Light-emitting diode device and production method thereof

• US 7,528,417 B2
• Filed: 02/09/2004
• Issued: 05/05/2009
• Est. Priority Date: 02/10/2003
• Status: Expired due to Fees

• Current Assignee: Showa Denko KK
• Original Assignee: Showa Denko KK
• Inventors: Matsuzawa, Keiichi, Yamazaki, Junichi, Takeuchi, Ryouichi
• Primary Examiner(s): Loke; Steven
• Assistant Examiner(s): Goodwin; David
• Application Number:
  US10/544,940
• Publication Number:
  US 20060163603A1
• Time in Patent Office: 1,912 Days
• Field of Search: 257/94, 257/96, 257/97, 438/46, 438/478
• US Class Current: 257/96
• CPC Class Codes: H01L 33/02 characterised by the semiconductor bodies
• CPC Class Codes: H01L 33/14 with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
• CPC Class Codes: H01L 33/30 containing only elements of Group III and Group V of the Periodic Table

Abstract

A double hetero structure light-emitting diode device includes an active layer (6), a positive-electrode-side cladding layer, a negative-electrode-side cladding layer (4), a window layer (9) and an undoped AlInP layer. The positive-electrode-side cladding layer includes an undoped AlInP layer (7) grown to have a thickness of 0.5 μm and an intermediate layer (8) doped to assume p-type conductivity and having an intermediate energy band gap value between that of the undoped AlInP layer and that of the window layer. The window layer on the intermediate layer is a GaP layer grown at 730° C. or higher and at a growth rate of 7.8 μm/hour or more in the presence of Ze serving as a dopant. The negative-electrode-side cladding layer is provided with an undoped AlInP layer (5) having a thickness of 0.1 μm or more. With this configuration, there is provided a light-emitting diode device that enhances the crystallinity of a window layer, prevents generation of faults caused by a high-temperature process and attains high luminance at a wavelength falling within a yellow-green band.

Claims

1. A light-emitting diode device comprising:

an AlGaInP active layer (6);

a positive-electrode-side cladding layer (7,8) and a negative-electrode-side cladding layer (4,5) which sandwich the active layer and have an energy band gap value greater than an energy band gap value of the active layer; and

a window layer (9) which is formed on the positive-electrode-side cladding layer and has an energy band gap value greater than that of the active layer;

wherein the positive-electrode-side cladding layer comprises an undoped AlInP layer (7) grown to have a thickness of 0.5 μ

m or more and kept in contact with the active layer, and an intermediate layer (8) doped to assume p-type conductivity, kept in contact with the window layer and having an intermediate energy band gap value between an energy band gap value of the undoped AlInP layer and that of the window layer.

2. The light-emitting diode device according to claim 1, further comprising:

a distribution electrode (32) formed on a portion of a surface of the window layer and in ohmic contact with the window layer;

a transparent, electrically conductive film (29) formed to cover the surface of the window layer and the distribution electrode and establish electrical conduction with the distribution electrode; and

a pad electrode (31) formed on a portion of a surface of the transparent, electrically conductive film to establish electrical conduction with the electrically conductive film.

3. The light-emitting diode device according to claim 2, wherein the window layer has a thickness of at least 3 μ

m.

4. The light-emitting diode device according to claim 2, wherein the window layer has a thickness and a carrier concentration, a product of which is at least 5×

10¹⁴ cm<sup>−

2</sup>.

5. The light-emitting diode device according to claim 2, wherein the window layer has a surface carrier concentration of at least 1×

10¹⁸ cm<sup>−

3</sup>.

6. The light-emitting diode device according to claim 2, wherein the distribution electrode is formed on a surface of the semiconductor layer so as not to overlap with the pad electrode when viewed from above.

7. The light-emitting diode device according to claim 2, wherein the distribution electrode is smaller in area than the pad electrode.

8. The light-emitting diode device according to claim 2, wherein the distribution electrode has a total surface area accounting for 3% or more, but 30% or less of an effective emission area.

9. The light-emitting diode device according to claim 2, wherein the distribution electrode is formed of a gold alloy.

10. The light-emitting diode device according to claim 2, wherein the transparent, electrically conductive film is formed of indium tin oxide.

