Optical scanning using vibratory diffraction gratings
First Claim
1. An optical scanning system, comprising:
- a mass platform;
at least one support structure connected to the mass platform though at least one flexural structure;
at least one diffraction grating patterned on the mass platform; and
at least one driving actuator, which drives the mass platform to vary the orientation of the grating lines through an in-plane oscillatory rotational motion of the mass platform, about a center of rotation which is fixed or variable,wherein said in-plane oscillatory rotational motion is combined with out-of-plane motion, that is less than 100 Hz, and that is at least one of rotational or translational motion.
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Abstract
An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that connects the mass platform to at least one fixed support, and at least one driving actuator that drives the mass platform into an in-plane vibratory motion which can be rotational and/or translational. The apparatus may also be formed by a mass platform having at least one diffraction grating formed thereon as the scanning element, at least one driving actuator connected to the mass platform through at least one flexure structure. The driving actuator drives the mass platform into an in-plane vibratory motion.
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Citations
23 Claims
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1. An optical scanning system, comprising:
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a mass platform; at least one support structure connected to the mass platform though at least one flexural structure; at least one diffraction grating patterned on the mass platform; and at least one driving actuator, which drives the mass platform to vary the orientation of the grating lines through an in-plane oscillatory rotational motion of the mass platform, about a center of rotation which is fixed or variable, wherein said in-plane oscillatory rotational motion is combined with out-of-plane motion, that is less than 100 Hz, and that is at least one of rotational or translational motion.
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2. An optical scanning system, comprising:
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mass platform; at least one support structure connected to the mass platform through at least one flexural structure; at least one diffraction grating patterned on the mass platform; and at least one driving actuator, which drives the mass platform to vary the orientation of the grating lines through an in-plane oscillatory rotational motion of the mass platform, about a center of rotation which is fixed or variable, wherein the flexural structure is a first flexural structure connected to the mass platform, and the first flexural structure transversely connects to a second flexural structure, and the second flexural structure is connected to the support structure. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification