CMOS sensor with electrodes across photodetectors at approximately equal potential

• US 7,525,168 B2
• Filed: 02/22/2008
• Issued: 04/28/2009
• Est. Priority Date: 08/27/2002
• Status: Expired due to Fees

• Current Assignee: e-Phocus, Inc.
• Original Assignee: e-Phocus, Inc.
• Inventors: Hsieh, Tzu-Chiang
• Primary Examiner(s): Pert; Evan
• Assistant Examiner(s): Tran; Tan N
• Application Number:
  US12/072,103
• Publication Number:
  US 20080156966A1
• Time in Patent Office: 431 Days
• Field of Search: 257/444, 257/448, 257/458, 257/226, 257/227, 257/53, 257/292, 257/E27.133
• US Class Current: 257/444
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14667 Colour imagers
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H04N 25/531 by controlling rolling shutters in CMOS SSIS
• CPC Class Codes: H04N 25/616 involving a correlated sampling function, e.g. correlated double sampling [CDS] or triple sampling
• CPC Class Codes: H04N 25/63 applied to dark current
• CPC Class Codes: H04N 25/65 applied to reset noise, e.g. KTC noise related to CMOS structures by techniques other than CDS
• CPC Class Codes: H04N 25/76 Addressed sensors, e.g. MOS or CMOS sensors
• CPC Class Codes: H04N 25/77 Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
• CPC Class Codes: H04N 25/778 comprising amplifiers shared between a plurality of pixels, i.e. at least one part of the amplifier must be on the sensor array itself
• CPC Class Codes: H04N 3/155 Control of the image-sensor operation, e.g. image processing within the image-sensor
• CPC Class Codes: H04N 3/1568 for disturbance correction or prevention within the image-sensor, e.g. biasing, blooming, smearing correction circuits H04N25/62

Abstract

A MOS or CMOS based active pixel sensor designed for operation with zero or close to zero potential across the pixel photodiodes to minimize or eliminate dark current. In preferred embodiments the pixel photodiodes are produced with a continuous pin or nip photodiode layer laid down over pixel electrodes of the sensor. In this preferred embodiment, the voltage potential across the pixel photodiode structures is maintained constant and close to zero, preferably less than 1.0 volts. This preferred embodiment enables the photodiode to be operated at a constant bias condition during the charge detection cycle. Setting this constant bias condition close to zero (near “short circuit” condition) assures that dark current is substantially zero.

Claims

1. A MOS or CMOS based active pixel sensor comprising:

A) a substrate;

B) an array of pixels fabricated in or on said substrate, each pixel comprising;

1) a pixel electrode and

2) integrated pixel circuits,

C) a photodiode structure located above said pixel circuits for converting electromagnetic radiation into charges during charge integration cycles, said photodiode structure defining a photodiode region for each of said pixels, said photodiode structure comprising;

1) at least one layer of charge generating material to generate charges upon the absorption of electromagnetic radiation, and

2) a surface electrode in the form of a thin transparent layer or grid located above said layers of charge generating material;

wherein each of said integrated pixel circuits;

i) defines;

a) a charge collection node on which charges generated inside the photodiode are collected,

b) a charge integration node, at which charges generated in said pixel are integrated to produce pixel signals,

c) a charge sensing node from which reset signals or the pixel signals are sensed; and

ii) is adapted to maintain voltage potential drop across said electromagnetic radiation detection structure at less than 1.0 volts and substantially constant during charge integration cycles.

2. The sensor as in claim 1 wherein each of said integrated pixel circuits is adapted to maintain voltage potential across said electromagnetic radiation detection structure at less than 0.5 volts and substantially constant during charge integration cycles.

3. The sensor as in claim 1 wherein each of said integrated pixel circuits is adapted to maintain voltage potential across said electromagnetic radiation detection structure approximately zero volts and substantially constant during charge integration cycles.

4. The sensor as in claim 1 wherein said charge collection node is separated from said charge integration node by a transistor.

5. The sensor as in claim 4 wherein said transistor comprises a gate that is held at a substantially constant potential during charge integration cycles.

6. The sensor as in claim 1 wherein said charge integration node is separated from said charge sensing node by an integrated circuit.

7. The sensor as in claim 1 wherein said charge generating material is comprised of germanium.

8. The sensor as in claim 1 wherein said charge generating material is comprised of silicon.

9. The sensor as in claim 1 wherein said charge generating material is comprised of silicon and germanium.

10. The sensor as in claim 9 wherein said silicon and germanium are located in separate layers.

11. The sensor as in claim 9 wherein said silicon and germanium are located in a single layer.

12. The sensor as in claim 1 said surface electrode is a continuous layer comprised of indium tin oxide.

13. The sensor as in claim 1 wherein said pixel electrode is comprised of a metalized region in electrical communication with pixel circuit elements.

14. The sensor as in claim 1 wherein each of said integrated pixel circuits comprise a constant gate bias transistor.

15. The sensor as in claim 1 wherein a portion of said integrated pixel circuits are shared by multiple pixels.

16. The integrated circuits as in claim 15 wherein the effective number of active transistors per pixel is less than four.

17. The integrated circuits as in claim 15 wherein the effective number of active transistors per pixel is 2.75.

18. The sensor as in claim 1 wherein each of said integrated pixel circuits comprises four transistors.

19. The sensor as in claim 1 wherein each of said integrated pixel circuits comprise five transistors.

20. The sensor as in claim 1 wherein each of said integrated pixel circuits comprise six transistors.

21. The sensor as in claim 1 wherein said sensor is adapted for correlated double sampling.

22. The sensor as in claim 1 wherein said integrated pixel circuits of each pixel comprises a constant bias transistor adapted to maintain the constant potential across said photodiode structure.

23. The sensor as in claim 1 wherein said photodiode structure comprises an n layer, an i layer and a p layer.

24. The sensor as in claim 1 wherein said integrated pixel circuits of each pixel comprises a pinned diode adapted to store charges providing an electrical potential at said charge integration node.