Time weighted moving average filter
First Claim
1. A method for estimating a state associated with a process, comprising:
- receiving a state observation associated with the process, the state observation having an associated process time indicating a time at which the process was conducted;
generating a weighting factor to discount the state observation as a function of a value of the process time; and
generating a state estimate based on the discounted state observation.
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Abstract
A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.
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Citations
21 Claims
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1. A method for estimating a state associated with a process, comprising:
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receiving a state observation associated with the process, the state observation having an associated process time indicating a time at which the process was conducted; generating a weighting factor to discount the state observation as a function of a value of the process time; and generating a state estimate based on the discounted state observation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A computer implemented method for filtering data, comprising:
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receiving a plurality of data elements, each data element having an associated time stamp; generating a weighting factor to discount each data element as a function of a value of the associated time stamp; and generating a data element estimate based on the discounted data elements. - View Dependent Claims (19)
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20. A system, comprising:
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a process tool operable to perform a process in accordance with an operating recipe; a metrology tool operable to generate a state observation associated with the process; and a process controller operable to receive the state observation, the state observation having an associated process time indicating a time at which the process was performed, generate a weighting factor to discount the state observation as a function of a value of the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.
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21. A system comprising:
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means for receiving a state observation associated with the process, the state observation having an associated process time indicating a time at which the process was conducted; means for generating a weighting factor to discount the state observation as a function of a value of the process time; and means for generating a state estimate based on the discounted state observation.
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Specification