Lithographic apparatus and device manufacturing method utilizing a substrate handler

• US 7,538,857 B2
• Filed: 06/21/2005
• Issued: 05/26/2009
• Est. Priority Date: 12/23/2004
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Luttikhuis, Bernardus Antonius Johannes, Jacobs, Hernes, Van Der Schoot, Harmen Klaas, Vosters, Petrus Matthijs Henricus
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/157,201
• Publication Number:
  US 20060139616A1
• Time in Patent Office: 1,435 Days
• Field of Search: 355/53, 355 72- 76
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

A substrate handler for moving a substrate relative to a substrate table of a lithographic apparatus. The substrate handler comprises at least one support surface or platform adapted to carry a plurality of independent substrates simultaneously. The substrate handler adapted to load substrates onto and unload substrates from the substrate table before and after exposure.

Claims

1. A substrate handler, comprising:

a plurality of support surfaces that are configured to carry a plurality of independent substrates simultaneously,

wherein the substrate handler moves each respective one of the plurality of independent substrates relative to a substrate table of a lithographic apparatus,

wherein the substrate handler moves substrates to and from a surface of the substrate table before and after exposure,

wherein the plurality of support surfaces are coupled together, and

wherein a respective support surface of the plurality of support surfaces comprises a substrate transfer device that moves the substrate on or off the respective support surface.

2. The substrate handler of claim 1, wherein the respective support surface is sized to accommodate the plurality of substrates simultaneously.

3. The substrate handler of claim 1, wherein the substrate handler comprises:

first and second support surfaces, each of said first and second support surfaces being suitably sized to accommodate at least one substrate.

4. The substrate handler of claim 3, wherein:

the first support surface is disposed on one side of a projection system; and

the second support surface is disposed on an opposite side of the projection system.

5. The substrate handler of claim 3, wherein the first and second support surfaces are disposed on the same side of the projection system.

6. The substrate handler of claim 3, wherein first and second support surfaces are individually moveable with respect to the substrate table.

7. The substrate handler of claim 3, wherein the first and second support surfaces are fixed relative to one another and moveable together with respect to the substrate table.

8. The substrate handler of claim 3, wherein:

the first support surface is an upper support surface; and

the second support surface is a lower support surface.

9. The substrate handler of claim 3, further comprising at least one spacer portion between the first and second support surfaces.

10. The substrate handler of claim 9, wherein the spacer portion is pivotally attached between the first and second support surfaces and pivots between a first configuration, in which the first and second support surfaces are substantially apart, and a second configuration in which the first and second support surfaces are substantially together.

11. The substrate handler of claim 1, wherein the substrate transfer device comprises at least one roller in contact with the substrate, the roller being adapted to rotate such that, upon rotation, the substrate is moved with respect to the support surface.

12. The substrate handler of claim 1, wherein the transfer device comprises a plurality of pivotal members that are pivotally movable between a first position, in which they are upstanding from the support, and a second position, in which they are in a stowed configuration.

13. The substrate handler of claim 1, wherein the transfer device comprises:

a transfer member extending substantially perpendicular to the direction of transfer; and

a drive device that translates the transfer member in a direction substantially parallel to the direction of transfer.

14. The substrate handler of claim 13, wherein the transfer member is an elongate bar that extends across the substrate surface and is connected to that drive device flanking the surface.

15. The substrate handler of claim 14, wherein the support surface has at least one groove and there is provided at least one finger for translation in said groove and for holding the substrate, the finger being connected to the elongate bar.

16. The substrate handler of claim 1, wherein the substrate handler comprises a pre-conditioning unit.