Embedded fiber acoustic sensor for CMP process endpoint

• US 7,537,511 B2
• Filed: 03/14/2006
• Issued: 05/26/2009
• Est. Priority Date: 03/14/2006
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Kistler, Rodney C.
• Primary Examiner(s): Morgan; Eileen P.
• Application Number:
  US11/374,867
• Publication Number:
  US 20070218806A1
• Time in Patent Office: 1,169 Days
• Field of Search: 451/5, 451/6, 451/8, 451/10, 451/11, 451/41, 451/285, 451/287, 451/526, 451/533
• US Class Current: 451/5
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 37/205 provided with a window for inspecting the surface of the work being lapped
• CPC Class Codes: B24B 49/16 taking regard of the load

Abstract

Devices, systems and methods for monitoring characteristics of semiconductor substrates and workpieces during planarization and for endpointing planarization processes are provided. The invention utilizes a fiber optic contact sensor incorporated into a planarizing pad or pad-subpad assembly for process monitoring of mechanical energy (e.g., mechanical vibration) and acoustical energy (e.g., ultrasonic vibration) that allows an operator to determine status and/or an endpoint of a planarizing or polishing process. In another embodiment, the invention utilizes a fiber optic contact sensor incorporated into a table support for a planarizing pad.

Claims

1. A CMP planarizing pad, comprising:

a fiber optic impact sensor for monitoring a surface of a substrate, the impact sensor embedded within the planarizing pad and operable to transmit light signals therethrough which light signals are varied solely in response to vibrational energy, acoustic energy, or a combination thereof conveyed to the impact sensor, the energy occurring from contact of the pad with the substrate surface during CMP and detected by the sensor to monitor the surface of the substrate.

2. The pad of claim 1, wherein the sensor comprises a cable arranged within the pad to define a wafer track.

3. The pad of claim 2, wherein the sensor cable is continuous about the wafer track.

4. The pad of claim 2, wherein the sensor cable is situated in one or more distinct sections of the wafer track.

5. A CMP planarizing pad, comprising:

a subpad attached thereto, and a fiber optic impact sensor for monitoring a surface of a substrate, the impact sensor situated between the planarizing pad and the subpad, the impact sensor operable to transmit light signals therethrough, which light signals are varied solely in response to vibrational energy, acoustic energy, or a combination thereof conveyed to the impact sensor, the energy occurring from contact of the pad with the substrate surface during CMP and detected by the sensor to monitor the surface of the substrate.

6. A subpad for a CMP planarizing pad, comprising:

a fiber optic impact sensor cable for monitoring a surface of a substrate, the impact sensor cable situated within the subpad, the impact sensor operable to transmit light signals therethrough, which light signals are varied solely in response to vibrational energy, acoustic energy, or a combination thereof conveyed to the impact sensor, the energy occurring from contact of the CMP pad with the substrate surface during CMP and detected by the sensor to monitor the surface of the substrate.

7. The subpad of claim 6, wherein the sensor cable is arranged within the subpad to define a wafer track.

8. The subpad of claim 6, comprising a compressible material.

9. The subpad of claim 8, wherein the compressible material is selected from the group consisting of polyurethane foam and felt.

10. A CMP planarizing pad, comprising:

a subpad attached thereto and a fiber optic impact sensor situated within the subpad, the impact sensor for monitoring a surface of a substrate and operable to transmit light signals therethrough, which light signals are varied solely in response to vibrational energy, acoustic energy, or a combination thereof conveyed to the impact sensor, the energy occurring from contact of the CMP pad with the substrate surface during CMP and detected by the sensor to monitor the surface of the substrate.

11. A CMP planarizing pad, comprising:

a fiber optic impact sensor for monitoring a surface of a substrate, the impact sensor configured to transmit signals therethrough, which light signals are varied solely in response to vibrational energy, acoustic energy, or a combination thereof conveyed to the impact sensor, the energy occurring from contact of the CMP pad with the substrate surface during CMP and detected by the sensor to monitor the surface of the substrate.

12. The pad of claim 11, wherein the sensor comprises a cable situated to define an oval or circular array on the pad.

13. The pad of claim 12, wherein the cable is continuous about said oval or circular array.

14. The pad of claim 12, wherein the cable is situated in discrete sections about said oval or circular array.

15. The pad of claim 11, wherein the sensor is situated within the pad.

16. The pad of claim 11, further comprising a subpad attached thereto.

17. The pad of claim 16, wherein the sensor is situated between the pad and the subpad.

18. The pad of claim 16, wherein the sensor is situated within the subpad.

19. The pad of claim 11, comprising abrasive particles.

20. The pad of claim 11, situated on a support.

21. The pad of claim 11, wherein the sensor is configured to convey a light source to a receiver.

22. The pad of claim 21, wherein intensity of the light source is varied by impact of vibrations from frictional contact of the planarizing pad with a substrate.

23. The pad of claim 21, wherein intensity of the light source is varied by impact of acoustic emissions from frictional contact of the planarizing pad with a substrate.