Trench polysilicon diode

• US 7,544,545 B2
• Filed: 12/28/2005
• Issued: 06/09/2009
• Est. Priority Date: 12/28/2005
• Status: Active Grant

• Current Assignee: Vishay Siliconix
• Original Assignee: Vishay Siliconix
• Inventors: Pattanayak, Deva, Terrill, Kyle, Chen, Qufei, Xu, Robert
• Primary Examiner(s): Tran; Long K
• Application Number:
  US11/322,040
• Publication Number:
  US 20070145411A1
• Time in Patent Office: 1,259 Days
• Field of Search: 438/141, 438/983, 438/197, 438/206, 438/270, 438/212, 438/268, 438/272, 257/E21.355, 257/E21.356, 257/E21.357, 257/E21.358
• US Class Current: 438/141
• CPC Class Codes: H01L 27/0255 using diodes as protective elements
• CPC Class Codes: H01L 27/0629 in combination with diodes, or resistors, or capacitors
• CPC Class Codes: H01L 27/0814 Diodes only
• CPC Class Codes: H01L 29/16 including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 29/66106 Zener diodes
• CPC Class Codes: H01L 29/66136 PN junction diodes
• CPC Class Codes: H01L 29/66727 with a step of recessing the source electrode
• CPC Class Codes: H01L 29/66734 with a step of recessing the gate electrode, e.g. to form a trench gate electrode
• CPC Class Codes: H01L 29/7808 the other device being a breakdown diode, e.g. Zener diode
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236
• CPC Class Codes: H01L 29/866 Zener diodes
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Embodiments of the present invention include a method of manufacturing a trench polysilicon diode. The method includes forming a N−(P−) type epitaxial region on a N+(P+) type substrate and forming a trench in the N−(P−) type epitaxial region. The method further includes forming a insulating layer in the trench and filling the trench with polysilicon forming a top surface of the trench. The method further includes forming P+(N+) type doped polysilicon region and N+(P+) type doped polysilicon region in the trench and forming a diode in the trench wherein a portion of the diode is lower than the top surface of the trench.

Claims

1. A method of manufacturing a semiconductor device comprising:

forming a N−

(P−

) type epitaxial region on N+(P+) type substrate;

forming a polysilicon diode trench in said epitaxial region;

forming an insulating layer in said polysilicon diode trench;

filling said polysilicon diode trench with polysilicon;

implanting a P+(N+) type dopant, forming a P+(N+) type region of said polysilicon in said polysilicon diode trench;

implanting a N+(P+) type dopant, forming a N+(P+) type region of said polysilicon in said polysilicon diode trench to form a polysilicon diode in said polysilicon diode trench, wherein a portion of said polysilicon diode is lower than said top surface of said polysilicon diode trench; and

forming a metal-oxide-semiconductor field effect transistor (MOSFET) transistor trench in said epitaxial region,

wherein, forming said diode is performed prior to forming said MOSFET transistor trench.

2. The method as described in claim 1 wherein said insulating layer comprises an oxide.

3. The method as described in claim 1 wherein said insulating layer has a breakdown voltage rating greater than a drain-source breakdown voltage of said MOSFET trench transistor.

4. The method as described in claim 1 wherein said insulating layer is a few thousand angstroms in thickness and said insulating layer thickness in said trench depends on its breakdown voltage requirement.

5. The method as described in claim 1 wherein said polysilicon diode is a Zener diode.

6. The method as described in claim 5 wherein said Zener diode is used for electrostatic discharge protection.

7. The method as described in claim 5 wherein said Zener diode is used for a clamping function.

8. The method as described in claim 1 wherein said polysilicon diode is used for temperature sensing.

9. The method as described in claim 1 wherein said N+(P+) type doped polysilicon in said trench is used as a resistor.

10. A method of manufacturing a trench polysilicon diode comprising:

forming a trench in a N−

(P−

) type epitaxial region on a N+(P+) type substrate;

forming an insulating layer in said trench wherein said insulating layer lines said trench;

filling said trench with a polysilicon forming a top surface of said trench;

forming a diode in said body region wherein a portion of said diode is lower than said top surface of said trench; and

forming a MOSFET transistor trench on said epitaxial region,

wherein forming said diode is performed prior to forming said MOSFET transistor trench.

11. The method as described in claim 10 further comprising:

forming a plurality of Zener diodes in said N−

(P−

) type epitaxial region and coupling said plurality of Zoner diodes in parallel to protect said transistor from electrostatic discharge.

12. The method as described in claim 10 wherein said insulating layer comprises an oxide.

13. The method as described in claim 10 wherein said insulating layer in said trench has a breakdown voltage rating greater than a drain-source breakdown voltage of said MOSFET trench transistor.

14. The method as described in claim 10 wherein said insulating layer is of a few thousand angstroms in thickness and said insulating layer thickness in said trench depends on its breakdown voltage requirement.

15. The method as described in claim 10 wherein formation of said diode occurs prior to the formation of a MOSFET trench of said transistor.

16. The method as described in claim 10 wherein said diode is a Zener diode.

17. The method as described in claim 16 wherein said Zener diode is used for electrostatic discharge protection.

18. The method as described in claim 16 wherein said Zener diode is used for a clamping function.

19. The method as described in claim 10 wherein said diode is a trench diode and is used for temperature sensing.

20. The method as described in claim 10 wherein said N+(P+) type doped polysilicon in said trench is used as a resistor.