Interface for testing semiconductors

• US 7,535,247 B2
• Filed: 01/18/2006
• Issued: 05/19/2009
• Est. Priority Date: 01/31/2005
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: New, Robert, Andrews, Peter, Hess, David
• Primary Examiner(s): Hollington; Jermele M
• Application Number:
  US11/335,037
• Publication Number:
  US 20060170441A1
• Time in Patent Office: 1,217 Days
• Field of Search: None
• US Class Current: 324/760.01
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05

Abstract

A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames of an overlapping region of the device under test. A video signal is provided to a display including multiple frames of the overlapping region of the device under test. An operator indicating a region of the video signal of devices under test and the system in response presenting an enlarged view of a plurality of different regions of the device under test in a plurality of windows free from user input, where the region and the plurality of different regions are simultaneously displayed on the display.

Claims

1. A probing system for a device under test comprising:

(a) an objective lens sensing said device under test;

(b) an imaging device sensing a first video sequence including multiple frames of an overlapping region of said device under test;

(c) providing a video signal to a display including said multiple frames of said overlapping region of said device under test;

(d) an operator indicating a region of said video signal of devices under test and said system in response presenting an enlarged view of a plurality of different regions of said device under test in a plurality of windows free from user input, where said region and said plurality of different regions are simultaneously displayed on said display.

2. The system of claim 1 wherein said plurality of windows includes at least four windows.

3. The system of claim 2 wherein said windows are in a rectangular arrangement.

4. The system of claim 3 wherein said operator indicating is a rectangular region.

5. The system of claim 4 wherein said at least for windows are generally at the corners of said rectangular region.

6. The system of claim 2 wherein said plurality of windows includes at least six windows.

7. The system of claim 6 wherein at least two of said windows are between respective pairs of the other windows.

8. A method for displaying video for a probing system for a device under test comprising:

(a) receiving a video signal of a device under test including multiple frames of overlapping regions of said device under test;

(b) presenting said video signal in a first window on a display including said multiple frames of said overlapping regions of said device under test;

(c) an operator indicating a region of said video signal of devices under test and said system in response presenting an enlarged view of a plurality of different regions of said device under test in a plurality of windows free from user input, where said region and said plurality of different regions are simultaneously displayed on said display.

9. The method of claim 8 wherein said plurality of windows includes at least four windows.

10. The method of claim 9 wherein said windows are in a rectangular arrangement.

11. The method of claim 10 wherein said operator indicating is a rectangular region.

12. The method of claim 11 wherein said at least for windows are generally at the corners of said rectangular region.

13. The method of claim 9 wherein said plurality of windows includes at least six windows.

14. The method of claim 13 wherein at least two of said windows are between respective pairs of the other windows.