Pattern formation method
First Claim
1. A pattern formation method using a photomask having a mask pattern formed on a transparent substrate and a transparent portion of said transparent substrate where said mask pattern is not formed, the pattern formation method comprising the steps of:
- (a) forming a resist film on a substrate;
(b) irradiating said resist film with said exposing light through said photomask; and
(c) forming a resist pattern by developing said resist film having been irradiated with said exposing light,wherein in said photomask, said mask pattern includes a main pattern to be transferred through exposure and an auxiliary pattern that diffracts exposing light and is not transferred through the exposure,said main pattern is composed of a first semi-shielding portion that has first transmittance for partially transmitting said exposing light and transmits said exposing light in an identical phase with respect to said transparent portion, and a phase shifter that transmits said exposing light in an opposite phase with respect to said transparent portion,said auxiliary pattern is made from a second semi-shielding portion that has second transmittance for partially transmitting said exposing light and transmits said exposing light in the identical phase with respect to said transparent portion, anda pattern width of said auxiliary pattern is smaller than that of said main pattern.
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Accused Products
Abstract
A mask pattern includes a main pattern to be transferred through exposure and an auxiliary pattern that diffracts exposing light and is not transferred through the exposure. The main pattern is made from a shielding portion, a phase shifter or a combination of a semi-shielding portion or a shielding portion and a phase shifter. The auxiliary pattern is made from a shielding portion or a semi-shielding portion. The auxiliary pattern is disposed in a position away from the main pattern by a distance M×(λ/(2×sin φ)) or M×((λ/(2×sin φ))+(λ/(NA+sin φ))), wherein λ indicates a wavelength of the exposing light, M and NA indicate magnification and numerical aperture of a reduction projection optical system of an aligner and φ indicates an oblique incident angle.
7 Citations
30 Claims
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1. A pattern formation method using a photomask having a mask pattern formed on a transparent substrate and a transparent portion of said transparent substrate where said mask pattern is not formed, the pattern formation method comprising the steps of:
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(a) forming a resist film on a substrate; (b) irradiating said resist film with said exposing light through said photomask; and (c) forming a resist pattern by developing said resist film having been irradiated with said exposing light, wherein in said photomask, said mask pattern includes a main pattern to be transferred through exposure and an auxiliary pattern that diffracts exposing light and is not transferred through the exposure, said main pattern is composed of a first semi-shielding portion that has first transmittance for partially transmitting said exposing light and transmits said exposing light in an identical phase with respect to said transparent portion, and a phase shifter that transmits said exposing light in an opposite phase with respect to said transparent portion, said auxiliary pattern is made from a second semi-shielding portion that has second transmittance for partially transmitting said exposing light and transmits said exposing light in the identical phase with respect to said transparent portion, and a pattern width of said auxiliary pattern is smaller than that of said main pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A pattern formation method using a photomask having a mask pattern formed on a transparent substrate and a transparent portion of said transparent substrate where said mask pattern is not formed, the pattern formation method comprising the steps of:
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(a) forming a resist film on a substrate; (b) irradiating said resist film with said exposing light through said photomask; and (c) forming a resist pattern by developing said resist film having been irradiated with said exposing light, wherein in said photomask, said mask pattern includes a main pattern to be transferred through exposure and an auxiliary pattern that diffracts exposing light and is not transferred through the exposure, said main pattern is composed of a first semi-shielding portion that has first transmittance for partially transmitting said exposing light and transmits said exposing light in an identical phase with respect to said transparent portion, and a phase shifter that transmits said exposing light in an opposite phase with respect to said transparent portion, said auxiliary pattern includes a first auxiliary pattern that has a width Dl and is disposed with a part of said transparent portion sandwiched between said main pattern and said first auxiliary pattern and a second auxiliary pattern that has a width D2 and is disposed on a side of said first auxiliary pattern farther from said main pattern with a part of said transparent portion sandwiched between said first auxiliary pattern and said second auxiliary pattern, and said width D2 is larger than said width Dl. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification