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Angle interferometers

  • US 7,532,330 B2
  • Filed: 08/15/2006
  • Issued: 05/12/2009
  • Est. Priority Date: 08/16/2005
  • Status: Expired due to Fees
First Claim
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1. A method, comprising:

  • directing a beam to reflect from an interface of a first optical element at a non-normal angle, the beam having an s-polarized component and a p-polarized component at the interface,wherein the non-normal reflection at the interface introduces a phase change upon reflection for the s-polarized component and a phase change upon reflection for the p-polarized component, where the phase changes upon reflection for the s-polarized and p-polarized components differ from one another by an amount that varies depending on the incident angle of the beam at the interface;

    detecting the beam after it has reflected from the interface;

    measuring an optical interference signal from the detected beam, wherein the optical interference signal comprises an interference phase related to the phase changes upon reflection between the s-polarized and p-polarized components of the beam; and

    determining information about the incident angle of the beam at the interface based on the measured optical interference signal.

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