System and method for laminography inspection

• US 7,529,336 B2
• Filed: 05/31/2007
• Issued: 05/05/2009
• Est. Priority Date: 05/31/2007
• Status: Active Grant

• Current Assignee: Test Research Incorporated
• Original Assignee: Test Research Incorporated
• Inventors: Lee, Meng Kun, Wen, Kuang Pu, Chen, Shih-Liang
• Primary Examiner(s): Yun; Jurie
• Application Number:
  US11/756,503
• Publication Number:
  US 20080298538A1
• Time in Patent Office: 705 Days
• Field of Search: 378 21- 27, 378/41
• US Class Current: 378/26
• CPC Class Codes: G01N 2223/419 computed tomograph
• CPC Class Codes: G01N 23/044 using laminography or tomosynthesis
• CPC Class Codes: G01N 23/046 using tomography, e.g. computed tomography [CT]

Abstract

A laminography inspection system comprises an irradiation source, a plurality of linear image detectors defining an image plane, a fixed table for placement of a test object in a stationary position between the irradiation source and the image detectors, and a computing device for processing a plurality of images of the test object acquired from the image detectors. The irradiation source and the image detectors perform a plurality of parallel linear scanning passes across the area of the test object to acquire images of the test object under different viewing angles. Based on the acquired image data, the computing device determines a warp compensation and generates a cross-sectional image of a selected section within the test object.

Claims

1. A laminography inspection system comprising:

an irradiation source;

a plurality of linear image detectors defining an image plane;

a site for placement of a test object in a stationary position between the irradiation source and the image detectors; and

a computing device adapted to compute shift and scale factors and apply the shift and scale factors for combining a plurality of images of the test object acquired from the image detectors to generate a cross-sectional image of a selected section within the test object, wherein the computing device is configured to;

process the acquired images through a stereo imaging method to determine a warp compensation of the test object, and

apply the warp compensation in the computation of the shift and scale factors;

wherein the irradiation source and the image detectors are configured to scan the test object through a cycle of parallel linear scanning passes spanning across the area of the test object to acquire images of the test object under different viewing angles.

2. The system of claim 1, wherein the selected section within the test object is parallel with the image plane.

3. The system of claim 1, wherein the shift and scale factors are determined relative to two coordinate axes parallel to the image plane.

4. The system of claim 3, wherein at least one scale factor relative to a coordinate axis parallel to the linear scanning passes is equal to 1.

5. The system of claim 1, wherein the shift and scale factors are determined according to a plurality of parameters including a height of the selected section in the test object relative to a focal plane, a distance between the irradiation source and the image plane, a distance between the irradiation source and the focal plane, a distance between two detectors, and an increment length between two successive scanning passes.

6. The system of claim 1, wherein the irradiation source is configured to irradiate a conical beam of X-rays that travel through the test object to impinge on the image detectors.

7. The system of claim 1, wherein the irradiation source and the image detectors are independently driven.

8. The system of claim 1, wherein the image detectors include at least one central linear detector arranged vertically opposite the irradiation source relative to the fixed table, and two side linear detectors placed at an inclined viewing angle relative to the irradiation source.

9. The system of claim 1, wherein the irradiation source irradiating a conical beam synchronously moves with the plurality of linear image detectors along parallel linear scanning passes across the area of the test object.

10. A laminography inspection method comprising:

performing a plurality of parallel linear scanning passes across an area of a test object in a stationary position to acquire a plurality of image data of the test object under different viewing angles;

processing the acquired image data through a stereo imaging method to determine a warp compensation of the test object;

applying the warp compensation for computing shift and scale factors; and

combining the image data with the shift and scale factors to reconstruct a cross-sectional image of a selected section within the test object.

11. The method of claim 10, wherein the selected section within the test object is parallel to an image plane from which the image data are acquired.

12. The method of claim 10, wherein the shift and scale factors are determined relative to two coordinate axes parallel to an image plane from which the image data are acquired.

13. The method of claim 12, wherein at least one scale factor relative to a coordinate axis parallel to the linear scanning passes is equal to 1.

14. The method of claim 10, wherein performing a plurality of parallel linear scanning passes across an area of a test object in a stationary position includes synchronously moving an irradiation source and image detectors in a cycle of parallel linear scanning passes across an area of the test object.