Capacitive bulk acoustic wave disk gyroscopes
First Claim
1. Gyroscope apparatus, comprising:
- a substrate having a plane;
a bulk acoustic resonator element; and
a plurality of electrodes surrounding and separated from the resonator element by a very small capactive gaps, which electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the resonator;
wherein the gyroscope apparatus senses rate or angle of rotation about at least one axis in the plane of the substrate.
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Abstract
Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of electrodes surrounding and separated from the resonator element by very small capacitive gaps. The electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the resonator. Advantages include reduced size; higher Q, which improves noise and bias stability; larger bandwidth, and improved shock resistance. In addition, the high Q is maintained in atmospheric or near-atmospheric pressure which reduces the cost and complexity of the wafer-scale packaging of the gyroscope.
103 Citations
17 Claims
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1. Gyroscope apparatus, comprising:
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a substrate having a plane; a bulk acoustic resonator element; and a plurality of electrodes surrounding and separated from the resonator element by a very small capactive gaps, which electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the resonator; wherein the gyroscope apparatus senses rate or angle of rotation about at least one axis in the plane of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. Gyroscope apparatus, comprising:
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a handle substrate; a disk resonator element supported by the handle substrate; a plurality of electrodes surrounding and separated from the disk resonator element by very small capacitive gaps, which electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the disk resonator; and support electronics for excitation, readout and tuning of the disk resonator. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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Specification