High voltage transistor structure for semiconductor device

• US 7,525,155 B2
• Filed: 03/23/2006
• Issued: 04/28/2009
• Est. Priority Date: 11/26/2003
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chen, Fu-Hsin, Liu, Ruey-Hsin
• Primary Examiner(s): LINDSAY JR, WALTER LEE
• Application Number:
  US11/387,573
• Publication Number:
  US 20060163626A1
• Time in Patent Office: 1,132 Days
• Field of Search: 257/347, 257/349, 257/162, 257/163, 257/164, 257/151, 257/175
• US Class Current: 257/347
• CPC Class Codes: H01L 29/0692 Surface layout
• CPC Class Codes: H01L 29/66659 with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
• CPC Class Codes: H01L 29/7835 with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs

Abstract

A high voltage MOS transistor has a thermally-driven-in first doped region and a second doped region that form a double diffused drain structure. Boundaries of the first doped region are graded. A gate-side boundary of the first doped region extends laterally below part of the gate electrode. The second doped region is formed within the first doped region. A gate-side boundary of the second doped region is separated from a closest edge of the gate electrode by a first spaced distance. The gate-side boundary of the second doped region is separated from a closest edge of the spacer by a second spaced distance. The first spaced distance is greater than the second spaced distance. An isolation-side boundary of the second doped region may be separated from an adjacent isolation structure by a third spaced distance.

Claims

1. A semiconductor device, comprising:

a substrate;

a volume defined as being an active region, wherein at least part of the active region extends into the substrate;

a gate electrode formed over the substrate, wherein at least part of the gate electrode is located in the active region;

a spacer formed along edges of the gate electrode;

a driven-in first doped region formed in the substrate, wherein boundaries of the first doped region are graded, and wherein a gate-side boundary of the first doped region extends laterally below part of the gate electrode; and

a second doped region formed within the first doped region, wherein a gate-side boundary of the second doped region is spaced away from a closest edge of the gate electrode by a first spaced distance, wherein the gate-side boundary of the second doped region is spaced away from a closest edge of the spacer by a second spaced distance, and wherein the first spaced distance is greater than the second spaced distance.

2. The semiconductor device of claim 1, further comprising a shallow trench isolation region comprising an insulating material formed at least partially in the substrate, wherein at least a majority of the isolation region extends at least partially around the active region.

3. The semiconductor device of claim 1, further comprising an isolation region comprising an insulating material formed at least partially in the substrate, wherein at least a majority of the isolation region extends at least partially around the active region, wherein the isolation region has a field oxide structure.

4. The semiconductor device of claim 1, further comprising an isolation region comprising an insulating material formed at least partially in the substrate, wherein at least a majority of the isolation region extends at least partially around the active region, and wherein an isolation-side boundary of the second doped region is spaced away from a closest edge of the isolation region by a third spaced distance.

5. The semiconductor device of claim 4, wherein the third spaced distance is about equal in length to the first spaced distance.

6. The semiconductor device of claim 1, wherein the semiconductor device comprises a transistor having a breakdown voltage equal to or greater than about 30 volts.

7. The semiconductor device of claim 1, further comprising a lightly doped region formed in the substrate in alignment with the edges of the gate electrode and edges of an isolation region.

8. The semiconductor device of claim 7, wherein the isolation region has a field oxide structure.

9. The semiconductor device of claim 7, Wherein the isolation region has a shallow trench filled with insulating material.

10. A semiconductor device, comprising:

a transistor, the transistor comprising

a gate electrode;

a spacer formed along edges of the gate electrode, the spacer having an outer edge; and

a drain region comprising

a first doped region, wherein at least part of the first doped region is underlying at least part of the gate electrode, and

a second doped region formed in the first doped region and spaced away from the gate electrode, wherein a gate-side boundary of the second doped region is spaced away from a closest edge of the gate electrode by a first spaced distance, wherein the gate-side boundary of the second doped region is spaced away from a closest edge of the spacer by a second spaced distance, and wherein the first spaced distance is greater than the second spaced distance.

11. The semiconductor device of claim 10, wherein the transistor is a high voltage transistor having a breakdown voltage equal to or greater than about 30 volts.

12. The semiconductor device of claim 10, wherein the first doped region is formed in a well of opposite doping type and wherein a depletion region between the first doped region and the well has a width between about 0.8 μ

m and about 1.0 μ

m when a bias of about 12 volts is applied.

13. The semiconductor device of claim 10, further comprising an isolation region comprising an insulating material, wherein at least a majority of the isolation region extends at least partially around an active region of the transistor, and wherein an isolation-side boundary of the second doped region is spaced away from a closest edge of the isolation region by an isolation-side spaced distance.

14. The semiconductor device of claim 13, wherein the isolation-side spaced distance is about equal in lateral length to the first spaced distance from the gate electrode to the second doped region.

15. A semiconductor device, comprising:

a high voltage transistor having a breakdown voltage equal to or greater than about 30 volts, the transistor comprising

a gate electrode;

a spacer formed along edges of the gate electrode, the spacer having an outer edge;

a well region; and

a drain region comprising

a first doped region formed in the well region, wherein at least part of the first doped region is underlying at least part of the gate electrode, wherein the first doped region has an opposite doping type than the well region, and wherein a depletion region between the first doped region and the well has a width between about 0.8 μ

and about 1.0 μ

m when a bias of about 12 volts is applied, and

a second doped region formed in the first doped region and spaced from the gate electrode, wherein a gate-side boundary of the second doped region is spaced away from a closest edge of the gate electrode by a first spaced distance, wherein the gate-side boundary of the second doped region is spaced away from a closest edge of the spacer by a second spaced distance, and wherein the first spaced distance is greater than the second spaced distance.

16. The semiconductor device of claim 15, further comprising an isolation region comprising an insulating material, wherein at least a majority of the isolation region extends at least partially around an active region of the transistor, and wherein an isolation-side boundary of the second doped region is spaced away from a closest edge of the isolation region by an isolation-side spaced distance.

17. The semiconductor device of claim 16, wherein the isolation-side spaced distance is about equal in lateral length to the first spaced distance from the gate electrode to the second doped region.

18. The semiconductor device of claim 16, wherein the isolation region has a field oxide structure.

19. The semiconductor device of claim 16, wherein the isolation region has a shallow trench filled with insulating material.