Sensor element for detecting a physical measuring variable between bodies exposed to high tribological strain
First Claim
1. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12) wherein the sensitive layer (13, 30) is provided with a covering layer (14) and wherein, in comparison to the sensitive layer (13, 30), the covering layer (14) is abrasion resistant and has a low electrical conductivity or is insulating, wherein the insulation layer (12) has at least two component layers (31, 32), wherein one component layer (31) is a layer (31) with at least a low electrical conductivity in comparison to the sensitive layer (13, 30) and wherein a component layer (32) is a layer with a higher tribological stress capacity in comparison to the component layer (31) with the comparatively low electrical conductivity, or in that the insulation layer is a layer that is at least essentially comprised of carbon or contains carbon, oxygen, and silicon, and wherein the component layer with the higher tribological stress capacity is a layer (32) with a higher electrical conductivity than the component layer (31) with the low electrical conductivity and has a higher degree of hardness and/or a lower coefficient of friction in comparison to it.
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Abstract
The invention proposes sensor elements (5) for detecting a physical measurement variable such as a pressure, a temperature, a gap width, or a capacitance between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress. In certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30), in particular a sensor segment (13), is provided, which is separated from the body (10) by an insulation layer (12) and has a covering layer (14) in a first embodiment. In an alternative embodiment, a surface region of at least one of the two bodies (10) has a recess (23) in which the sensor surface (13) is disposed on the insulation layer (12). In a third embodiment, the sensor surface (13) has a length of 10 μm to 5 mm, a width of less than 5 μm, and a thickness of less than 200 nm.
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Citations
21 Claims
- 1. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12) wherein the sensitive layer (13, 30) is provided with a covering layer (14) and wherein, in comparison to the sensitive layer (13, 30), the covering layer (14) is abrasion resistant and has a low electrical conductivity or is insulating, wherein the insulation layer (12) has at least two component layers (31, 32), wherein one component layer (31) is a layer (31) with at least a low electrical conductivity in comparison to the sensitive layer (13, 30) and wherein a component layer (32) is a layer with a higher tribological stress capacity in comparison to the component layer (31) with the comparatively low electrical conductivity, or in that the insulation layer is a layer that is at least essentially comprised of carbon or contains carbon, oxygen, and silicon, and wherein the component layer with the higher tribological stress capacity is a layer (32) with a higher electrical conductivity than the component layer (31) with the low electrical conductivity and has a higher degree of hardness and/or a lower coefficient of friction in comparison to it.
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18. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10). a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12), wherein the sensitive layer (13, 30) is provided with a covering layer (14) and wherein, in comparison to the sensitive layer (13, 30), the covering layer (14) is abrasion resistant and has a low electrical conductivity or is insulating, wherein the insulation layer (12) has at least two component layers (31, 32), wherein one component layer (31) is a layer (31) with at least a low electrical conductivity in comparison to the sensitive layer (13, 30) and wherein a component layer (32) is a layer with a higher tribological stress capacity in comparison to the component layer (31) with the comparatively low electrical conductivity, or in that the insulation layer is a layer that is at least essentially comprised of carbon or contains carbon, oxygen, and silicon, and wherein the layer (32) with the higher tribological stress capacity is at least essentially comprised of carbon, in particular a diamond-like carbon or an amorphous diamond-like carbon, and that the layer (31) with the comparatively low electrical conductivity is comprised of carbon, in particular a diamond-like carbon or an amorphous diamond-like carbon, as well as oxygen and silicon.
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19. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12), wherein the sensitive layer (13, 30) is provided with a covering layer (14) and wherein, in comparison to the sensitive layer (13, 30). the covering layer (14) is abrasion resistant and has a low electrical conductivity or is insulating, wherein the insulation layer (12) has a number of recurring pairs of component layers stacked one on top of the other, wherein immediately underneath the sensitive layer (13, 30), first comes the layer (32) with the higher tribological stress capacity and underneath that, comes the layer (32) with at least a low electrical conductivity in comparison to the sensitive layer (13, 30), and wherein these two layers (31, 32) constitute the component layer pair.
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20. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12), wherein the sensitive layer (13, 30) is provided with a covering layer (14) and wherein, in comparison to the sensitive layer (13, 30), the covering layer (14) is abrasion resistant and has a low electrical conductivity or is insulating, wherein a surface region of at least one of the two bodies (10) has a recess (23) that contains the sensor surface (13) on the insulation layer (12), wherein (23) is produced in the insulation layer (12), wherein the sensitive layer (13, 30) is disposed in the recess (23), on the insulation layer (12).
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21. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12), wherein the sensitive layer (13, 30) is provided with a covering layer (14) and wherein, in comparison to the sensitive layer (13, 30), the covering layer (14) is abrasion resistant and has a low electrical conductivity or is insulating, wherein a surface region of at least one of the two bodies (10) has a recess (23) that contains the sensor surface (13) on the insulation layer (12), wherein the insulation layer (12) has additional recesses, wherein the contact surfaces (11) are disposed on the insulation layer (12) in the vicinity of or inside the additional recesses, and are connected to the sensitive layer (13, 30).
Specification