Electron emitter and method of fabricating electron emitter

• US 7,528,539 B2
• Filed: 06/02/2005
• Issued: 05/05/2009
• Est. Priority Date: 06/08/2004
• Status: Active Grant

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Kobayashi, Nobuyuki, Sato, Kei, Yokoyama, Shohei, Ohwada, Iwao
• Primary Examiner(s): Roy; Sikha
• Assistant Examiner(s): Raabe; Christopher M
• Application Number:
  US11/145,004
• Publication Number:
  US 20050269929A1
• Time in Patent Office: 1,433 Days
• Field of Search: 313495-497
• US Class Current: 313/497
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01J 1/312 having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type H01J1/304- H01J1/308 take precedence
• CPC Class Codes: H01J 1/32 Secondary-electron-emitting electrodes H01J1/35 takes precedence
• CPC Class Codes: H01J 9/022 of cold cathodes

Abstract

An electron emitter includes an emitter layer formed of a dielectric material, an upper electrode, and a lower electrode. A drive voltage is applied between the upper electrode and the lower electrode, for emitting electrons. The upper electrode is formed of scale-like conductive particles on the upper surface of the emitter layer and has a plurality of opening portions. The surfaces of overhanging portions of the opening portions that face the emitter layer are apart from the emitter layer. The overhanging portions each have such a cross-sectional shape as to be acutely pointed toward the inner edge of the opening portion, or the tip end of the overhanging portion, so that lines of electric force concentrate at the inner edge.

Claims

1. An electron emitter comprising:

an emitter layer formed of a dielectric material;

a first electrode provided on or above a first surface of the emitter layer and having an opening portion with an opening formed therein; and

a second electrode provided on or below a second surface of the emitter layer opposite the first surface;

the emitter layer emitting electrons through the opening when a drive voltage is applied between the first electrode and the second electrode,

wherein the first electrode is configured and disposed such that a first portion of a surface of the opening portion facing the first surface of the emitter layer is apart from the first surface and a second portion of said surface of the opening portion of the first electrode is in contact with a portion of the first surface of the emitter layer, wherein the opening portion has an inner edge surrounding the opening, and has a shape which causes lines of electric force to concentrate at the inner edge.

2. An electron emitter comprising:

an emitter layer formed of a dielectric material;

a first electrode provided on or above a first surface of the emitter layer and having an opening portion with an opening formed therein; and

a second electrode provided on or above a second surface of the emitter layer opposite the first surface;

the emitter layer emitting electrons through the opening when a drive voltage is applied between the first electrode and the second electrode,

wherein the first electrode is configured and disposed such that a surface of the opening portion facing the first surface of the emitter layer is apart from the first surface, the opening portion has an inner edge surrounding the opening, and has a shape which causes lines of electric force to concentrate at the inner edge, and a portion of the first electrode is in contact with a portion of the first surface of the emitter layer, and

wherein the first electrode comprises graphite.

3. An electron emitter according to claim 2, wherein the first electrode further contains conductive fine particles.

4. An electron emitter according to claim 3, wherein the emitter layer also carries the conductive fine particles adhering to the first surface in an area facing to the opening portion.

5. An electron emitter according to claim 4, wherein the conductive fine particles are comprised of silver.

6. An electron emitter comprising:

an emitter layer formed of a dielectric material;

a first electrode provided on or above a first surface of the emitter layer and having an opening portion with an opening formed therein; and

a second electrode provided on or below a second surface of the emitter layer opposite the first surface;

the emitter layer emitting electrons through the opening when a drive voltage is applied between the first electrode and the second electrode,

wherein the first electrode is formed of an aggregation of conductive particles, each having an elongated cross section, which are disposed on or above the emitter layer such that the longitudinal direction of the cross section extends along the first surface, a first portion of a surface of the opening portion facing the first surface of the emitter layer is apart from the first surface and a second portion of said surface of the opening portion of the first electrode is in contact with a portion of the first surface of the emitter layer, wherein the opening portion is formed by peripheral edge portions of the conductive particles.

7. An electron emitter according to claim 6, wherein

the emitter layer is formed of a polycrystalline material,

the first electrode is composed of primary particles of the conductive particles and/or secondary particles formed through aggregation of the primary particles disposed on the first surface of the emitter, and

the primary particles or the secondary particles each have an elongated cross section, the length of which is greater than the average grain size of crystal grains of the polycrystalline material.

8. An electron emitter according to claim 7, wherein the first electrode is comprised of graphite.

9. An electron emitter according to claim 8, wherein the first electrode further contains conductive fine particles.

10. An electron emitter according to claim 9, wherein the emitter layer also carries the conductive fine particles adhering to the first surface in an area facing to the opening portion.

11. An electron emitter according to claim 10, wherein the conductive fine particles are comprised of silver.

12. An electron emitter according to claim 6, wherein the first electrode is comprised of graphite.

13. An electron emitter according to claim 12, wherein the first electrode further contains conductive fine particles.

14. An electron emitter according to claim 13, wherein the emitter layer also carries the conductive fine particles adhering to the first surface in an area facing to the opening portion.

15. An electron emitter according to claim 14, wherein the conductive fine particles are comprised of silver.

16. A method of fabricating an electron emitter which comprises an emitter layer formed of a dielectric material, a first electrode provided on or above a first surface of the emitter layer and having an opening portion with an opening formed therein, and a second electrode provided on or below a second surface of the emitter layer opposite the first surface, the emitter layer emitting electrons through the opening when a drive voltage is applied between the first electrode and the second electrode, the method comprising:

preparing a paste composed of a dispersion medium, and conductive particles dispersed in the dispersion medium and having an elongated cross section;

forming a film of the paste on or above the first surface of the emitter layer;

sintering the film to thereby form the first electrode,

wherein the first electrode is configured and disposed such that a first portion of a surface of the opening portion facing the first surface of the emitter layer is apart from the first surface, and a second portion of said surface of the opening portion of the first electrode is in contact with a portion of the first surface of the emitter layer.

17. A method of fabricating an electron emitter according to claim 16, wherein

the step of preparing the paste includes dispersing conductive fine particles in the dispersion medium.