Capacitive ultrasonic transducers with isolation posts
First Claim
1. A capacitive ultrasonic transducer comprising at least one cavity defined by a first support electrode, insulating support walls forming with the support electrode wells, and a membrane electrode having a membrane electrode surface area, the membrane electrode supported by the support walls and spaced from the support electrode, characterized in that, at least one isolation post or area of insulating material having a thickness is formed in said at least one cavity, the amount of the membrane electrode surface covered by or disposed adjacent to the at least one isolation post or area being smaller than the full membrane electrode surface area and selected to reduce accumulation of charge between the cost or area and the membrane electrode, and the thickness selected to prevent contact of the membrane electrode to the support electrode during operation of the transducer.
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Accused Products
Abstract
A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with a patterned isolation layer having isolation posts or areas located in said cavity to prevent the electrodes for coming into contact during operation of the transducer, and to minimize the accumulation of charge as compared to a non-patterned isolation layer for preventing contact of the electrodes during operation of the transducer.
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Citations
15 Claims
- 1. A capacitive ultrasonic transducer comprising at least one cavity defined by a first support electrode, insulating support walls forming with the support electrode wells, and a membrane electrode having a membrane electrode surface area, the membrane electrode supported by the support walls and spaced from the support electrode, characterized in that, at least one isolation post or area of insulating material having a thickness is formed in said at least one cavity, the amount of the membrane electrode surface covered by or disposed adjacent to the at least one isolation post or area being smaller than the full membrane electrode surface area and selected to reduce accumulation of charge between the cost or area and the membrane electrode, and the thickness selected to prevent contact of the membrane electrode to the support electrode during operation of the transducer.
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8. A capacitive ultrasonic transducer comprising:
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at least one cavity defined by a support substrate forming a first electrode of said transducer, walls of insulating material on said support and a thin membrane supported by said walls and forming the second electrode of said transducer, said membrane forming said second electrode having a membrane surface area; and at least one post or area of dielectric isolation material having a thickness formed in said at least one cavity, the amount of the membrane surface covered by or disposed adjacent to the at least one post or area being smaller than the full membrane surface area and selected to reduce accumulation of charge between the at least one post or area and the membrane, and the thickness selected for limiting the deflection of said membrane during operation to prevent contact of the membrane with the support substrate during operation of the transducer and to minimize accumulation of charge. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification