Protective layer for a body, and process and arrangement for producing protective layers

• US 7,541,102 B2
• Filed: 09/08/2004
• Issued: 06/02/2009
• Est. Priority Date: 09/13/2003
• Status: Active Grant

• Current Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Original Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Inventors: Krause, Cora, Dzick, Jürgen, Klippe, Lutz
• Primary Examiner(s): Speer; Timothy M
• Application Number:
  US10/936,368
• Publication Number:
  US 20050084705A1
• Time in Patent Office: 1,728 Days
• Field of Search: None
• US Class Current: 428/701
• CPC Class Codes: C03C 17/002 for flat glass, e.g. float glass
• CPC Class Codes: C03C 17/22 with other inorganic material C03C17/34, C03C17/44 take precedence
• CPC Class Codes: C03C 17/225 Nitrides
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 2217/22 ZrO2
• CPC Class Codes: C03C 2217/23 Mixtures
• CPC Class Codes: C03C 2217/77 Coatings having a rough surface
• CPC Class Codes: C03C 2218/155 by reactive sputtering
• CPC Class Codes: C03C 2218/156 by magnetron sputtering
• CPC Class Codes: C03C 2218/322 Oxidation
• CPC Class Codes: C23C 14/3442 using an ion beam
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: C23C 16/405 of refractory metals or yttrium
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: C23C 30/00 Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process C23C26/00, C23C28/00 take precedence
• CPC Class Codes: Y10T 428/12576 Boride, carbide or nitride component
• CPC Class Codes: Y10T 428/1259 Oxide
• CPC Class Codes: Y10T 428/12618 Plural oxides
• CPC Class Codes: Y10T 428/12771 Transition metal-base component

Abstract

A protective layer having at least one hard-material layer is provided. The hard-material layer is formed from one or more of the following materials metal oxide, metal nitride, metal carbide, metal oxynitride, metal carbonitride, and metal oxycarbonitride. The hard-material layer has laterally closely cohesive, crystalline columns which grow perpendicular to the surface of the body. In some embodiments, the crystalline columns have a lateral dimension which is on average less than 1 μm, preferably less than 200 nm, and which predominantly has crystal orientations which, in the case of columnar growth, have little tendency to widen out, the surface roughness of the hard-material layer having an R_a value of less than 50 nm, preferably less than 20 nm.

Claims

1. A glass-ceramic hotplate, comprising:

a nonmetallic, crystalline body having a surface, and

a protective layer, the protective layer comprising;

at least one hard-material layer,

wherein said at least one hard-material layer has a morphologically dense column structure that grows substantially perpendicular to the surface of the body and comprises zirconium oxide in a temperature-stable crystal phase.

2. The glass-ceramic hotplate as claimed in claim 1, wherein said morphologically dense column structure is at least 50% crystalline.

3. The glass-ceramic hotplate as claimed in claim 1, wherein said morphologically dense column structure has a plurality of columns, each column in said plurality of columns has on average a lateral dimension of less than 1 μ

m.

4. The glass-ceramic hotplate as claimed in claim 1, wherein said at least one hard-material layer comprises silicon nitride.

5. The glass-ceramic hotplate as claimed in claim 1, wherein said at least one hard-material layer further comprises at least one further component admixed to said zirconium oxide for providing said temperature-stable crystal phase.

6. The glass-ceramic hotplate as claimed in claim 5, wherein said at least one further component comprises at least one oxide selected from the group consisting of yttrium oxide, calcium oxide, magnesium oxide, tantalum oxide, niobium oxide, scandium oxide, titanium oxide, the lanthanoid oxide group, and any combinations thereof.

7. The glass-ceramic hotplate as claimed in claim 5, wherein said at least one further component comprises from 0.5 to 50 mol % of Y₂O₃.

8. The glass-ceramic hotplate as claimed in claim 7, wherein said at least one further component comprises about 4 mol % of Y₂O₃.

9. The glass-ceramic hotplate as claimed in claim 1, wherein said at least one hard-material layer further comprises hafnium oxide.

10. A cooking hob, comprising:

a coating which includes a hard-material layer formed from a material selected from the group consisting of metal oxide, metal nitride, metal carbide, metal oxynitride, metal carbonitride, metal oxycarbonitride, and any combinations thereof, wherein said at least one hard-material layer has a morphologically dense column structure that grows substantially perpendicular to a surface of the cooking hob.

11. A cooking device, comprising:

a coating which includes a hard-material layer formed from a material selected from the group consisting of metal oxide, metal nitride, metal carbide, metal oxynitride, metal carbonitride, metal oxycarbonitride, and any combinations thereof, wherein said at least one hard-material layer has a morphologically dense column structure that grows substantially perpendicular to a surface of the cooking device.