metal electrode positioned on the cantilevered beam, a second metal electrode positioned near the first metal electrode, and phase change material between the first and second metal electrodes, wherein the phase change material connects the first metal electrode to the second metal electrode, wherein applying a burst of energy to the phase change material causes the phase change material to change between an amorphous state and a crystalline state, causing the cantilevered beam to move between a first position and a target position, wherein the cantilevered beam remains at the target position upon removal of the energy.

Claims

1. An actuator comprising:

a base portion;

a cantilever beam connected to the base portion; and

an actuator cell adjacent to the cantilever beam, the actuator cell comprising;

a first metal electrode positioned on the cantilevered beam;

a second metal electrode positioned near the first metal electrode; and

phase change material between the first and second metal electrodes, connecting the first and second metal electrodes, wherein applying a burst of energy to the phase change material causes the phase change material to change between an amorphous state and a crystalline state, causing the cantilevered beam to move between a first position and a target position, and wherein the cantilevered beam remains at the target position upon removal of the energy.