Lens measuring method and device for determining decenter and tilt of the lens

• US 7,535,557 B2
• Filed: 08/31/2006
• Issued: 05/19/2009
• Est. Priority Date: 09/06/2005
• Status: Expired due to Fees

• Current Assignee: National Applied Research Laboratories (Government of The Republic of China)
• Original Assignee: Instrument Technology Research Center
• Inventors: Yu, Jung-Ru, Wu, Wen-Hong, Huang, Kuo-Cheng, Lee, Chien-Shing
• Primary Examiner(s): Connolly; Patrick J
• Assistant Examiner(s): Richey; Scott M
• Application Number:
  US11/513,601
• Publication Number:
  US 20070201037A1
• Time in Patent Office: 992 Days
• Field of Search: 356/124, 356/127, 356/508, 356510-512, 359/827
• US Class Current: 356/127
• CPC Class Codes: G01B 11/272 using photoelectric detection means

Abstract

A device for measuring a lens, comprising a first interferometer having a first optical axis and carried on a first adjustment base, a lens holder for holding the lens having a first surface having a first lens optical axis and a second surface having a second lens optical axis, and a platen having a sliding rail and carrying the first adjustment base and the lens holder thereon, wherein the lens holder is movable on the sliding rail, wherein each of the first adjustment base and the lens holder has a tetra-axis adjustment mechanism through which a relative positional relationship of the first optical axis of the first interferometer and the first lens optical axis of the first surface of the lens is adjustable.

Claims

1. A device for measuring a lens, comprising:

a first interferometer having a first optical axis and carried on a first adjustment base;

a lens holder for holding the lens having a first mirror surface having a first lens optical axis and a second mirror surface having a second lens optical axis, wherein the lens holder has a 180-degree overturn mechanism; and

a platen having a sliding rail and carrying the first adjustment base and the lens holder thereon, wherein the lens holder is movable on the sliding rail,

wherein each of the first adjustment base and the lens holder has a tetra-axis adjustment mechanism through which a relative positional relationship of the first optical axis of the first interferometer and the first lens optical axis of the first mirror surface of the lens is adjustable.

2. The device as claimed in claim 1, wherein the tetra-axis adjustment mechanism comprises two translation axes and two rotation axes.

3. The device as claimed in claim 1, wherein the first and second lens optical axes of the first and second mirror surfaces are calibrated in turn with respect to the first optical axis of the first interferometer by using the 180-degree overturn mechanism.

4. The device as claimed in claim 1, further comprising a second interferometer having a second lens optical axis and disposed on a second adjustment base on the platen to measure a relative positional relationship of the second lens optical axis of the second mirror surface and the second optical axis of the second interferometer.

5. A method for measuring a decenter amount and a tilt amount of a lens, comprising the steps of:

providing an interferometer having an optical axis and the lens, wherein the lens has a first lens optical axis and a second lens optical axis;

arranging the optical axis of the interferometer and the first lens optical axis of the first mirror surface into having a first specific relative positional relationship therebetween;

rotating the lens by 180-degree around an axis perpendicular to the optical axis of the interferometer;

adjusting the second optical axis of the lens and the optical axis of the interferometer into having a second specific relationship therebetween and recording a first adjusted translation amount Δ

y, a second adjusted translation amount Δ

z, a first adjusted angular amount Δ

θ

y and a second adjusted angular amount Δ

θ

z required to be adjusted; and

calculating the respective one of the decenter amount δ and

the tilt amount Δ

θ

existing between the first and second lens optical axes according to the first and second adjusted translation amounts Δ

y and Δ

z and the first and second adjusted angular amounts Δ

θ

y and Δ

θ

z.

6. The method as claimed in claim 5, wherein each of the first and second specific relationships is a relationship where the optical axis of the interferometer and the first and second lens optical axes of the first and second mirror surfaces totally coincide with each other.

7. The method as claimed in claim 6, wherein the optical axis of the interferometer and the first and second lens optical axes of the first and second mirror surfaces are adjusted to totally coincide with one another by observing interfering bands formed as an interfering graph on the lens.

8. The method as claimed in claim 7, wherein a distance between the lens and the interferometer is adjusted to present the interfering bands on the lens to the interferometer.

9. The method as claimed in claim 7, wherein the optical axis of the interferometer and the first and second lens optical axes of the lens are adjusted to totally coincide with one another by observing whether the interfering bands are formed as concentric rings and whether the concentric rings are positioned at a center of the interfering graph.

10. The method as claimed in claim 5, wherein the first and second specific relationships are identical to each other.

11. A method for measuring a decenter amount and a tilt amount of a lens, comprising the steps of:

providing a first interferometer having a first optical axis, a second interferometer having a second optical axis and the lens, wherein the lens has a first mirror surface having a first lens optical axis and a second mirror surface having a second lens optical axis, and the first and second interferometers face the first and second mirror surfaces of the lens respectively;

adjusting the second interferometer and the lens so that the second lens optical axis of the second mirror surface and the second optical axis of the second interferometer have a second specific relative positional relationship therebetween;

adjusting the second lens optical axis of the second mirror surface of the lens and the second optical axis of the second interferometer into having a second specific relative positional relationship therebetween and recording a first adjusted translation amount Δ

y, a second adjusted translation amount Δ

z, a first adjusted angular amount Δ

θ

y and a second adjusted angular amount Δ

θ

z; and

calculating the decenter amount δ and

the tilt amount Δ

θ

existing between the first and second lens optical axes of the first and second mirror surfaces according to the first and second specific relative positional relationships and the first and second adjusted translation amounts Δ

y and Δ

z and the first and second adjusted angular amounts Δ

θ

y and Δ

θ

z.

12. The method as claimed in claim 11, wherein each of the first and second specific relationships is a relationship where the first and second optical axes of the first and second interferometers and the first and second lens optical axes of the first and second mirror surfaces totally coincide with one another.

13. The method as claimed in claim 12, wherein the optical axes of the first and second interferometers and the first and second lens optical axes of the first and second mirror surfaces are adjusted to totally coincide with one another by observing interfering bands forming an interfering graph on the lens.

14. The method as claimed in claim 13, wherein a first distance between the lens and the first interferometer and a second distance between the lens and the second interferometer are adjusted respectively to present the interfering graph on the lens to the interferometer.

15. The method as claimed in claim 13, wherein the optical axes of the first and second interferometers and the first and second lens optical axes of the first and second mirror surfaces are adjusted to totally coincide with one another by observing whether the interfering bands are formed as concentric rings and whether the concentric rings are positioned at a center of the interfering graph.

16. The method as claimed in claim 11, wherein the first and second specific relationships are identical to each other.