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Cd1−xZnxS high performance TCR material for uncooled microbolometers used in infrared sensors and method of making same

  • US 7,527,999 B2
  • Filed: 12/06/2005
  • Issued: 05/05/2009
  • Est. Priority Date: 12/06/2005
  • Status: Expired due to Fees
First Claim
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1. A film material for microbolometers used in uncooled infrared sensors comprising:

  • at least one of a cadmium component and a zinc component; and

    a sulfur component,said film material being represented as Cd1-xZnxS, wherein x has a value in the range of approximately 0-0.06, and wherein said value of thermal coefficient of resistance (TCR) is in the range of 1.5% to 3.7%, said film material being capable of deposition to form a thickness of no more than approximately 2000 Angstrom on a wafer,said deposited film material providing a relatively high value of TCR and being capable of fabrication at temperatures compatible with and not harmful to CMOS devices present on said wafer.

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