11. The light-emitting diode device according to claim 2, wherein the pad electrode is formed on a center of a surface of the device when viewed from above.

12. The light-emitting diode device according to claim 2, wherein the pad electrode has a surface formed of gold.

13. The light-emitting diode device according to claim 2, wherein the pad electrode is formed of a multi-layer film that has a layer in contact with the transparent and electrically conductive film, formed of chromium.

14. The light-emitting diode device according to claim 2, wherein the distribution electrode is formed of a loop electrode having a substantially quadrangular or substantially circular shape to surround the pad electrode.

15. The light-emitting diode device according to claim 2, wherein the distribution electrode is a loop electrode having a width of 20 μ

m or less.

16. A light-emitting diode device comprising:

an AlGaInP active layer (6);

a positive-electrode-side cladding layer (7,8) and a negative-electrode-side cladding layer (4,5) which sandwich the active layer and have an energy band gap value greater than an energy band gap value of the active layer; and

a window layer (9) which is formed on the positive-electrode-side cladding layer and has an energy band gap value greater than that of the active layer;

wherein the window layer is a GaP layer grown at 730°

C. or higher and at a growth rate of 7.8 μ

m/hour or more in the presence of Zn serving as a dopant.

17. The light-emitting diode device according to claim 16, wherein, the positive-electrode-side cladding layer comprises an undoped AlInP layer (7) grown to have a thickness of 0.5 μ

m or more and kept in contact with the active layer, and an intermediate layer (8) doped to assume p-type conductivity, kept in contact with the window layer and having an intermediate energy band gap value between an energy band gap value of the undoped AlInP layer and that of the window layer.

18. A light-emitting diode device comprising:

an AlGaInP active layer (6);

a positive-electrode-side cladding layer (7,8) and a negative-electrode-side cladding layer (4,5) which sandwich the active layer and have an energy band gap value greater than an energy band gap value of the active layer; and

a window layer which is formed on the positive-electrode-side cladding layer and has an energy band gap value greater than that of the active layer;

wherein the negative-electrode-side cladding layer comprises an undoped AlInP layer (5) kept in contact with the active layer and having a thickness of 0.1 μ

m or more.

19. The light-emitting diode device according to claim 18, wherein the negative-electrode-side cladding layer comprises an n-type cladding layer (4) kept in contact with a negative-electrode side of the undoped AlInP layer and containing silicon serving as a dopant.

20. A method for producing a light-emitting diode device comprising:

an AlGalnP active layer (6);

a positive-electrode-side cladding layer (7,8) including a second undoped AllnP layer (7) and a p-type intermediate layer (8) and a negative-electrode-side cladding layer (4,5) including a silicon-doped n-type cladding layer (4) and a first undoped AllnP layer (5) which sandwich the active layer and have an energy band gap value greater than an energy band gap value of the active layer; and

a zinc-doped p-type GaP window layer (9) which is formed on the positive-electrode-side cladding layer and has an energy band gap value greater than that of the active layer;

wherein the positive-electrode-side cladding layer comprises the second undoped AllnP layer (7) grown to have a thickness of 0.5 μ

m or more and kept in contact with the active layer, and the p-type intermediate layer (8) doped to assume p-type conductivity, kept in contact with the window layer and having an intermediate energy band gap value between an energy band gap value of the second undoped AllnP layer and that of the window layer, said method comprising the steps of;

depositing a buffer layer (2) on a gallium arsenide substrate (1);

providing an n-type reflection layer (3) on the buffer layer;

depositing the silicon-doped n-type cladding layer (4) on the reflection layer;

providing the first undoped AllnP layer (5) on the n-type cladding layer;

providing the AlGalnP active layer (6) on the first undoped AllnP layer;

providing the second undoped AllnP layer (7) on the active layer;

providing the p-type intermediate layer (8) on the second undoped AllnP layer and growing on the p-type intermediate layer the zinc-doped p-type GaP window layer (9), at 730°

C. or higher and at a growth rate of 7.8 μ

/hour or more.

