Vacuum line and a method of monitoring such a line
First Claim
1. A vacuum line for pumping gas from a process chamber, the vacuum line comprising:
- a pump unit comprising a pump body and a motor;
a gas exhaust system;
first measurement means for measuring a functional parameter relating to the motor;
second measurement means for measuring a functional parameter relating to the exhaust system; and
prediction means for calculating the remaining lifetime of the vacuum line on the basis of a correlation between the measurement of the functional parameter relating to the motor provided by the first means and the measurement of the functional parameter relating to the exhaust system provided by the second means.
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Accused Products
Abstract
The present invention provides a vacuum line for pumping gas from a process chamber, the vacuum line comprising at least:
- a pump unit comprising a pump body and a motor;
- a gas exhaust system;
- first measurement means for measuring a functional parameter relating to the motor;
- second measurement means for measuring a functional parameter relating to the exhaust system; and
- prediction means for calculating the duration of use of the vacuum line.
The prediction means calculate the duration of utilization of the vacuum line prior to failure of the pump unit from the measurement of a functional parameter relating to the motor provided by the first means and the measurement of a functional parameter relating to the exhaust system provided by the second means. In a variant, the vacuum line further includes third measurement means for measuring a functional parameter relating to the pump body, and the prediction means calculate the duration of use while taking account of the measurement of this parameter.
15 Citations
16 Claims
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1. A vacuum line for pumping gas from a process chamber, the vacuum line comprising:
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a pump unit comprising a pump body and a motor; a gas exhaust system; first measurement means for measuring a functional parameter relating to the motor; second measurement means for measuring a functional parameter relating to the exhaust system; and prediction means for calculating the remaining lifetime of the vacuum line on the basis of a correlation between the measurement of the functional parameter relating to the motor provided by the first means and the measurement of the functional parameter relating to the exhaust system provided by the second means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of monitoring a vacuum line for pumping gas from a process chamber, the vacuum line comprising at least a pump unit comprising a pump body and a motor;
- a gas exhaust system;
first measurement means for measuring a functional parameter relating to the motor;
second measurement means for measuring a functional parameter relating to the exhaust system; and
prediction means for calculating the remaining lifetime of the vacuum line on the basis of the measurement of a functional parameter relating to the motor provided by the first means and the measurement of a functional parameter relating to the exhaust system provided by the second means, the method comprising;measuring a functional parameter relating to the motor; measuring a functional parameter relating to the gas exhaust system; correlating a variation in time of the measured functional parameter relating to the motor and of the measured functional parameter relating to the exhaust system; and deducing therefrom the remaining lifetime of the vacuum line. - View Dependent Claims (11, 12, 13, 14, 15, 16)
- a gas exhaust system;
Specification