MEMS-based sensor for lubricant analysis

• US 7,541,004 B2
• Filed: 11/12/2004
• Issued: 06/02/2009
• Est. Priority Date: 11/12/2004
• Status: Expired due to Fees

• Current Assignee: Predict, Inc.
• Original Assignee: Predict, Inc.
• Inventors: Niksa, Andrew J., Fousek, James D.
• Primary Examiner(s): Alexander; Lyle A.
• Assistant Examiner(s): WHITE, DENNIS MICHAEL
• Application Number:
  US10/987,874
• Publication Number:
  US 20060105467A1
• Time in Patent Office: 1,663 Days
• Field of Search: 422/82.01, 422/82.02, 436/150, 324/698
• US Class Current: 422/82.02
• CPC Class Codes: G01N 27/126 comprising organic polymers

Abstract

A fluid contamination analyzer employs one or more MEMS-based sensors. The sensors are incorporated into probes or alternatively may be employed in an in-line analyzer residing in the fluid. The sensors, which can be selective to detect a distinct contaminant within the fluid, sense an impedance of the fluid, which is a function of its contamination and communicates the impedance to analysis circuitry.

Claims

1. A fluid contamination analyzer, comprising:

a reference MEMS-based sensor disposed within a reference housing, said reference housing containing a substantially contaminant-free volume of the fluid being analyzed; and

a plurality of sample MEMS-based sensors disposed adjacent the reference housing within a fluid;

wherein the reference sensor and the sample sensors further comprise;

a substrate;

a plurality of electrodes formed over the substrate; and

a contaminant selective layer disposed adjacent at least one of (i) the electrodes or (ii) the substrate, said layer being selective to attract a predetermined contaminant within the fluid;

wherein when a fluid contacts the sensor an impedance of the fluid may be determined using the electrodes of the sensor, thereby providing an indication of fluid contamination;

a plate electrode disposed over the reference sensor and at least one sample sensor of the plurality of sample sensors, wherein when a fluid is disposed between the plate electrode and the MEMS based sensors an impedance of the fluid is determined using the plate electrode and at least one electrode of the MEMS based sensors;

associated with each sensor, a first switch operatively coupled to a first electrode of the plurality of electrodes;

a second switch operatively coupled to a second electrode of the plurality of electrodes;

a third switch operatively coupled to the plate electrode; and

a fourth switch operatively coupled to the first electrode and the second electrode

wherein the plurality of switches selectively configure the fluid contamination analyzer to measure an impedance between the plate electrode and at least one electrode of the at least one MEMS based sensor or between and adjacent to the electrodes of the MEMS based sensor.

2. The fluid contamination analyzer according to claim 1, wherein the contaminant selective layer comprises a top layer disposed over the electrodes.

3. The fluid contamination analyzer according to claim 2, wherein the contaminant selective layer is a low-K dielectric material.

4. The fluid contamination analyzer according to claim 3, wherein the low-K dielectric material is chosen from the group consisting of nanopourous silica, hydrogensilsesquioxanes, teflon-AF (Polytetrafluoethylene) and Silicon Oxyflouride.

5. The fluid contamination analyzer according to claim 1, wherein the electrodes are formed from the group consisting of tungsten, platinum, gold, chrome, aluminum, polysilicon, titanium, nickel, copper and silver.

6. The fluid contamination analyzer according to claim 1, wherein the plurality of electrodes are interdigitated.

7. The fluid contamination analyzer according to claim 6, wherein a spacing between adjacent electrodes is between about 1 micron to about 250 microns.

8. The fluid contamination analyzer according to claim 6, wherein a spacing between adjacent electrodes is less than 1 micron.

9. The fluid contamination analyzer according to claim 1, further comprising at least one temperature sensor for measuring a temperature of the fluid in contact with the reference sensor and/or sample sensors.

10. The fluid contamination analyzer according to claim 9, wherein the temperature of the fluid is used to compensate the impedance measurement of the fluid.

11. The fluid contamination analyzer according to claim 9, wherein the temperature sensor is selected from the group consisting of a thermocouple, a thermistor and a resistance temperature detector (RTD).

12. The fluid contamination analyzer according to claim 9, wherein temperature data and/or sensor data is communicated to a remote monitoring device through a communications link.

13. The fluid contamination analyzer according to claim 12, wherein the communications link is a wireless communications link.

14. The fluid contamination analyzer according to claim 1, further comprising a non-volatile memory module for storing data.

15. The fluid contamination analyzer of according to claim 14, wherein the data stored in the non-volatile memory module is at least one of a customer name, a serial number of the sensor, a manufacture date of the sensor, a calibration factor of the sensor, a temperature of the fluid, a sensor type, a location of sensor, a maintenance date of the sensor, a selected reference oil, or an impedance of the fluid.

16. The fluid contamination analyzer according to claim 14, wherein the non-volatile memory module is an electrically erasable programmable read only memory module (EEPROM).

17. The fluid contamination analyzer according to claim 1, further comprising a temperature sensor for measuring a temperature of the fluid in contact with the sensor and a non-volatile memory module for storing data.

18. The fluid contamination analyzer according to claim 1, wherein the plurality of switches are MEMS switches.

19. The fluid contamination analyzer according to claim 1, wherein the plurality of switches are formed on the substrate of the MEMS based sensor.

20. The fluid contamination analyzer according to claim 1, wherein the plate electrode and the plurality of electrodes are formed from the group consisting of tungsten, platinum, gold, chrome, aluminum, polysilicon, titanium, nickel, copper and silver.

21. The fluid contamination analyzer according to claim 1, wherein the plate electrode is about 1 micron to about 10,000 microns thick.

22. The fluid contamination analyzer according to claim 1, wherein the plate electrode is substantially parallel to a top surface of the at least one MEMS based sensor.

23. The fluid contamination analyzer of claim 1, wherein the substrate is at least one of a glass substrate or a quartz substrate.

24. The fluid contamination analyzer of claim 1, wherein the plurality of electrodes have a width between about 1 micron to about 50 microns.

25. The fluid contamination analyzer of claim 1, further comprising a selectively activatable electromagnet in proximity to the sample sensors, wherein the magnet may be activated and deactivated in response to control signals and provides a magnet gradient across the sample sensors, wherein the magnet gradient provides a contaminant distribution across the sample sensors.

26. A method of analyzing the quality of a sample fluid, wherein the fluid acts as a dielectric on the sensor, comprising the steps of:

immersing a sample sensor of claim 1 in the sample fluid;

immersing a reference sensor of claim 1 in a substantially contaminant-free reference fluid, wherein the reference fluid and the sample fluid are the same type of fluid;

measuring an impedance of the fluid near the surface of the sample sensor and the reference sensor; and

correlating the quality of the sample fluid to the measured impedance of the sample fluid and the reference fluid.

27. The method of claim 26, wherein the step of measuring an impedance includes the step of measuring at least one of capacitance, resistance, reactance, dissipation factor, phase angle, admittance, susceptance or conductance.