21. A light-emitting diode device comprising

a semiconductor substrate (21) having on its rear surface a first electrode (30);

a semiconductor layer (24) formed on the semiconductor substrate and including a light-emitting section (22) formed of AlInGaP and a window layer (23) formed atop the light-emitting section;

a distribution electrode (32) formed to extend along a portion of a surface of the window layer and kept in ohmic contact with the window layer;

a transparent, electrically conductive film (29) formed to cover the surface of the window layer and the distribution electrode and establishing electrical conduction with the distribution electrode; and

a pad electrode (31) formed on a portion of a surface of the transparent, electrically conductive film and establishing electrical conduction with the electrically conductive film,

wherein the window layer has a thickness of at least 3 μ

m,

wherein the window layer has a thickness and a carrier concentration, a product of which is at least 5×

10¹⁴ cm<sup>−

2</sup>,

wherein the window layer has a surface carrier concentration of at least 1×

10¹⁸ cm<sup>−

3</sup>, and

wherein the window layer is formed of a p-type GaP layer containing Zn or Mg as an impurity.

22. The light-emitting diode device according to claim 21, wherein the semiconductor substrate is of n-type conductivity, and the window layer is of p-type conductivity.

23. The light-emitting diode device according to claim 21, wherein the distribution electrode is formed on a surface of the semiconductor layer so as not to overlap with the pad electrode when viewed from above.

24. The light-emitting diode device according to claim 21, wherein the distribution electrode is smaller in area than the pad electrode.

25. The light-emitting diode device according to claim 21, wherein the distribution electrode has a total surface area accounting for 3% or more, but 30% or less of an effective emission area.

26. The light-emitting diode device according to claim 21, wherein the distribution electrode is formed of a gold alloy.

27. The light-emitting diode device according to claim 21, wherein the transparent, electrically conductive film is formed of indium tin oxide.

28. The light-emitting diode device according to claim 21, wherein the pad electrode is formed on a center of a surface of the device when viewed from above.

29. The light-emitting diode device according to claim 21, wherein the pad electrode has a surface formed of gold.

30. The light-emitting diode device according to claim 21, wherein the pad electrode is formed of a multi-layer film that has a layer in contact with the transparent and electrically conductive film, formed of chromium.

31. The light-emitting diode device according to claim 21, wherein the distribution electrode is formed of a loop electrode having a substantially quadrangular or substantially circular shape to surround the pad electrode.

32. The light-emitting diode device according to claim 21, wherein the distribution electrode is a loop electrode having a width of 20 μ

m or less.

33. A method for producing a light-emitting diode device comprising a semiconductor single-crystal substrate (21) having on its rear surface a first electrode (30);

a semiconductor layer (24) formed on the semiconductor substrate and including a light-emitting section (22) formed of AlInGaP and a p-type window layer (23) formed atop the light-emitting section;

a distribution electrode (32) formed to extend along a portion of a surface of the window layer and kept in ohmic contact with the window layer;

a transparent, electrically conductive film (29) formed to cover the surface of the window layer and the distribution electrode and establishing electrical conduction with the distribution electrode; and

a pad electrode (31) formed on a portion of a surface of the transparent, electrically conductive film and establishing electrical conduction with the electrically conductive film,

wherein the window layer has a thickness of at least 3 μ

m,

wherein the window layer has a thickness and a carrier concentration, a product of which is at least 5×

10¹⁴ cm<sup>−

2</sup>,

wherein the window layer has a surface carrier concentration of at least 1×

10¹⁸ cm<sup>−

3</sup>, and

wherein the window layer is formed of a p-type GaP layer containing Zn or Mg as an impurity,

said method comprising the steps of;

epitaxially growing on the semiconductor single-crystal substrate (21) the semiconductor layer (24) including the light-emitting section (22) formed of AlInGaP and the p-type window layer (23) atop the light-emitting section;

forming the distribution electrode (32) on a portion of a surface of the window layer and in ohmic contact with the window layer;

forming the transparent, electrically conductive film (29) to cover the surface of the window layer and the distribution electrode and establish electrical conduction with the distribution electrode; and

forming the pad electrode (31) on a portion of a surface of the transparent, electrically conductive film to establish electrical conduction with the electrically conductive film.

34. The method according to claim 33, wherein the semiconductor layer is formed through metal-organic chemical vapor deposition.

35. The method according to claim 33, wherein the transparent, electrically conductive film is formed through sputtering.

36. The method according to claim 33, wherein the pad electrode is formed through sputtering.