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Micropump for integrated device for biological analyses

  • US 7,527,480 B2
  • Filed: 09/16/2003
  • Issued: 05/05/2009
  • Est. Priority Date: 09/17/2002
  • Status: Active Grant
First Claim
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1. A micropump, comprising a body of semiconductor material, characterized by a plurality of fluid-tight chambers, selectively openable, formed within said body and having a preset internal pressure substantially different from standard atmospheric pressure, and at least one capacitor comprising a dielectric diaphragm arranged between a first electrode and a second electrode, wherein at least one of the fluid-tight chambers is sealed by the dielectric diaphragm.

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