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Optical scanning using vibratory diffraction gratings

  • US 7,542,188 B2
  • Filed: 12/23/2004
  • Issued: 06/02/2009
  • Est. Priority Date: 01/20/2004
  • Status: Expired due to Fees
First Claim
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1. An optical scanning system, comprising:

  • a mass platform;

    at least one support structure connected to the mass platform though at least one flexural structure;

    at least one diffraction grating patterned on the mass platform; and

    at least one driving actuator, which drives the mass platform to vary the orientation of the grating lines through an in-plane oscillatory rotational motion of the mass platform, about a center of rotation which is fixed or variable,wherein said in-plane oscillatory rotational motion is combined with out-of-plane motion, that is less than 100 Hz, and that is at least one of rotational or translational motion.

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