Optical system for transforming numerical aperture

• US 7,532,403 B2
• Filed: 02/06/2006
• Issued: 05/12/2009
• Est. Priority Date: 02/06/2006
• Status: Expired due to Fees

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Vladimirsky, Yuli, Ryzhikov, Lev
• Primary Examiner(s): Schwartz; Jordan M.
• Assistant Examiner(s): JONES, JAMES
• Application Number:
  US11/347,282
• Publication Number:
  US 20070183054A1
• Time in Patent Office: 1,191 Days
• Field of Search: 359/619
• US Class Current: 359/619
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
• CPC Class Codes: G03F 7/70208 Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A system and method are used to form illumination light beams having desirable divergence and directivity. The illumination light beams are shaped using a pupil defining element and a field defining element. Then, divergence or numerical apertures of the light generated by these elements is modified using an optical element that either re-images the light onto planes conjugate to one or both of the pupil defining element and a field defining element or transforms a numerical aperture of light produced by one or both of the pupil defining element and a field defining element.

Claims

1. An optical system comprising:

an optical element configured to receive a beam and to generate a plurality of beams therefrom, wherein the optical element comprises a pupil defining element;

a first lens relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams onto an image plane into a plurality of corresponding beams, each of the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams;

a first condenser configured to condense the plurality of corresponding beams;

a field defining element configured to receive the condensed plurality of beams and to generate a field defined beam therefrom;

a second lens relay having a third and fourth lens arrays arranged in series and configured to receive the field defined beam and to generate another plurality of corresponding beams therefrom, each of the another plurality of corresponding beams having a numerical aperture less than a numerical aperture of the field defined beam;

a second condenser configured to receive and to condense the another plurality of corresponding beams; and

a relay configured to receive and to direct the condensed another plurality of corresponding beams onto a patterning device.

2. The optical system of claim 1, wherein the optical element comprises a diffractive or refractive optical element.

3. The optical system of claim 1, wherein the first and second lens arrays comprise fly'"'"'s eye lenses.

4. The optical system of claim 1, wherein the first and second lens arrays are configured to maintain double telecentricity within the optical system.

5. The optical system of claim 1, wherein the patterning device comprises an array of individually controllable elements.

7. The optical system of claim 1, wherein the first and second lens relays are configured to direct each corresponding beam in the plurality of corresponding beams onto corresponding portions of the image plane.

9. The optical system of claim 1, wherein the image plane is conjugate to the optical element.

6. An optical system comprising:

an optical element configured to receive a beam and to generate a plurality of beams therefrom, wherein the optical element comprises a field defining element;

a lens relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams onto an image plane into a plurality of corresponding beams, each of the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams;

a pupil defining element positioned to receive a beam from a radiation source and produce a pupil defined beam therefrom;

a first condenser configured to condense the pupil defined beam and to direct the condensed pupil defined beam as the beam received by the field defining element;

a second condenser configured to receive and to condense the plurality of corresponding beams; and

a relay configured to receive and to direct the condensed plurality of corresponding beams onto a patterning device.

10. The optical system of claim 6, wherein the optical element comprises a diffractive or refractive optical element.

11. The optical system of claim 6, wherein the lens array comprises fly'"'"'s eye lenses.

12. The optical system of claim 6, wherein the lens array is configured to maintain double telecentricity within the optical system.

13. The optical system of claim 6, wherein the patterning device comprises an array of individually controllable elements.

14. The optical system of claim 6, wherein the lens relay is configured to direct each corresponding beam in the plurality of corresponding beams onto corresponding portions of the image plane.

15. The optical system of claim 6, wherein the patterning device comprises an array of individually controllable elements.

8. An illumination system comprising:

an optical element configured to receive a beam and to generate a plurality of beams therefrom, wherein the optical element comprises a pupil defining element;

a lens relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams onto an image plane into a plurality of corresponding beams, each of the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams;

an optical system positioned after the lens relay and configured to condition the plurality of corresponding beams;

a patterning device configured to pattern the conditioned beam; and

a projection system configured to project the patterned beam onto a target portion of a substrate.

16. The illumination system of claim 8, wherein the optical element comprises a diffractive or refractive optical element.

17. The illumination system of claim 8, wherein the lens array comprises fly'"'"'s eye lenses.

18. The illumination system of claim 8, wherein the lens relay is configured to maintain double telecentricity within the optical system.

19. The illumination system of claim 8, wherein the patterning device comprises an array of individually controllable elements.

20. The illumination system of claim 8, wherein the lens relay is configured to direct each corresponding beam in the plurality of corresponding beams onto corresponding portions of the image plane.

21. The illumination system of claim 8, wherein the patterning device comprises an array of individually controllable elements.